Interconnection with integrated corrosion stop

• US 6,111,301 A
• Filed: 04/24/1998
• Issued: 08/29/2000
• Est. Priority Date: 04/24/1998
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Stamper, Anthony K.
• Primary Examiner(s): Loke, Steven H.
• Application Number:
  US09/066,121
• Time in Patent Office: 858 Days
• Field of Search: 257/529, 257/530, 257/751, 257/753, 257/758, 257/761, 257/762, 257/764, 257/765, 257/767, 257/771
• US Class Current: 257/529
• CPC Class Codes: H01L 23/5256 comprising fuses, i.e. connections having their state changed from conductive to non-conductive
• CPC Class Codes: H01L 23/564 Details not otherwise provided for, e.g. protection against moisture getters H01L23/26
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

An interconnection structure for a semiconductor circuit is provided employing a conductor structure electrically connected to conductive wiring located on a different level than the conductor structure. The conductor structure comprises a relatively low resistivity metal. A barrier layer of a corrosion resistant metal is located intermediate the relatively low resistivity metal and wiring to thereby separate the wiring and relatively low resistivity metal.

Claims

1. An interconnection structure for a semiconductor circuit comprising:

(A) a fuse structure; and

(B) conductive wiring located on a different level than said fuse structure;

wherein said fuse structure is electrically connected to said conductive wiring and wherein said fuse structure comprises a relatively low resistivity metal; and

(C) a conformal barrier layer of a chemical vapor deposited corrosion resistant metal conductively contacting said relatively low resistivity metal and wherein said barrier layer of a corrosion resistant metal is located intermediate said relatively low resistivity metal and said wiring and along the sides of said relatively low resistivity metal thereby separating said wiring from said relatively low resistivity metal.

2. The interconnection structure of claim 1 wherein said low resistivity metal is located on top of said barrier layer.

3. The interconnection structure of claim 2 wherein said fuse structure further comprises adhesion promoting layer or diffusion barrier between said low resistivity metal and said corrosion resistant metal.

4. The interconnection structure of claim 3 wherein said adhesion promoting layer includes tantalum nitride.

5. The interconnection structure of claim 1 wherein said low resistivity metal is copper.

6. The interconnection structure of claim 5 wherein said corrosion resistant metal is tungsten.

7. The interconnection structure of claim 6 wherein said tungsten is chemical vapor deposited tungsten.

8. The interconnection structure of claim 1 further comprising via between the different levels.

9. The interconnection structure of claim 1 wherein the fuse structure is located in a trench in the interconnection structure and said conformal barrier layer is located adjacent the side walls and bottom of the trench.