Wedge magnet array for linear motor

• US 6,104,108 A
• Filed: 12/22/1998
• Issued: 08/15/2000
• Est. Priority Date: 12/22/1998
• Status: Expired due to Term

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Gery, Jean-Marc, Hazelton, Andrew J.
• Primary Examiner(s): Ramirez, Nestor
• Assistant Examiner(s): JONES, JUDSON
• Application Number:
  US09/219,545
• Time in Patent Office: 602 Days
• Field of Search: 310/12, 310/42
• US Class Current: 310/12.06
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: H02K 1/27 Rotor cores with permanent magnets
• CPC Class Codes: H02K 41/03 Synchronous motors; Motors moving step by step; Reluctance motors H02K41/035 takes precedence

Abstract

A linear motor, suitable to drive a photolithography positioning stage, incorporates a magnet array having transverse magnets and wedge magnets. The transverse magnets are spaced at regular intervals along a direction parallel with their magnetic polarities. Each transverse magnet is linked by a closed magnetic flux circuit with two adjacent wedge magnets having magnetic polarities oriented at an angle relative to the transverse magnet polarities. The local flux direction is substantially parallel to the magnetic polarity within each magnet, effectively enhancing magnetic flux density. Magnetic flux circuits are completed directly through the magnets and not through side rails, allowing selection of stronger, lighter-weight nonmagnetic side rail material. Wedge magnets with rectangular and trapezoidal cross-sectional shapes are described. Alternative array configurations contain two rows of complementary transverse and wedge magnets spaced on opposite sides of a coil array. Paired transverse magnets spaced across from one another have opposite polarities.

Claims

1. An apparatus comprising a magnet array suitable for a linear motor, having a first array segment including:

a transverse magnet having a magnetic polarity oriented substantially parallel to a first direction; and

a wedge magnet having a magnetic polarity oriented at an angle to said first direction;

wherein a closed magnetic flux circuit passes through said transverse magnet and said wedge magnet, having a direction such that the magnetic polarities of said transverse magnet and said wedge magnet are each aligned substantially parallel with the respective local directions of said magnetic flux circuit.

2. The apparatus of claim 1, wherein said transverse magnet and said wedge magnet are permanent magnets.

3. The apparatus of claim 2, wherein said permanent magnets are of neodymium iron boron.

4. The apparatus of claim 1, wherein a cross-sectional shape of said wedge magnet in a plane substantially parallel with said magnetic polarity of said wedge magnet is rectangular.

5. The apparatus of claim 1, wherein a cross-sectional shape of said wedge magnet in a plane substantially parallel with said magnetic polarity of said wedge magnet is trapezoidal.

6. The apparatus of claim 1, further comprising a second array segment adjacent said first array segment along said first direction, said second array segment comprising a second transverse magnet and a second wedge magnet, said second transverse magnet and said second wedge magnet having respective second magnetic polarities, wherein a second closed magnetic flux circuit passes through said second transverse magnet and said second wedge magnet.

7. The apparatus of claim 6, wherein the orientations of said second magnetic polarities and said second closed magnetic flux circuit are substantially laterally symmetric about a plane perpendicular to said first direction to corresponding orientations of the first magnetic polarities and the first closed magnetic flux circuit.

8. The apparatus of claim 1, further comprising a side rail adjacent and attached to said transverse magnet and said wedge magnet.

9. The apparatus of claim 1, further comprising a complementary array segment including:

a complementary transverse magnet having a magnetic polarity oriented substantially parallel to said first direction; and

a complementary wedge magnet having a magnetic polarity oriented at an angle to said first direction;

said complementary array segment being transversely spaced apart from said array segment;

wherein a complementary closed magnetic flux circuit passes through said complementary transverse magnet and said complementary wedge magnet.

10. The apparatus of claim 9, wherein said magnetic polarities of said transverse magnets and said wedge magnets and of said complementary transverse magnets and wedge magnets are disposed symmetrically about an axis passing substantially perpendicular to the plane of said magnetic polarities.

11. The apparatus of claim 1, further comprising a linear coil array of the linear motor cooperating with said magnet array.

12. The apparatus of claim 11, wherein said linear coil array includes a polygonal shaped coil.

13. A method of making a magnet array suitable for a linear motor, comprising the acts of:

assembling an array segment including a transverse magnet and a wedge magnet adjacent one another along a first direction, such that the magnetic polarity of said transverse magnet is oriented substantially parallel to said first direction and the magnetic polarity of said wedge magnet is oriented at an angle to said first direction;

wherein a closed magnetic flux circuit passes through said transverse magnet and said wedge magnet, having a direction such that the magnetic polarities of said transverse magnet and said wedge magnet are each aligned substantially parallel with the respective local directions of said magnetic flux circuit.

14. The method of claim 13, wherein said assembling includes the act of aligning a plurality of said transverse magnets and wedge magnets along said first direction, such that consecutive transverse magnets have alternating reversed magnetic polarities.

15. The method of claim 13, further comprising the act of attaching said transverse magnet and said wedge magnet to a side rail disposed adjacent said transverse magnet and said wedge magnet.

16. The method of claim 13, wherein said transverse magnet and said wedge magnet are permanent magnets.

17. The method of claim 16, wherein said permanent magnets are of neodymium iron boron.

18. The method of claim 13, wherein a cross-sectional shape of said wedge magnet in a plane substantially parallel with said magnetic polarity of said wedge magnet is rectangular.

