Product wafer junction leakage measurement using corona and a kelvin probe

• US 6,104,206 A
• Filed: 08/05/1997
• Issued: 08/15/2000
• Est. Priority Date: 08/05/1997
• Status: Expired due to Term

• Current Assignee: Keithley Instruments, Inc.
• Original Assignee: Keithley Instruments, Inc.
• Inventors: Verkuil, Roger L.
• Primary Examiner(s): Metjahic, Safet
• Assistant Examiner(s): Hollington, Jermele M.
• Application Number:
  US08/906,199
• Time in Patent Office: 1,106 Days
• Field of Search: 324/765, 324/766, 324/158.1, 324/767
• US Class Current: 324/762.05
• CPC Class Codes: G01R 31/311 of integrated circuits G01R31/31728 takes precedence

Abstract

Corona charge is applied to a semiconductor product wafer to reverse bias PN junctions. Measurements of voltage decay in the dark and in the light are made and combined to determine a PN junction leakage characteristic. A portion of the dark measurement is taken in the light to permit normalizing the light and dark measurements.

Claims

1. A method for measuring junction leakage in a semiconductor product wafer having a first type junction and a second type junction using corona charge, said method comprising:

applying corona charge to said wafer suitable to reverse bias one of said type junctions, said wafer being in a darkened environment and measuring a decay of corona charge voltage on the wafer in darkness;

applying corona charge to again reverse bias said one of said type junctions and measuring a decay of corona charge voltage on the wafer in light; and

determining a junction leakage characteristic for said one of said type junctions according to said decay of corona charge voltage in light measurement and said decay of corona charge voltage in darkness measurement.

2. A method according to claim 1, wherein said measuring the decay of corona charge voltage on the wafer in darkness includes an intermediate period of measuring in light in addition to said measuring the decay of corona charge voltage on the wafer in light.

3. A method for measuring junction leakage in a semiconductor product wafer having a first type junction and a second type junction, said method comprising:

measuring an initial surface potential for said wafer;

applying corona charge to said wafer suitable to reverse bias one of said type junctions, said wafer being in a darkened environment;

measuring a first voltage transient for said wafer for a first time interval;

illuminating said wafer for a second time interval and measuring a second voltage transient for said wafer for said second time interval;

measuring a third voltage transient for said wafer in the darkened environment for a third time interval, said first, second, and third voltage transients together constituting a first voltage characteristic;

applying corona charge to said wafer to return said wafer to said initial surface potential;

applying corona charge to again reverse bias said one of said type junctions;

illuminating said wafer and measuring an additional voltage transient over a combined interval corresponding to said first through third intervals, said additional voltage transient for said combined interval constituting a second voltage characteristic; and

determining a junction leakage characteristic for said one of said type junctions according to said first and second voltage characteristics.

4. A method according to claim 3, wherein said second voltage characteristic is scaled to correspond to said second interval voltage transient and subtracted from said first voltage characteristic to form said junction leakage characteristic.

5. A method according to claim 4, wherein an offset value is subtracted from said junction leakage characteristic such that said junction leakage characteristic is zero after a decay interval after said second interval.

6. A method according to claim 3, wherein said first voltage characteristic is scaled such that said second interval voltage transient corresponds to said second voltage characteristic and said second voltage characteristic is subtracted from said scaled first voltage characteristic to form said junction leakage characteristic.

7. A method according to claim 6, wherein an offset value is subtracted from said junction leakage characteristic such that said junction leakage characteristic is zero after a decay interval after said second interval.