Capacitive pressure transducer with improved electrode support

• US 6,105,436 A
• Filed: 07/23/1999
• Issued: 08/22/2000
• Est. Priority Date: 07/23/1999
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Lischer, D. Jeffrey, Blankenship, Steven D.
• Primary Examiner(s): McCall, Eric S.
• Assistant Examiner(s): AW MUSSE, ABDULLAHI H
• Application Number:
  US09/360,308
• Time in Patent Office: 396 Days
• Field of Search: 73/715, 73/724, 73/718, 73/756, 361/283.4
• US Class Current: 73/724
• CPC Class Codes: G01L 19/04 Means for compensating for effects of changes of temperature , i.e. other than electric compensation
• CPC Class Codes: G01L 9/0072 using variations in capacitance

Abstract

The disclosed pressure transducer assembly includes a body, a diaphragm, an insulating member, a conductor, a compressed member, and a support member. The body defines an interior cavity. The diaphragm is mounted in the body and divides the interior cavity into a first chamber and a second chamber. A portion of the diaphragm moves in a first direction in response to a pressure in the first chamber being greater than a pressure in the second chamber, and that portion of the diaphragm moves in a second direction opposite the first direction in response to the pressure in the second chamber being greater than the pressure in the first chamber. The conductor is disposed on the insulating member. The insulating member is disposed within the first chamber so that the conductor and the diaphragm form plates of a capacitor. The compressed member is disposed in the first chamber and generates a force that biases the insulating member towards the diaphragm. The support member is disposed between the diaphragm and the insulating member. The support member resists movement of the insulating member towards the diaphragm. The support member is characterized by a thickness and a cross-sectional width. The ratio of the thickness to the cross-sectional width is greater than one.

Claims

1. A pressure transducer assembly comprising:

(A) a body defining an interior cavity, the body having a first portion;

(B) a diaphragm mounted in the body and dividing the interior cavity into a first chamber and a second chamber, a region of the diaphragm moving in a first direction in response to a pressure in the first chamber being higher than a pressure in the second chamber, the region of the diaphragm moving in a second direction opposite the first direction in response to the pressure in the second chamber being higher than the pressure in the first chamber;

(C) an insulating member disposed in the first chamber;

(D) a conductor disposed on the insulating member, the conductor and the diaphragm being characterized by a capacitance, the capacitance being representative of a difference between the pressure in the first chamber and the pressure in the second chamber;

(E) a compressed member disposed in the first chamber, the compressed member generating a force that biases the insulating member towards the diaphragm;

(F) a support member disposed between the first portion of the body and a portion of the insulating member, the first portion of the body resisting movement of the support member towards the diaphragm and the support member resisting movement of the insulating member towards the diaphragm, the support member being characterized by a thickness and by a cross-sectional width, a ratio of the thickness to the cross-sectional width being greater than one.

2. An assembly according to claim 1, wherein the ratio of the thickness to the cross-sectional width is greater than two.

3. An assembly according to claim 1, the support member resting on the first portion of the body.

4. An assembly according to claim 1, wherein the first portion of the body defines a groove, the support member resting in the groove.

5. An assembly according to claim 1 wherein a portion of the support member is fixed to the first portion of the body.

6. An assembly according to claim 1, wherein at least a portion of the body and the support member are formed as a single monolithic construction.

7. An assembly according to claim 1, wherein the support member is characterized by an annular shape.

26. An assembly according to claim 1, wherein the insulator is characterized by a first coefficient of thermal expansion and the body is characterized by a second coefficient of thermal expansion, the first coefficient being different than the second coefficient.

27. An assembly according to claim 26, wherein the support member elastically deforms in response to heating and cooling the assembly thereby allowing the body to move with respect to the insulator.

28. An assembly according to claim 1, wherein the body is characterized by a first rate of thermal expansion and the insulator is characterized by a second rate of thermal expansion, the first rate being faster than the second rate.

29. An assembly according to claim 28, wherein the difference between the first and second rates causes the body and the insulator to exert a force on the support member when the assembly is heated from a first temperature to a second temperature, the support member deforming from a first geometric configuration to a second geometric configuration in response to the force.

