Method of growing a ZnS:Mn phosphor layer for use in thin-film electroluminescent components
First Claim
1. A method of growing a ZnS:
- Mn phosphor layer for use in thin-film electroluminescent components, comprising growing the ZnS;
Mn phosphor layer on a substrate by an atomic layer epitaxy method usingan organozinc compound as a precursor for zinc selected from the group consisting of simple alkyl compounds, C1 -C6 dialkyl compounds, diaryl compounds, di-3-mercaptopropyl zinc, di-4-metoxybutyl zinc and dialkyl zinc compounds forming complex compounds with ethers or amines,hydrogen sulfide or an organosulfur compound as a precursor for sulfur, andan organomanganese compound or organic manganese complex compound as a precursor for manganese.
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Abstract
The invention relates to a method of growing a ZnS:Mn phosphor layer suitable for use in thin-film electroluminescent components. According to the method, the ZnS:Mn phosphor layer is grown on a substrate by means of the ALE method using volatile zinc, sulfur and manganese compounds as the precursors. According to the invention, an organozinc compound such as diethylzinc or dimethylzinc is used as precursor for zinc, hydrogen sulfide or an organosulfur compound is used as precursor for sulfur, and an organomanganese compound or organic manganese complex compound is used as precursor for manganese. The invention provides a display component with drive-voltage-symmetrical light emission and stable characteristics of luminance level and turn-on voltage.
144 Citations
20 Claims
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1. A method of growing a ZnS:
- Mn phosphor layer for use in thin-film electroluminescent components, comprising growing the ZnS;
Mn phosphor layer on a substrate by an atomic layer epitaxy method usingan organozinc compound as a precursor for zinc selected from the group consisting of simple alkyl compounds, C1 -C6 dialkyl compounds, diaryl compounds, di-3-mercaptopropyl zinc, di-4-metoxybutyl zinc and dialkyl zinc compounds forming complex compounds with ethers or amines, hydrogen sulfide or an organosulfur compound as a precursor for sulfur, and an organomanganese compound or organic manganese complex compound as a precursor for manganese. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
- Mn phosphor layer for use in thin-film electroluminescent components, comprising growing the ZnS;
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15. A method of forming a thin-film electroluminescent display, the method comprising the step of:
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growing by an atomic layer epitaxy method a manganese-doped zinc sulfide (ZnS;
Mn) phosphor layer usingan organozinc compound as a zinc precursor selected from the group consisting of simple alkyl compounds, C1 -C6 dialkyl compounds diaryl compounds, di-3-mercaptopropyl zinc, di-4-metoxybutyl zinc, and dialkyl zinc compounds forming complex compounds with ethers or amines, a sulfur-containing compound as a sulfur precursor, and an organomanganese compound or an organic manganese complex as a manganese precursor. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification