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Method and apparatus for processing pattern image data by SEM

  • US 6,111,981 A
  • Filed: 08/07/1998
  • Issued: 08/29/2000
  • Est. Priority Date: 01/28/1994
  • Status: Expired due to Fees
First Claim
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1. A method for processing an image in order to recognize a pattern of a scanning electron microscope (SEM) including a repetitive pattern, comprising:

  • a step of inputting multi-value image data such as contact holes which are made through a semiconductor substrate into an image processing apparatus;

    a step of performing a spatial filtering with respect to said multi-valued image data of the contact holes to output a spatial filtering image for each of said contact holes;

    a step of performing a histogram processing with respect to said spatial filtered image to output histogram data;

    a step of automatically setting a slice level with respect to said histogram data;

    a step of performing a three-valued processing with respect to said spatial filtered image on the basis of said slice level to output a three-valued processed image;

    a step of alternatively performing a contraction and expansion with respect to said three-valued processed image;

    a step of performing a labeling with respect to said image data; and

    a step of detecting an entire area of a pattern of contact holes having an area which most closely approximates an area of a reference image which has been previously stored, after obtaining said area of said repetitive pattern.

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