Schottky barrier detectors for visible-blind ultraviolet detection
First Claim
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1. A vertical geometry transparent Schottky barrier detector capable of detecting electromagnetic radiation in the range of 200 to 350 nm, said detector comprising several layers grown over basal plane sapphire substrates;
- said layers sequentially comprising;
a) a buffer layer comprising AlN;
b) a n+ doped layer comprising Alx Ga1-x N;
c) a n- doped active layer comprising Alx Ga1-x N; and
,d) a Schottky layer comprising paladium;
said detector further comprising ohmic contacts formed on the bottom doped layer.
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Abstract
The invention concerns the fabrication and characterization of vertical geometry transparent Schottky barrier ultraviolet detectors based on n- /n+ -GaN and AlGaN structures grown over sapphire substrates. Mesa geometry devices of different active areas were fabricated and characterized for spectral responsitivity, speed and noise characteristics. The invention also concerns the fabrication and characterization of an 8×8 Schottky barrier photodiode array on GaN with a pixel size of 200 μm by 200 μm.
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Citations
20 Claims
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1. A vertical geometry transparent Schottky barrier detector capable of detecting electromagnetic radiation in the range of 200 to 350 nm, said detector comprising several layers grown over basal plane sapphire substrates;
- said layers sequentially comprising;
a) a buffer layer comprising AlN; b) a n+ doped layer comprising Alx Ga1-x N; c) a n- doped active layer comprising Alx Ga1-x N; and
,d) a Schottky layer comprising paladium; said detector further comprising ohmic contacts formed on the bottom doped layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
- said layers sequentially comprising;
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11. An array of mesa type transparent Schottky barrier detectors suitable for visible-blind imaging;
- said detectors comprising several layers grown over basal plane sapphire substrates;
said layers sequentially comprising;a) a buffer layer comprising AlN; b) a n+ doped layer comprising Alx Ga1-x N; c) a n- doped active layer comprising Alx Ga1-x N; and
,d) a Schottky layer comprising palladium; said detectors further comprising ohmic contacts formed on each bottom doped layer. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
- said detectors comprising several layers grown over basal plane sapphire substrates;
Specification