Methods and apparatus for reducing particle contamination during wafer transport

• US 6,106,634 A
• Filed: 02/11/1999
• Issued: 08/22/2000
• Est. Priority Date: 02/11/1999
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Chandrachood, Madhavi, Ghanayem, Steve G.
• Primary Examiner(s): Gulakowski, Randy
• Assistant Examiner(s): Chaudhry, Saeed
• Application Number:
  US09/249,538
• Time in Patent Office: 558 Days
• Field of Search: 134/19, 134/18, 134/1.2, 134/1.3, 118/719, 118/724, 427/248.1, 427/314, 414/217
• US Class Current: 134/19
• CPC Class Codes: B08B 17/02 Preventing deposition of fouling or of dust
• CPC Class Codes: C23C 16/4401 Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H01L 21/67167 surrounding a central transfer chamber
• CPC Class Codes: H01L 21/67184 characterized by the presence of more than one transfer chamber
• CPC Class Codes: H01L 21/67248 Temperature monitoring

Abstract

The present invention provides methods and apparatus for reducing particulate contamination during the processing of a substrate. In one embodiment, the method includes the step of preheating a substrate in a preheater to a desired temperature. The preheated substrate is transferred from the preheater to a buffer region having a pressure therein that is between about two (2) Torr and about seven hundred and sixty (760) Torr. The preheated substrate is transferred from the buffer region to a reaction chamber. Thermophoretic forces help repel particles away from the substrate surface during substrate transfer.

Claims

1. A method of reducing particulate contamination during transfer of a substrate, the method comprising the steps of:

preheating a substrate in a preheater to a desired temperature;

transferring said preheated substrate from said preheater to a buffer region, said buffer region having a pressure that is between about two (2) Torr and about seven hundred and sixty (760) Torr; and

transferring said preheated substrate from said buffer region to a reaction chamber.

2. A method as in claim 1, wherein during said transferring steps said substrate desired temperature and said buffer region pressure are at levels sufficient to repel at least some particles away from said substrate.

3. A method as in claim 2, wherein said particles repelled away from said substrate have a diameter that is between about 0.01 microns and about 1.00 microns.

4. A method as in claim 1, wherein said preheater comprises a preheat chamber.

5. A method as in claim 1, wherein said preheater comprises a load lock, said load lock containing a plurality of substrates.

6. A method as in claim 1, wherein said preheating step comprises preheating said substrate to said desired temperature that is between about 200 degrees Celsius and about 700 degrees Celsius.

7. A method as in claim 1, wherein said transferring steps comprise using at least one robot to transfer said substrate from said preheater to said buffer region and from said buffer region to said reaction chamber.

8. A method as in claim 1, wherein said preheating step occurs when said preheater has an internal pressure that is between about two (2) Torr and about seven hundred and sixty (760) Torr.

9. A method as in claim 1, wherein said step of transferring said substrate from said preheater to said buffer region occurs when said preheater has an internal pressure that is between about two (2) Torr and about seven hundred and sixty (760) Torr.

10. A method as in claim 1, wherein said step of transferring said substrate from said preheater to said buffer region occurs when said preheater has an internal pressure that is about equal to said buffer region pressure.

11. A method as in claim 1, wherein said step of transferring said substrate from said buffer region to said reaction chamber occurs when a pressure in said reaction chamber is between about two (2) Torr and about seven hundred and sixty (760) Torr.

12. A method as in claim 1, wherein said step of transferring said substrate from said buffer region to said reaction chamber occurs when a pressure in said reaction chamber is about equal to said buffer region pressure.

13. A method as in claim 1, wherein said transferring steps occur when said buffer region pressure, an internal pressure in said preheater and an internal pressure in said reaction chamber are about equal.

14. A method as in claim 1, wherein said preheating and transferring steps occur in a single, multi-chamber substrate processing machine.

15. A method as in claim 14, wherein said preheating and transferring steps occur under vacuum conditions.

16. A method as in claim 1, wherein said buffer region contains a buffer gas at a buffer gas temperature;

and

during said transferring steps, said substrate desired temperature is greater than said buffer gas temperature.

17. A method as in claim 1, wherein said reaction chamber contains a chamber gas at a chamber gas temperature;

and

during said step of transferring said substrate from said buffer region to said reaction chamber, said substrate desired temperature is greater than said chamber gas temperature.

18. A method of reducing particulate contamination during transfer of a substrate, comprising the steps of:

preheating a substrate in a preheater to a desired temperature that is at least about 200 degrees Celsius;

transferring said substrate from said preheater to a buffer region, said buffer region having a pressure that is between about two (2) Torr and about seven hundred and sixty (760) Torr; and

transferring said substrate from said buffer region to a first reaction chamber.

19. A method as in claim 18, further comprising the steps of:

processing said substrate in said first reaction chamber;

transferring said substrate from said first reaction chamber to said buffer region, said buffer region pressure being between about two (2) Torr and about seven hundred and sixty (760) Torr;

transferring said substrate from said buffer region to a second reaction chamber; and

processing said substrate in said second reaction chamber;

wherein said substrate has a temperature that is sufficient to repel at least some particles during said transferring steps.

20. A method as in claim 18, further comprising the steps of,

processing said substrate in said first reaction chamber;

transferring said substrate from said first reaction chamber to said buffer region; and

transferring said substrate from said buffer region to a load lock;

wherein said substrate has a temperature that is sufficient to repel at least some particles during said transferring steps.

21. A method as in claim 18, wherein,

said buffer region contains a buffer gas having a buffer gas temperature and said first reaction chamber contains a chamber gas having a chamber gas temperature;

and

during said transfer steps, said substrate has a temperature that is greater than said buffer gas temperature and greater than said chamber gas temperature.

22. A method of reducing particulate contamination during transfer of a substrate, comprising the steps of:

preheating a substrate in a preheater to a desired temperature that is between about 200 degrees Celsius and about 700 degrees Celsius;

transferring said preheated substrate to a buffer region, said buffer region having a pressure that is between about two (2) Torr and about seven hundred and sixty (760) Torr; and

transferring said preheated substrate from said buffer region to a reaction chamber;

wherein said transferring steps occur while maintaining said buffer region and said reaction chamber at conditions suitable to repel particles away from said substrate, said particles having a diameter that is between about 0.01 microns and about 1.00 microns.