Liquid crystal display device for preventing short circuits and method of manufacturing the same
First Claim
Patent Images
1. A liquid crystal display device comprising:
- top and bottom organic resin layers, the bottom organic resin layer having a planarized surface;
a conductive layer interposed between the top and bottom organic resin layer; and
an inorganic layer provided above the conductive layer and having approximately the same shape as the conductive layer.
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Abstract
An inorganic layer such as a silicon nitride film, a silicon oxide film, or a silicon oxynitride film is interposed between a pixel electrode and a black matrix that constitute a storage capacitor. This structure increases the capacitance per unit area.
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Citations
29 Claims
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1. A liquid crystal display device comprising:
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top and bottom organic resin layers, the bottom organic resin layer having a planarized surface; a conductive layer interposed between the top and bottom organic resin layer; and an inorganic layer provided above the conductive layer and having approximately the same shape as the conductive layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A liquid crystal display device having a storage capacitor comprising:
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a black matrix and a pixel electrode that are formed on an organic resin layer having a flat surface; and a plurality of insulating films provided between the black matrix and the pixel electrode, one of the insulating films that is adjacent to the black matrix is an inorganic layer. - View Dependent Claims (12, 13, 14)
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15. A liquid crystal display device having a storage capacitor comprising:
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a black matrix and a pixel electrode that are formed on an interlayer insulating film that is an organic resin layer having a flat surface; and a plurality of insulating films provided between the black matrix and the pixel electrode, one of the insulating films that is adjacent to the black matrix is an inorganic layer that is patterned so as to have approximately the same shape as the black matrix. - View Dependent Claims (16, 17)
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18. A method of manufacturing a liquid crystal display device, comprising:
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forming a thin-film transistor on a substrate having an insulative surface; forming an organic resin layer on the thin-film transistor; forming a conductive layer on the organic resin layer; forming at least one inorganic layer on the conductive layer; executing at least one patterning step; and forming a planarized organic resin layer. - View Dependent Claims (19)
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20. A method of manufacturing a liquid crystal display device, comprising:
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forming a thin-film transistor on a substrate having an insulative surface; forming a first interlayer insulating film so as to cover the thin-film transistor; forming a second interlayer insulating film made of an organic material and having a flat surface on the first interlayer insulating film; forming a black matrix on the second interlayer insulating film; forming an inorganic layer on the black matrix; patterning the black matrix and the inorganic layer into approximately the same shape; forming a third interlayer insulating film made of an organic resin after the above step; and forming a pixel electrode so that it is electrically connected to a drain region of the thin-film transistor, wherein the pixel electrode and a patterned black matrix constitute a storage capacitor. - View Dependent Claims (21)
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22. A method of manufacturing a liquid crystal display device, comprising:
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forming a thin-film transistor on a substrate having an insulative surface; forming a first interlayer insulating film so as to cover the thin-film transistor; forming a second interlayer insulating film made of an organic material and having a flat surface on the first interlayer insulating film; forming a black matrix on the second interlayer insulating film; patterning the black matrix; anodizing a patterned black matrix; forming a third interlayer insulating film made of an organic resin after the above step; and forming a pixel electrode so that it is electrically connected to a drain region of the thin-film transistor, wherein the pixel electrode and the patterned black matrix constitute a storage capacitor.
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23. An electronic device having an active matrix display device, said active matrix display device comprising:
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a substrate having an insulating surface; an active matrix circuit comprising a plurality of thin film transistors arranged in a matrix form over said substrate; a first organic insulating film formed over said substrate and said plurality of thin film transistors; a black matrix layer formed on said first organic insulating film; a second organic insulating film formed over said first organic insulating film with said black matrix layer interposed therebetween; a plurality of pixel electrodes formed over said second organic insulating film and electrically connected to said plurality of thin film transistors, wherein an inorganic insulating film is formed between said black matrix layer and said second organic insulating film. - View Dependent Claims (24, 25, 26, 27, 28, 29)
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Specification