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Plasma generating apparatus with multiple microwave introducing means

  • US 6,109,208 A
  • Filed: 07/27/1998
  • Issued: 08/29/2000
  • Est. Priority Date: 01/29/1998
  • Status: Expired due to Fees
First Claim
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1. A plasma generating apparatus for generating plasma in a prescribed region including a plasma processing region, comprising:

  • a vacuum vessel having said plasma processing region therein and equipped with a vacuum evacuation means;

    a discharge gas supplying means for supplying a discharge gas into said vacuum vessel;

    a microwave emitting means for emitting microwaves into said vacuum vessel;

    a microwave introducing means for introducing microwaves emitted by said microwave emitting means into said vacuum vessel; and

    a magnetic field generating means for generating a magnetic field in said vacuum vessel;

    wherein said microwave introducing means includes a plurality of tube-shaped or rod-shaped dielectric members arranged in parallel and inserted into said vacuum vessel; and

    said magnetic field generating means includes a means for generating a magnetic field strong enough for creating an electron cyclotron resonance region with microwaves having a prescribed frequency in the vicinity of an inner wall of said vacuum vessel and a means for generating a magnetic field of less than or equal to 100 G in the region where said plurality of tube-shaped or rod-shaped dielectric members of said microwave introducing means are located.

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