Liquid crystal display device for preventing short circuits and method of manufacturing the same

• US 6,104,461 A
• Filed: 09/16/1998
• Issued: 08/15/2000
• Est. Priority Date: 09/19/1997
• Status: Expired due to Term

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Isoda, Shirou, Sakakura, Masayuki, Zhang, Hongyong
• Primary Examiner(s): Dudek, James A.
• Application Number:
  US09/153,845
• Time in Patent Office: 699 Days
• Field of Search: 349/38, 349/39, 349/122, 349/138, 349/141, 349/47, 349/111, 349/110
• US Class Current: 349/122
• CPC Class Codes: G02F 1/133357 Planarisation layers
• CPC Class Codes: G02F 1/136209 Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
• CPC Class Codes: G02F 1/136213 Storage capacitors associated with the pixel electrode

Abstract

An inorganic layer such as a silicon nitride film, a silicon oxide film, or a silicon oxynitride film is interposed between a pixel electrode and a black matrix that constitute a storage capacitor. This structure increases the capacitance per unit area.

Claims

1. A liquid crystal display device comprising:

top and bottom organic resin layers, the bottom organic resin layer having a planarized surface;

a conductive layer interposed between the top and bottom organic resin layer; and

an inorganic layer provided above the conductive layer and having approximately the same shape as the conductive layer.

2. The liquid crystal display device according to claim 1, wherein the inorganic layer comprises a material selected from the group consisting of silicon oxide, silicon nitride, and silicon oxynitride.

3. The liquid crystal display device according to claim 1, wherein one of the plurality of insulating films that is closest to the pixel electrode is a planarized organic resin layer.

4. The liquid crystal display device according to claim 1, wherein the organic resin layer or layers are made of one of polyimide and acrylic.

5. A PDA using the liquid crystal display device of claim 1.

6. A head-mounted display using the liquid crystal display device of claim 1.

7. A car navigation system using the liquid crystal display device of claim 1.

8. A PHS using the liquid crystal display device of claim 1.

9. A camera using the liquid crystal display device of claim 1.

10. A projection system using the liquid crystal display device of claim 1.

11. A liquid crystal display device having a storage capacitor comprising:

a black matrix and a pixel electrode that are formed on an organic resin layer having a flat surface; and

a plurality of insulating films provided between the black matrix and the pixel electrode, one of the insulating films that is adjacent to the black matrix is an inorganic layer.

12. The liquid crystal display device according to claim 11, wherein the inorganic layer comprises a material selected from the group consisting of silicon oxide, silicon nitride, and silicon oxynitride.

13. The liquid crystal display device according to claim 11, wherein one of the plurality of insulating films that is closest to the pixel electrode is a planarized organic resin layer.

14. The liquid crystal display device according to claim 11, wherein the organic resin layer or layers are made of one of polyimide and acrylic.

15. A liquid crystal display device having a storage capacitor comprising:

a black matrix and a pixel electrode that are formed on an interlayer insulating film that is an organic resin layer having a flat surface; and

a plurality of insulating films provided between the black matrix and the pixel electrode, one of the insulating films that is adjacent to the black matrix is an inorganic layer that is patterned so as to have approximately the same shape as the black matrix.

16. The liquid crystal display device according to claim 15, wherein the inorganic layer is made of one of silicon oxide, silicon nitride, and silicon oxynitride.

17. The liquid crystal display device according to claim 15, wherein the organic resin layer or layers are made of one of polyimide and acrylic.

18. A method of manufacturing a liquid crystal display device, comprising:

forming a thin-film transistor on a substrate having an insulative surface;

forming an organic resin layer on the thin-film transistor;

forming a conductive layer on the organic resin layer;

forming at least one inorganic layer on the conductive layer;

executing at least one patterning step; and

forming a planarized organic resin layer.

19. The manufacturing method according to claim 18 wherein the inorganic layer is made of one of silicon oxide, silicon nitride, and silicon oxynitride.

20. A method of manufacturing a liquid crystal display device, comprising:

forming a thin-film transistor on a substrate having an insulative surface;

forming a first interlayer insulating film so as to cover the thin-film transistor;

forming a second interlayer insulating film made of an organic material and having a flat surface on the first interlayer insulating film;

forming a black matrix on the second interlayer insulating film;

forming an inorganic layer on the black matrix;

patterning the black matrix and the inorganic layer into approximately the same shape;

forming a third interlayer insulating film made of an organic resin after the above step; and

forming a pixel electrode so that it is electrically connected to a drain region of the thin-film transistor,

wherein the pixel electrode and a patterned black matrix constitute a storage capacitor.

21. The manufacturing method according to claim 20, wherein the inorganic layer is made of one of silicon oxide, silicon nitride, and silicon oxynitride.

22. A method of manufacturing a liquid crystal display device, comprising:

forming a thin-film transistor on a substrate having an insulative surface;

forming a first interlayer insulating film so as to cover the thin-film transistor;

forming a second interlayer insulating film made of an organic material and having a flat surface on the first interlayer insulating film;

forming a black matrix on the second interlayer insulating film;

patterning the black matrix;

anodizing a patterned black matrix;

forming a third interlayer insulating film made of an organic resin after the above step; and

forming a pixel electrode so that it is electrically connected to a drain region of the thin-film transistor,

wherein the pixel electrode and the patterned black matrix constitute a storage capacitor.

23. An electronic device having an active matrix display device, said active matrix display device comprising:

a substrate having an insulating surface;

an active matrix circuit comprising a plurality of thin film transistors arranged in a matrix form over said substrate;

a first organic insulating film formed over said substrate and said plurality of thin film transistors;

a black matrix layer formed on said first organic insulating film;

a second organic insulating film formed over said first organic insulating film with said black matrix layer interposed therebetween;

a plurality of pixel electrodes formed over said second organic insulating film and electrically connected to said plurality of thin film transistors,

wherein an inorganic insulating film is formed between said black matrix layer and said second organic insulating film.

24. An electronic device according to claim 23 wherein said inorganic insulating film has a substantially same pattern as said black matrix layer.

25. An electronic device according to claim 23 wherein each of said plurality of thin film transistors is a bottom gate type.

26. An electronic device according to claim 23 wherein each of said plurality of pixel electrodes partly overlap said black matrix layer to form a storage capacitor therebetween.

27. An electronic device according to claim 23 wherein said electronic device is a projection system.

28. An electronic device according to claim 23 wherein said electronic device is a video camera.

29. An electronic device according to claim 23 wherein said electronic device is a head-mounted display system.