Optical probe having tapered wave guide and scanning near-field optical microscope utilizing optical probe

• US 6,104,030 A
• Filed: 03/21/1997
• Issued: 08/15/2000
• Est. Priority Date: 04/11/1996
• Status: Expired due to Fees

• Current Assignee: SII NanoTechnology Inc. (Hitachi High- Tech Corporation)
• Original Assignee: Seiko Instruments Incorporated (Seiko Group)
• Inventors: Chiba, Norio, Muramatsu, Hiroshi, Nakajima, Kunio
• Primary Examiner(s): Anderson, Bruce C.
• Application Number:
  US08/821,532
• Time in Patent Office: 1,243 Days
• Field of Search: 250/306, 250/307, 250/423 F
• US Class Current: 850/57
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 60/22 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G02B 6/262 Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
• CPC Class Codes: Y10S 977/862 Near-field probe

Abstract

An optical probe comprises a waveguide having an optical opening for passing light therethrough, the waveguide terminating in a sharp tip at a distal end thereof. A metal film is coated on the distal end of the waveguide except for the optical opening. The metal film has a curved surface gradually retreating from the optical opening to an outer circumference of the waveguide.

Claims

1. An optical probe comprising:

a waveguide having an optical opening for passing light therethrough, the optical opening forming a sharp tip at a distal end of the waveguide; and

a metal film coated on the entire distal end of the waveguide except for the optical opening, the metal film having a curved surface gradually retreating from the optical opening to an outer circumference of the waveguide.

2. An optical probe comprising:

a waveguide having an optical opening for passing light therethrough, the waveguide terminating in a sharp tip at a distal end thereof;

a first coating film disposed on the distal end of the waveguide; and

a second coating film disposed directly on the first coating film and having a tapered portion in the vicinity of the sharp tip, the first coating film and the second coating film being composed of the same material.

3. An optical probe according to claim 2;

wherein the first coating film and the second coating film comprise metal films having a high reflectivity.

4. An optical probe according to claim 2;

wherein the first coating film is disposed on the entire distal end of the waveguide.

5. An optical probe according to claim 2, wherein the second coating film has a first tapered surface portion positioned in the vicinity of the sharp tip at a first preselected angle relative to a central axis of the waveguide, and a second tapered surface portion contiguous with the first tapered surface portion and disposed at a second preselected angle relative to the central axis of the waveguide different from the first preselected angle.

6. A scanning near-field optical microscope for measuring topographical and optical characteristics of a sample, comprising:

an optical probe comprised of a waveguide having an optical opening for passing light therethrough, the optical opening forming a sharp tip at a distal end of the optical probe, and a metal film coated on the entire distal end of the optical probe except for the optical opening, the metal film having a curved surface gradually retreating from the optical opening to an outer circumference of the waveguide;

vibrating means for producing vertical or horizontal vibrations relatively between the sharp tip of the optical probe and the sample;

displacement detecting means for detecting displacement of the optical probe; and

control means for controlling a distance between the sharp tip of the optical probe and a surface of the sample on the basis of a detecting signal outputted by the detecting means.

7. An optical probe comprising:

a waveguide having an optical opening for passing light therethrough, the waveguide terminating in a sharp tip at a distal end thereof; and

a reflective material coated on the entire distal end of the waveguide except for the optical opening, the reflective material having a curved surface portion gradually retreating from the optical opening to an outer circumference of the waveguide.

8. An optical probe according to claim 7;

wherein the reflective material has a tapered surface portion contiguous with the curved surface portion and disposed on the outer circumference of the waveguide.

9. An optical probe according to claim 7;

wherein the reflective material comprises a metal selected from the group consisting of gold, platinum, aluminum, chromium and nickel.

10. An optical probe comprising:

a waveguide having a central axis and an optical opening for passing light therethrough, the waveguide terminating in a sharp tip at a distal end thereof;

a first reflecting material disposed on the distal end thereof except for the optical opening and disposed on an outer circumference of the waveguide; and

a second reflecting material disposed on an outer circumference of the first reflecting material, the second reflecting material second reflecting material having a first tapered surface portion disposed in the vicinity of the sharp tip at a first preselected angle relative to the central axis of the waveguide and a second tapered surface portion contiguous with the first tapered surface portion and disposed at a second preselected angle relative to the central axis of the waveguide different from the first preselected angle.

11. An optical probe as claimed in claim 10;

wherein the first reflecting material and the second reflecting material are composed of materials different from each other.

12. An optical probe as claimed in claim 11;

wherein the first reflecting material consists of a metal film and the second reflecting material consists of a non-metal film.

13. An optical probe according to claim 10;

wherein the first preselected angle is greater than the second preselected angle.

14. An optical probe according to claim 13;

wherein the outer circumference of the first reflecting material comprises a tapered surface; and

wherein the second tapered surface portion of the second reflecting material is generally parallel to the tapered surface of the first reflecting material.

15. An optical probe according to claim 10;

wherein. the outer circumference of the first reflecting material comprises a tapered surface; and

wherein the second tapered surface portion of the second reflecting material is generally parallel to the tapered surface of the first reflecting material.

16. An optical probe according to claim 10;

wherein the first reflecting material and the second reflecting material are composed of the same material.

17. A scanning near-field optical microscope for measuring topographical and optical characteristics of a sample, comprising:

an optical probe comprised of a waveguide having an optical opening for passing light therethrough, the waveguide terminating in a sharp tip at a distal end thereof, and a reflective material coated on the entire distal end of the waveguide except for the optical opening, the reflective material having a curved surface portion gradually retreating from the optical opening to an outer circumference of the waveguide;

vibrating means for producing vertical or horizontal vibrations relatively between the sharp tip of the optical probe and the sample;

displacement detecting means for detecting displacement of the optical probe; and

control means for controlling a distance between the sharp tip of the optical probe and a surface of the sample on the basis of a detecting signal outputted by the detecting means.

18. An optical probe according to claim 17;

wherein the reflective material has a tapered surface portion contiguous with the curved surface portion and disposed on the outer circumference of the waveguide.

19. An optical probe according to claim 17;

wherein the reflective material comprises a metal selected from the group consisting of gold, platinum, aluminum, chromium and nickel.