Transparent substrate provided with at least one thin layer based on silicone nitride or oxynitride and the process for obtaining it

• US 6,114,043 A
• Filed: 02/10/1998
• Issued: 09/05/2000
• Est. Priority Date: 02/10/1997
• Status: Expired due to Term

• Current Assignee: Saint-Gobain Vitrage
• Original Assignee: Saint-Gobain Vitrage
• Inventors: Joret, Laurent
• Primary Examiner(s): TURNER, ARCHENE A
• Application Number:
  US09/021,307
• Time in Patent Office: 938 Days
• Field of Search: 428/428, 428/432, 428/216, 428/212, 428/336, 428/704, 428/698, 428/697, 428/699, 359/580, 359/586, 359/589
• US Class Current: 428/428
• CPC Class Codes: C03C 17/225 Nitrides
• CPC Class Codes: C03C 17/3435 comprising a nitride, oxynitride, boronitride or carbonitride
• CPC Class Codes: C03C 17/3441 comprising carbon, a carbide or oxycarbide
• CPC Class Codes: C03C 17/36 at least one coating being a metal
• CPC Class Codes: C03C 17/3626 one layer at least containing a nitride, oxynitride, boronitride or carbonitride
• CPC Class Codes: C03C 17/3649 made of metals other than silver
• CPC Class Codes: C03C 17/366 Low-emissivity or solar control coatings
• CPC Class Codes: C03C 2217/281 Nitrides
• CPC Class Codes: C03C 2217/78 Coatings specially designed to be durable, e.g. scratch-resistant
• CPC Class Codes: C23C 16/308 Oxynitrides
• CPC Class Codes: C23C 16/345 Silicon nitride
• CPC Class Codes: Y10T 428/24942 including components having same physical characteristic in differing degree
• CPC Class Codes: Y10T 428/24975 No layer or component greater than 5 mils thick
• CPC Class Codes: Y10T 428/265 1 mil or less

Abstract

The invention relates to a coated glass substrate, covered with at least one thin layer based on silicon nitride or silicon oxynitride. The thin layer contains the elements Si, O, N, C in the following atomic percentages:

Si: from 30 to 60%,

N: from 10 to 56%,

O: from 1 to 40%,

C: from 1 to 40%.

The invention also relates to the process for obtaining the coated glass substrate using a gas-phase pyrolysis technique, and to its applications.

Claims

1. A coated glass substrate, comprising a glass substrate and at least one thin layer based on silicon nitride or silicon oxynitride, wherein said thin layer comprises the elements Si, O, N, and C in the following atomic percentages:

Si;

from 30 to 60%;

N;

from 10 to 56%;

O;

from 1 to 40%; and

C;

from 1 to 40% and has been deposited on said substrate by gas-phase pyrolysis at a temperature ranging from 550 to 760°

C.

2. The coated glass substrate according to claim 1, wherein said thin layer further comprises at least one additive selected from the group consisting of halogen, P, and B, and a mixture thereof in an atomic percentage between 0.1 and 5%.

3. The coated glass substrate according to claim 2, wherein said halogen is fluorine.

4. The coated glass substrate according to claim 1, wherein said thin layer has a homogeneous composition or has a composition gradient through its thickness.

5. The coated glass substrate according to claim 1, wherein said thin layer has a light absorption coefficient, A_L of less than 2% for a geometrical thickness of said thin layer of 100 nanometers.

6. The coated glass substrate according to claim 1, wherein said thin layer has a geometrical thickness between 5 nm and 5 μ

m.

7. The coated glass substrate according to claim 6, wherein said thin layer has a geometrical thickness of at least 250 nanometers.

8. The coated glass substrate according to claim 1, wherein said thin layer has a refractive index of greater than 1.6.

9. The coated glass substrate according to claim 1, further comprising a functional layer.

10. The coated glass substrate according to claim 9, wherein the functional layer is between said thin layer and the glass substrate.

11. The coated glass substrate according to claim 9, wherein the functional layer is made of fluorine-doped tin oxide F:

SnO₂, tin-doped indium oxide ITO, indium-doped zinc oxide In;

ZnO, fluorine-doped zinc oxide F;

ZnO, aluminum-doped zinc oxide Al;

ZnO or tin-doped zinc oxide Sn;

ZnO, the mixed oxide Cd₂ SnO₄, titanium nitride TIN, titanium oxynitride, or zirconium nitride ZrN.

12. The coated glass substrate according to claim 9, wherein said thin layer is between the glass substrate and the functional layer.

13. The coated glass substrate according to claim 1 further comprising at least one layer selected from the group consisting of TiN, ZrN, SiOC, and SiO₂ and a mixture thereof, wherein the coated glass substrate comprises a stack of layers having the following order:

glass substrate/TiN and/or ZrN/said thin layer /SiOC and/or SiO₂ overlayer.

14. The coated glass substrate according to claim 13, wherein said TiN layer has a geometrical thickness between 10 and 50 nanometers, said thin layer has a geometrical thickness between 5 and 20 nanometers, said SiOC and/or SiO₂ overlayer has a geometrical thickness between 30 and 100 nanometers and wherein said stack has a selectivity of at least 7%.

15. The coated glass substrate according to claim 1, wherein the temperature of gas-phase pyrolysis ranges from 600 to 760°

C.

16. An article or glazing assembly, comprising a glass substrate coated with a thin layer based on silicon nitride or silicon oxynitride, wherein the thin layer comprises the elements Si, O, N, and C in the following atomic percentages:

Si;

from 30 to 60%;

N;

from 10 to 56%;

O;

from 1 to 40%; and

C;

from 1 to 40%.

17. The article or glazing assembly according to claim 16, which is a clear or tinted monolithic, laminated or multiple-glazing assembly or is a clear or tinted bottle, container or flask.