Fluid dispensing system

• US 6,105,829 A
• Filed: 06/29/1998
• Issued: 08/22/2000
• Est. Priority Date: 03/28/1989
• Status: Expired due to Term

• Current Assignee: Entegris Incorporated
• Original Assignee: Millipore Investment Holdings, Ltd.
• Inventors: Gibson, Gregory M., Snodgrass, Ocie T., Farney, Michael K.
• Primary Examiner(s): Drodge, Joseph W.
• Application Number:
  US09/106,586
• Time in Patent Office: 785 Days
• Field of Search: 210/143, 210/257.1, 210/257.2, 210/258, 210/416.1, 210/416.4, 210/416.5, 210/767, 417/2, 417/205, 417/244, 417/245, 417/246, 417/313, 417/383, 417/395, 417/413.1, 417/413.2, 417/413.3, 417/426, 417/540, 417/253, 417/254, 417/393, 417/428, 222/1, 222/252, 222/253, 222/255, 222/541.1, 222/214, 222/263
• US Class Current: 222/214
• CPC Class Codes: B01D 29/15 arranged for inward flow filtration
• CPC Class Codes: B01D 29/46 of flat, stacked bodies
• CPC Class Codes: B01D 35/26 Filters with built-in pumps filters provided with a pump mounted in or on the casing aquarium pumps or filters A01K63/04
• CPC Class Codes: F04B 15/02 the fluids being viscous or non-homogeneous
• CPC Class Codes: F04B 43/067 the fluid being actuated directly by a piston
• CPC Class Codes: F04B 7/0076 the members being actuated by electro-magnetic means
• CPC Class Codes: F04B 9/02 the means being mechanical
• CPC Class Codes: F04B 9/1095 having two or more pumping chambers in series
• CPC Class Codes: Y10S 210/90 Ultra pure water, e.g. conductivity water
• CPC Class Codes: Y10T 428/1234 Honeycomb, or with grain orientation or elongated elements in defined angular relationship in respective components [e.g., parallel, inter- secting, etc.]

Abstract

A fluid dispensing system is provided which has a first diaphragm pump, a filter connected to receive the discharge of said first pump, and a accumulator/second diaphragm pump connected to receive the discharge of said filter. Hydraulic fluids pumped by cylinder/piston/stepper assemblies independently actuate each of the diaphragm pumps, providing accurate, controllable and repeatable dispense of the subject fluid.

Claims

1. In a device for dispensing an industrial fluid which is viscous and/or high purity and/or shear-sensitive, the combination of:

first pumping means; and

second pumping means adapted to receive said fluid after said fluid has been pumped by said first pumping means, said second pumping means including a diaphragm-type pump actuated by displacement of a relatively incompressible fluid, whereby said first pumping means draws said fluid from a reservoir and said second pumping means subsequently receives said fluid and said fluid is subsequently dispensed from said second pumping means; and

means for dispensing said fluid from said second pumping means at intervals independent of operation of said first pumping means, said second pumping means being configured to selectively suck-back fluid after said fluid is downstream of said diaphragm.

2. In a device for dispensing industrial fluid which is viscous and/or high purity and/or shear-sensitive, the combination of:

first pumping means; and

second pumping means adapted to receive said fluid after said fluid has been pumped by said first pumping means, whereby said first pumping means is actuated by displacement of a relatively incompressible fluid, and said first pumping means draws said fluid from a reservoir and said second pumping means receives said fluid and said fluid is subsequently dispensed from said second pumping means; and

means for dispensing said fluid from said second pumping means at rates independent of operation of said first pumping means, in which each of said first and second pumping means includes surfaces that contact said fluid, said surfaces being of materials that are non-contaminating to said fluid, said second pumping means being configured to selectively suck-back fluid from outlet tubing of said second pumping means.

3. In a device for dispensing industrial fluid which is viscous and/or high purity and/or shear-sensitive, the combination of:

first pumping means; and

second pumping means adapted to receive said fluid after said fluid has been pumped by said first pumping means, whereby said first pumping means is actuated by displacement of a relatively incompressible fluid, and said first pumping means draws said fluid from a reservoir and said second pumping means receives said fluid and said fluid is subsequently dispensed from said second pumping means; and

means for dispensing said fluid from said second pumping means at rates independent of operation of said first pumping means, in which each of said first and second pumping means includes surfaces that contact said fluid, said surfaces being of materials that are non-contaminating to said fluid in which said first and second pumping means include diaphragm-type pumps.