19. The method of claim 13, wherein a cross-sectional shape of said wedge magnet in a plane substantially parallel with said magnetic polarity of said wedge magnet is trapezoidal.

20. The method of claim 13, further comprising assembling a complementary array segment including the acts of:

providing a complementary transverse magnet having a magnetic polarity oriented substantially parallel to said first direction;

assembling a complementary wedge magnet adjacently flanking said complementary transverse magnet along said first direction, said complementary wedge magnet having a magnetic polarity oriented at an angle to said first direction;

said complementary array segment being transversely spaced apart from said array segment; and

wherein a complementary closed magnetic flux circuit passes through said complementary transverse magnet and said complementary wedge magnet.

21. A method of operating a linear motor, comprising:

providing a magnet array, said magnet array comprising an array segment including a transverse magnet and a wedge magnet adjacent one another along a first direction, such that the magnetic polarity of said transverse magnet is oriented substantially parallel to said first direction and the magnetic polarity of said wedge magnet is oriented at an angle to said first direction, wherein a closed magnetic flux circuit passes through said transverse magnet and said wedge magnet, having a direction such that the magnetic polarities of said transverse magnet and said wedge magnet are each aligned substantially parallel with the respective local directions of said magnetic flux circuit;

providing a linear coil array cooperating with said magnet array;

energizing said coil array by applying electric current to said coil array, thereby generating an electromagnetic force on said coil array in cooperation with said magnet array.

22. The method of claim 21, wherein said magnet array further comprises a second array segment adjacent said first array segment along said first direction, said second array segment comprising a second transverse magnet and a second wedge magnet, said second transverse magnet and said second wedge magnet having respective second magnetic polarities, wherein a second closed magnetic flux circuit passes through said second transverse magnet and said second wedge magnet.

23. The method of claim 21, wherein said transverse magnet and said wedge magnet are permanent magnets.

24. The method of claim 23, wherein said permanent magnets are of neodymium iron boron.

25. The method of claim 21, wherein a cross-sectional shape of said wedge magnet in a plane substantially parallel with said magnetic polarity of said wedge magnet is rectangular.

26. The method of claim 21, wherein a cross-sectional shape of said wedge magnet in a plane substantially parallel with said magnetic polarity of said wedge magnet is trapezoidal.

27. The method of claim 21, further comprising providing a complementary array segment including:

a complementary transverse magnet having a magnetic polarity oriented substantially parallel to said first direction; and

a complementary wedge magnet having a magnetic polarity oriented at an angle to said first direction, said complementary array segment being transversely spaced apart from said array segment;

wherein a complementary closed magnetic flux circuit passes through said complementary transverse magnet and said complementary wedge magnet.

28. The method of claim 27, wherein said magnetic polarities of said transverse magnets and said wedge magnets of said array segment and said complementary array segment are disposed symmetrically about an axis passing substantially perpendicular to the plane of said magnetic polarities.

29. The method of claim 21, wherein said linear coil array includes a polygonal shaped coil.

30. A photolithographic apparatus comprising:

a projection system;

a stage for carrying an object, the object being one of a mask carrying a pattern to be projected by the projection system or a workpiece to be imaged by said projection system; and

a linear motor coupled to said stage for driving the stage, said linear motor including;

a coil array; and

a magnet array cooperating with said coil array and comprising an array segment including a transverse magnet having a magnetic polarity oriented substantially parallel to a first direction, said array segment further comprising a wedge magnet having a magnetic polarity oriented at an angle to said first direction;

wherein a closed magnetic flux circuit passes through said transverse magnet and said wedge magnet, having a direction such that the magnetic polarities of said transverse magnet and said wedge magnet are each aligned substantially parallel with the respective local directions of said magnetic flux circuit.

31. The apparatus of claim 30, wherein a cross-sectional shape of said wedge magnet in a plane substantially parallel with said magnetic polarity of said wedge magnet is rectangular.

32. The apparatus of claim 30, wherein a cross-sectional shape of said wedge magnet in a plane substantially parallel with said magnetic polarity of said wedge magnet is trapezoidal.

33. The apparatus of claim 30, wherein said magnet array further comprises a second array segment adjacent said first array segment along said first direction, said second array segment comprising a second transverse magnet and a second wedge magnet, said second transverse magnet and said second wedge magnet having respective second magnetic polarities, wherein a second closed magnetic flux circuit passes through said second transverse magnet and said second wedge magnet.

34. The apparatus of claim 30, wherein said magnet array further comprises a complementary array segment including:

a complementary transverse magnet having a magnetic polarity oriented substantially parallel to said first direction; and

a complementary wedge magnet having a magnetic polarity oriented at an angle to said first direction;

said complementary array segment being transversely spaced apart from said array segment;

wherein a complementary closed magnetic flux circuit passes through said complementary transverse magnet and said complementary wedge magnet.

35. The apparatus of claim 34, wherein said magnetic polarities of said transverse magnets and said wedge magnets of said array segment and said complementary array segment are disposed symmetrically about an axis passing substantially perpendicular to the plane of said magnetic polarities.

36. The apparatus of claim 30, wherein said coil array includes a polygonal shaped coil.