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Ultra miniature pressure sensor and guide wire using the same and method

  • US 6,106,476 A
  • Filed: 08/15/1997
  • Issued: 08/22/2000
  • Est. Priority Date: 09/02/1994
  • Status: Expired due to Term
First Claim
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1. A guide wire having pressure sensing capabilities for measuring the pressure of liquid in a vessel comprising a flexible elongate member and having proximal and distal extremities and having an outside diameter of 0.018" or less, said distal extremity of said flexible elongate member being adapted to be disposed in the liquid in said vessel, a housing carried by the distal extremity of the flexible elongate member and having an outer surface with a diameter substantially the same as the diameter of the flexible elongate member and being axially collinear with the flexible elongate member so that it forms an integral portion of the distal extremity of the flexible elongate member, said housing having a space therein, a pressure sensor mounted in the space in the housing, and having an outer surface flush with the outer surface of the housing the pressure sensor comprising a crystal of semiconductor material having a well therein open to ambient defined in part by a bottom wall forming a diaphragm having a thickness, said diaphragm being disposed in the housing in a manner so that it is sensitive to changes of pressure in the liquid in the vessel, said diaphragm being rectangular in shape and being bordered by a rim surrounding the well and formed of the crystal of semiconductor material, a backing plate formed of an insulating material bonded to the crystal and serving to reinforce the rim of the crystal of semiconductor material, said backing plate having a cavity therein underlying the diaphragm and providing a pressure reference, said cavity having the same size as the diaphragm and in substantial registration with the diaphragm so that the diaphragm is free of the backing plate, said crystal of semiconductor material having at least one diffused region therein formed of an impurity, said diffused region overlying the portion of the diaphragm where deflection will occur whereby upon the application of a pressure to the diaphragm a change in resistance will occur in the diffused region, conductive means carried by the crystal of semiconductor material and coupled to said at least one diffused region, a power source connected to the conductor means for supplying electrical energy to said at least one diffused region and means measuring the change in resistance in said at least one diffused region to ascertain the pressure being applied to the diaphragm by the liquid in the vessel.

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