30. An assembly according to claim 29, wherein cooling the assembly from the second temperature to the first temperature causes the support member to deform from the second geometric configuration to the first geometric configuration.

31. An assembly according to claim 1, wherein heating the assembly from a first temperature to a second temperature causes the body to move from a first position relative to the insulator to a second position relative to the insulator, the support member deforming without sliding in response to the movement of the body from the first position to the second position.

32. An assembly according to claim 31, wherein cooling the assembly from the second temperature to the first temperature causes the body to move from the second position relative to the insulator to the first position relative to the insulator, the support member deforming without sliding in response to the movement of the body from the second position to the first position.

8. A pressure transducer assembly comprising:

(A) a body defining an interior cavity and having a surface, the body further defining a groove in the surface;

(B) a diaphragm mounted in the body and dividing the interior cavity into a first chamber and a second chamber, a region of the diaphragm moving in a first direction in response to a pressure in the first chamber being higher than a pressure in the second chamber, the region of the diaphragm moving in a second direction opposite the first direction in response to the pressure in the second chamber being higher than the pressure in the first chamber;

(C) an insulating member disposed in the first chamber;

(D) a conductor disposed on the insulating member, the conductor and the diaphragm being characterized by a capacitance, the capacitance being representative of a difference between the pressure in the first chamber and the pressure in the second chamber;

(E) a support member disposed between the surface and the insulating member, the support member resisting movement of the insulating member towards the surface, a lower end of the support member resting in the groove.

9. An assembly according to claim 8, further comprising a compressed member disposed in the first chamber, the compressed member generating a force that biases the insulating member towards the diaphragm.

10. An assembly according to claim 8, wherein the support member is characterized by an annular shape.

11. An assembly according to claim 8, wherein the support member is characterized by a thickness and by a cross-sectional width, a ratio of the thickness to the cross-sectional width being greater than two.

12. A pressure transducer assembly comprising:

(A) a body defining an interior cavity, the body including a projection that extends in a first direction;

(B) a diaphragm mounted in the body and dividing the interior cavity into a first chamber and a second chamber, a region of the diaphragm moving in a second direction in response to a pressure in the first chamber being higher than a pressure in the second chamber, the region of the diaphragm moving in a third direction opposite the second direction in response to the pressure in the second chamber being higher than the pressure in the first chamber, the first direction being non-parallel to the diaphragm;

(C) an insulating member disposed in the first chamber;

(D) a conductor disposed on the insulating member, the conductor and the diaphragm being characterized by a capacitance, the capacitance being representative of a difference between the pressure in the first chamber and the pressure in the second chamber;

(E) a compressed member disposed in the first chamber, the compressed member generating a force that biases the insulating member towards the diaphragm, the projection resisting movement of the insulating member towards the diaphragm.

13. An assembly according to claim 12, wherein the projection is characterized by an annular shape.

14. An assembly according to claim 12, wherein the projection is characterized by a thickness and by a cross-sectional width, a ratio of the thickness to the cross-sectional width being greater than two.

15. An assembly according to claim 12, wherein the projection and at least one other portion of the body are formed as a single monolithic construction.

16. A pressure transducer assembly comprising:

(A) a body defining an interior cavity, the body having a first portion;

(B) a diaphragm mounted in the body and dividing the interior cavity into a first chamber and a second chamber, a region of the diaphragm moving in a first direction in response to a pressure in the first chamber being higher than a pressure in the second chamber, the region of the diaphragm moving in a second direction opposite the first direction in response to the pressure in the second chamber being higher than the pressure in the first chamber;

(C) an insulating member disposed in the first chamber;

(D) a conductor disposed on the insulating member, the conductor and the diaphragm being characterized by a capacitance, the capacitance being representative of a difference between the pressure in the first chamber and the pressure in the second chamber;

(E) means for generating a force, the force being applied to bias the insulating member towards the diaphragm;

(F) a support member disposed between the first potion of the body and a portion of the insulating member, the first portion of the body resisting movement of the support member towards the diaphragm, the support member resisting movement of the insulating member towards the diaphragm, the support member being characterized by a thickness and by a cross-sectional width, a ratio of the thickness to the cross-sectional width being greater than one.

