Piezoelectric resonators on a differentially offset reflector

• US 6,107,721 A
• Filed: 07/27/1999
• Issued: 08/22/2000
• Est. Priority Date: 07/27/1999
• Status: Expired due to Term

• Current Assignee: Qorvo US, Inc. (Qorvo, Inc.)
• Original Assignee: Qorvo Oregon, Inc. (Qorvo, Inc.)
• Inventors: Lakin, Kenneth Meade
• Primary Examiner(s): Ramirez, Nestor
• Assistant Examiner(s): STEFANIW, ELIZA I
• Application Number:
  US09/361,645
• Time in Patent Office: 392 Days
• Field of Search: 310/320, 310/321, 310/340, 310/344, 310/345, 310/348, 310/357, 310/366, 310/367, 310/368
• US Class Current: 310/321
• CPC Class Codes: H03H 9/564 implemented with thin-film techniques

Abstract

Piezoelectric resonators utilizing a differentially offset reflector. One or more piezoelectric resonators are supported upon a substrate by one or more intervening layers of material, which intervening layers of material act as a reflector. The reflector isolates the resonators from the substrate. A portion of one or more of the intervening layers of material includes a differential layer of material, which differential layer shifts the resonant frequencies of the resonators that overlie the differential layer as compared with the resonant frequencies of those resonators that do not overlie the differential layer of material.

Claims

1. A piezoelectric resonator device supported upon a substrate, the resonator device having a shifted resonant frequency, comprising:

a substrate,

a piezoelectric resonator,

a reflector comprising at least one intervening layer of material, the reflector intervening between the resonator and the substrate and the reflector supporting the resonator upon the substrate, the intervening layer of material located immediately adjacent to the resonator being substantially non-conductive,

one intervening layer of material including a differential layer of material, whereby the differential layer of material shifts the resonant frequency of the piezoelectric resonator device.

2. A combination of piezoelectric resonators supported upon a substrate comprising:

a substrate,

a first piezoelectric resonator having a resonant frequency,

a second piezoelectric resonator having a resonant frequency,

a reflector comprising at least one intervening layer of material, the reflector intervening between the first piezoelectric resonator and the substrate, and the reflector intervening between the second piezoelectric resonator and the substrate, and the reflector supporting the first and second piezoelectric resonators upon the substrate, the intervening layer of material located immediately adjacent to the resonator being substantially non-conductive,

a portion of one intervening layer of material including a differential layer of material, said portion intervening between the first piezoelectric resonator and the substrate and said portion not intervening between the second piezoelectric resonator and the substrate, whereby the resonant frequency of the first piezoelectric resonator is shifted relative to the resonant frequency of the second piezoelectric resonator.