Linear motor mechanism for exposure apparatus, and device manufacturing method using the same
First Claim
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1. A linear motor, comprising:
- a plurality of stator elements each having a planar yoke and coils disposed along a predetermined direction; and
a movable element having magnet means with plural magnetic poles,wherein said stator elements are disposed opposed to each other with said magnet means of said movable element disposed between the opposed stator elements.
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Abstract
A linear motor mechanism includes a stator element and a movable element being movable relative to the stator element in a predetermined direction through an electromagnetic drive force, wherein the stator element includes a yoke and coils disposed along a predetermined direction while the movable element includes a magnet with plural magnetic poles but with no yoke. Plural stator elements are disposed opposed to each other with a magnet of the movable element disposed therebetween.
88 Citations
36 Claims
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1. A linear motor, comprising:
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a plurality of stator elements each having a planar yoke and coils disposed along a predetermined direction; and a movable element having magnet means with plural magnetic poles, wherein said stator elements are disposed opposed to each other with said magnet means of said movable element disposed between the opposed stator elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A linear motor, comprising:
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a stator element having a planar yoke and plural coils disposed along a predetermined direction; and a movable element having a magnet with plural magnetic poles but having no yokes. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A linear motor, comprising:
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a stator element having a yoke, a first coil wound on said yoke along a first direction, and a second coil wound on said yoke along a second direction different from the first direction; and a movable element having a magnet but having no yoke. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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Specification