17. An assembly according to claim 16, the support member resting on the first portion of the body.

18. An assembly according to claim 16, wherein the first portion of the body defines a groove, the support member resting in the groove.

19. An assembly according to claim 16, wherein a portion of the support member is fixed to a portion of the body.

20. An assembly according to claim 16, wherein at least a portion of the body and the support member are formed as a single monolithic construction.

21. An assembly according to claim 16, wherein the support member is characterized by an annular shape.

22. A pressure transducer assembly comprising:

(A) a body defining an interior cavity the body having a first portion;

(B) a diaphragm mounted in the body and dividing the interior cavity into a first chamber and a second chamber, a region of the diaphragm moving in a first direction in response to a pressure in the first chamber being higher than a pressure in the second chamber, the region of the diaphragm moving in a second direction opposite the first direction in response to the pressure in the second chamber being higher than the pressure in the first chamber, the diaphragm being substantially parallel to the surface;

(C) an insulating member disposed in the first chamber;

(D) a conductor disposed on the insulating member, the conductor and the diaphragm being characterized by a capacitance, the capacitance being representative of a difference between the pressure in the first chamber and the pressure in the second chamber;

(E) a compressed member disposed in the first chamber, the compressed member generating a force that biases the insulating member towards the diaphragm;

(F) an annular support member disposed between the first portion of the body and a portion of the insulating member, the first portion of the body resisting movement of the support member towards the diaphragm and the support member resisting movement of the insulating member towards the diaphragm, the support member being characterized by a thickness and by a cross-sectional width, a ratio of the thickness to the cross-sectional width being greater than one.

23. An assembly according to claim 22, wherein the first portion of the body defines a groove, the support member resting in the groove.

24. A pressure transducer assembly comprising:

(A) a body defining an interior cavity and a surface, the body being characterized by a first thermal coefficient of expansion;

(B) a diaphragm mounted in the body and dividing the interior cavity into a first chamber and a second chamber, a region of the diaphragm moving in a first direction in response to a pressure in the first chamber being higher than a pressure in the second chamber, the region of the diaphragm moving in a second direction opposite the first direction in response to the pressure in the second chamber being higher than the pressure in the first chamber, the diaphragm being substantially parallel to the surface;

(C) an insulating member disposed in the first chamber, the insulating member being characterized by a second thermal coefficient of expansion;

(D) a conductor disposed on the insulating member, the conductor and the diaphragm being characterized by a capacitance, the capacitance being representative of a difference between the pressure in the first chamber and the pressure in the second chamber;

(E) a compressed member disposed in the first chamber, the compressed member generating a force that biases the insulating member towards the diaphragm;

(F) an annular support member disposed between a portion of the surface and a portion of the insulating member, the support member resisting movement of the insulating member towards the diaphragm, the support member being characterized by a thickness and by a cross-sectional width, a ratio of the thickness to the cross-sectional width being sufficiently large so that shear forces generated in response to heating the assembly deform the annular support member prior to causing the annular support member to slide against the surface.

25. A pressure transducer assembly comprising:

(A) a body defining an interior cavity;

(B) a diaphragm mounted in the body and dividing the interior cavity into a first chamber and a second chamber, a region of the diaphragm moving in a first direction in response to a pressure in the first chamber being higher than a pressure in the second chamber, the region of the diaphragm moving in a second direction opposite the first direction in response to the pressure in the second chamber being higher than the pressure in the first chamber;

(C) an insulating member disposed in the first chamber;

(D) a conductor disposed on the insulating member, the conductor and the diaphragm being characterized by a capacitance, the capacitance being representative of a difference between the pressure in the first chamber and the pressure in the second chamber;

(E) a compressed member disposed in the first chamber, the compressed member generating a force that biases the insulating member towards the diaphragm;

(F) a support member disposed between a portion of the diaphragm and a portion of the insulating member, the support member resisting movement of the insulating member towards the diaphragm, the support member being characterized by a thickness and by a cross-sectional width, a ratio of the thickness to the cross-sectional width being greater than one, at least a portion of the body and the support member being formed as a single monolithic construction.