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Water vapor plasma treatment of glass surfaces

  • US 6,106,653 A
  • Filed: 03/31/1998
  • Issued: 08/22/2000
  • Est. Priority Date: 03/31/1998
  • Status: Expired due to Fees
First Claim
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1. A process for increasing the number density of hydroxyl groups on a clean glass surface comprising contacting said surface with a radio frequency induced gas plasma containing water vapor.

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