Probe card changer system and method

• US 6,107,813 A
• Filed: 02/26/1996
• Issued: 08/22/2000
• Est. Priority Date: 04/11/1994
• Status: Expired due to Term

• Current Assignee: Xandex, Inc.
• Original Assignee: Xandex, Inc.
• Inventors: Richards, Tom, Sinsheimer, Roger
• Primary Examiner(s): Karlsen, Ernest F.
• Assistant Examiner(s): KOBERT, RUSSELL MARC
• Application Number:
  US08/606,979
• Time in Patent Office: 1,639 Days
• Field of Search: 324/754, 324/755, 324/757, 324/758
• US Class Current: 324/750.22
• CPC Class Codes: G01R 1/07314 the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support on an elastic support, e.g. a film, G01R1/0735

Abstract

A prober tester interface system and a method for loading a probe card into a prober. The interface system includes a stiffener for holding a probe card, the stiffener having an upper surface, a perimeter, an underside, a plurality of recesses in the underside around the perimeter, and first and second alignment holes. A theta ring for holds the stiffener in the prober, the theta ring having first alignment pins for engaging the first alignment holes, a plurality of lock cylinders for engaging the recesses, and a machined lip against which the upper surface of the stiffener is forced by the lock cylinders. A loader is coupled to the prober for loading the stiffener in and unloading the stiffener from the theta ring, the loader having second alignment pins for engaging the second alignment holes. A theta drive assembly is coupled to the theta ring for rotating the theta ring to align the probe card with the test head. In a specific embodiment, the test head includes a contactor, and the theta ring includes a plurality of clamp cylinders for locking the contactor in theta and Z while a probe card is being loaded or unloaded.

Claims

1. A prober to test head interface, comprising:

a stiffener for holding a probe card, the stiffener having an upper surface, a perimeter, an underside, a plurality of recesses in the underside around the perimeter, and first and second alignment holes;

a theta ring for holding the stiffener, the theta ring having first alignment pins for engaging the first alignment holes, a plurality of lock cylinders for engaging the recesses, and a machined lip against which the upper surface of the stiffener is forced by the lock cylinders;

a loader coupled to the prober for loading the stiffener in and unloading the stiffener from the theta ring, the loader having second alignment pins for engaging the second alignment holes, wherein the loader comprises an arm assembly coupled to the prober for moving the stiffener in first and second directions, the first direction being substantially parallel to a plane defined by the upper surface of the stiffener, and the second direction being substantially perpendicular to the plane, the arm assembly comprising;

a Z mechanism coupled to the prober;

a first slide assembly coupled to the Z mechanism;

a first air cylinder coupled to the first slide assembly;

a second slide assembly coupled to the first air cylinder;

a second air cylinder coupled to the second slide assembly; and

a hand coupled to the second air cylinder for holding the stiffener, the second alignment pins being located on the hand;

wherein the first air cylinder moves the second slide assembly with respect to the first slide assembly in the first direction, the second air cylinder moves the hand with respect to the second slide assembly in the first direction to a position directly below the theta ring, and the Z mechanism moves the arm assembly in the second direction, thereby causing the first alignment holes to engage the first alignment pins on the theta ring; and

a theta drive assembly coupled to the theta ring for rotating the theta ring to align the probe card with the test head.

2. The prober to test head interface of claim 1 wherein the loader further comprises a magazine frame having at least one docking receptacle, and the interface further comprises at least one docking pin for engaging the at least one docking receptacle.

3. The prober to test head interface of claim 1 wherein the stiffener comprises a memory for storing operational data regarding the probe card.

4. The prober to test head interface of claim 3 wherein the operational data comprises a previous theta location for the probe card, and the theta drive assembly comprises a motorized belt drive, the motorized belt drive having a position feedback mechanism which the motorized belt drive employs to rotate the theta ring and position the probe card at the previous theta location.

5. The prober to test head interface of claim 3 wherein the memory comprises a touch memory positioned on the underside of the stiffener.

6. The prober to test head interface of claim 5 wherein the loader further comprises a memory reader for contacting the touch memory and reading the operational data stored therein.

7. The prober to test head interface of claim 1 wherein the test head comprises a contactor, and the theta ring comprises a plurality of clamp cylinders for locking the contactor in theta while a probe card is being loaded or unloaded.

8. The prober to test head interface of claim 7 wherein the stiffener comprises third alignment holes for engaging pins on the contactor.