4. In a device for dispensing an industrial fluid which is viscous and/or high purity and/or shear-sensitive, the combination of:

first pumping means; and

second pumping means adapted to receive said fluid after said fluid has been pumped by said first pumping means, said second pumping means including a diaphragm-type pump actuated by displacement of a relatively incompressible fluid, whereby said first pumping means includes means for creating negative pressure therein for drawing said fluid from a reservoir and said second pumping means subsequently receives said fluid and said fluid is subsequently dispensed from said second pumping means; and

means for dispensing said fluid from said second pumping means at intervals independent of operation of said first pumping means.

5. In a device for dispensing an industrial fluid which is viscous and/or high purity and/or shear-sensitive, the combination of:

first pumping means; and

second pumping means adapted to receive said fluid after said fluid has been pumped by said first pumping means, said second pumping means including a diaphragm-type pump actuated by displacement of a relatively incompressible fluid, whereby said first pumping means draws said fluid from a reservoir and said second pumping means subsequently receives said fluid and said fluid is subsequently dispensed from said second pumping means; and

means for dispensing said fluid from said second pumping means at intervals independent of operation of said first pumping means, in which incremental positive displacement of said second pumping means results in corresponding incremental dispense of said fluid.

6. In a device for dispensing an industrial fluid which is viscous and/or high purity and/or shear-sensitive, the combination of:

first pumping means; and

second pumping means adapted to receive said fluid after said fluid has been pumped by said first pumping means, said second pumping means including a diaphragm-type pump actuated by displacement of a relatively incompressible fluid, whereby said first pumping means draws said fluid from a reservoir and said fluid is subsequently dispensed from said second pumping means; and

means for dispensing said fluid from said second pumping means at intervals independent of operation of said first pumping means and independent of rate of dispense from said second pumping means.

7. In a device for dispensing industrial fluid which is viscous and/or high purity and/or shear-sensitive, the combination of:

first pumping means; and

second pumping means adapted to receive said fluid after said fluid has been pumped by said first pumping means, whereby said first pumping means is actuated by displacement of a relatively incompressible fluid, and said first pumping means includes means for creating negative pressure therein for drawing said fluid from a reservoir and said second pumping means receives said fluid and said fluid is subsequently dispensed from said second pumping means; and

means for dispensing said fluid from said second pumping means at rates independent of operation of said first pumping means, in which each of said first and second pumping means includes surfaces that contact said fluid, said surfaces being of materials that are non-contaminating to said fluid.

8. In a device for dispensing industrial fluid which is viscous and/or high purity and/or shear-sensitive, the combination of:

first pumping means; and

second pumping means adapted to receive said fluid after said fluid has been pumped by said first pumping means, whereby said first pumping means is actuated by displacement of a relatively incompressible fluid, and said first pumping means draws said fluid from a reservoir and said second pumping means receives said fluid and said fluid is subsequently dispensed from said second pumping means; and

means for dispensing said fluid from said second pumping means at rates independent of operation of said first pumping means, in which incremental positive displacement of said second pumping means results in corresponding incremental dispense of said fluid, in which each of said first and second pumping means includes surfaces that contact said fluid, said surfaces being of materials that are non-contaminating to said fluid.

9. In a device for dispensing industrial fluid which is viscous and/or high purity and/or shear-sensitive, the combination of:

first pumping means; and

second pumping means adapted to receive said fluid after said fluid has been pumped by said first pumping means, whereby said first pumping means is actuated by displacement of a relatively incompressible fluid, and said first pumping means draws said fluid from a reservoir and said second pumping means receives said fluid and said fluid is subsequently dispensed from said second pumping means; and

means for dispensing said fluid from said second pumping means at rates independent of operation of said first pumping means and independent of rate of dispense from said second pumping means, in which each of said first and second pumping means includes surfaces that contact said fluid, said surfaces being of materials that are non-contaminating to said fluid.