Apparatus for plasma jet treatment of substrates

• US 6,105,534 A
• Filed: 11/25/1998
• Issued: 08/22/2000
• Est. Priority Date: 05/31/1996
• Status: Expired due to Fees

• Current Assignee: Ipec Precision, Inc.
• Original Assignee: Ipec Precision, Inc.
• Inventors: Siniaguine, Oleg, Tokmouline, Iskander
• Primary Examiner(s): Beck, Shrive
• Assistant Examiner(s): MACARTHUR, SYLVIA
• Application Number:
  US09/194,247
• Time in Patent Office: 636 Days
• Field of Search: 118/729, 118/730, 118/731, 118/719, 118/723 R, 118/723 MW, 118/723 VE, 118/723 E, 118/723, 118/723 IR, 118/723 EB, 118/723 FE, 118/723 FI, 156/345
• US Class Current: 118/723.0EB
• CPC Class Codes: C23C 16/4584 the substrate being rotated
• CPC Class Codes: C23C 16/513 using plasma jets
• CPC Class Codes: C23C 16/54 Apparatus specially adapted for continuous coating

Abstract

An apparatus for processing substrates with a plasma jet with increased throughput is described. The apparatus comprises at least two carrousels for holding a plurality of substrates. Each of the carrousels includes a rotatable angle drive having a rotation axis Da, a plurality of arms extending radially from the angle drive and a plurality of rotatable substrate holders. Each of the substrate holders is connected to one of the arms, each of the rotatable substrate holders has a rotation axis Ha positioned at a distance R from the rotation axis Da of the rotatable angle drive. The carousel angle drive provides programmable motion of the substrates being treated relative to a plasma jet generator. The plasma jet generator is movable from a first position Z₁ adjacent to the first carousel to a second position Z₂ adjacent to the second carousel. While the substrates on the first carousel are being treated by the plasma jet, the substrates on the second carousel can be loaded or unloaded. Once the treatment of the substrates on the first carousel is completed, the plasma jet is moved from the first position Z₁ to the second position Z₂ to treat the substrates on the second carousel and allow loading and unloading of substrates from the first carousel.

Claims

1. An apparatus for treating two pluralities of substrates with a plasma jet, the apparatus having a first carousel for holding a first plurality of substrates, and a second carousel for holding a second plurality of substrates, the apparatus further characterized in that each carousel has a rotatable angle drive (10, 210) having rotation axes Da₁, Da₂ ;

a plurality of arms (20a-20c, 220a-220c) extending radially from the respective angle drives;

a plurality of rotatable substrate holders (40a-40c, 240a-240c), each of the substrate holders being connected to one of the arms, each of the rotatable substrate holders having a rotation axis Ha_1i, Ha_2i positioned at a distance R from the rotation axis Da₁, Da₂ of its respective angle drive;

a plasma jet generator (90) for providing a plasma jet (80) having a first cross-sectional axis P₁ and a second cross-sectional axis P₂ ; and

means (190) for moving the plasma jet generator from a first position Z₁ adjacent to the first carousel to a second position Z₂ adjacent to the second carousel.

2. The apparatus according to claim 1 further comprising:

a first storage cassette (160) for storing a first plurality of substrates;

a second storage cassette (160) for storing a second plurality of substrates; and

a substrate manipulator (150) for transferring substrates between the first storage cassette and the first plurality of substrate holders and for transferring substrates between the second storage cassette and the second plurality of substrate holders.

3. The apparatus according to claim 2, wherein the manipulator (150) is provided with a means for rotating the substrates upside down.

4. The apparatus according to claim 3, wherein the apparatus further includes an elevator (200) having a substrate holder, wherein the elevator is positioned so as to reach at least one substrate holder.

5. The apparatus according to claim 4, wherein the housing (100) is provided with a wall (170) having an opening (110) therein, wherein the wall is positioned so as to provide a barrier between the first and second carrousels and the manipulator and cassettes.

6. The apparatus according to claim 1, wherein the apparatus further comprises a housing (100) which surrounds the apparatus.

7. The apparatus according to claim 1, wherein the cross-sectional axis P₁ of the plasma jet is aligned with the radius of rotation axes Da₁, Da₂ wherein the cross-sectional axis P₂ is perpendicular to axis P₁, and wherein P₁ is larger than P₂.