×

Prevention of ground fault interrupts in a semiconductor processing system

  • US 6,110,322 A
  • Filed: 03/06/1998
  • Issued: 08/29/2000
  • Est. Priority Date: 03/06/1998
  • Status: Expired due to Term
First Claim
Patent Images

1. A pedestal heating system configured to heat a pedestal disposed in a processing chamber of a substrate processing system, comprising:

  • a heater power supply;

    an isolation transformer, coupled to said heater power supply;

    a heater element, disposed within the pedestal and coupled to said isolation transformer, wherein said isolation transformer is configured to reduce leakage current from said heater element to a chamber wall of said processing chamber.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×