Device for the encapsulated reception of a material
First Claim
1. An encapsulating device having a material encapsulated therein, said encapsulating device comprising the following features:
- a basic body formed by microsystem technology and provided with a recess for receiving therein the material in such a way that the whole material is arranged within said recess in spaced relationship with the face of the basic body in which an opening of said recess is formed;
a diaphragm implemented in microsystem or thin-film technology and extending across said basic body and said opening of said recess such that the material is encapsulated in said recess of the basic body in such a way that the diaphragm extends in spaced relationship with said material; and
a electrically actuable heating means for destroying said diaphragm so as to expose the material.
1 Assignment
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Accused Products
Abstract
An encapsulating device having a material encapsulated therein comprises aasic body provided with a recess for receiving therein the material and formed by microsystem technology in such a way that the material is fully arranged within the recess. A diaphragm extends across the basic body and is implemented in microsystem or thin-film technology. The diaphragm is used for encapsulating the material in the recess of the basic body in such a way that the diaphragm extends in spaced relationship with the material. An electrically actuable heating means is provided for destroying the diaphragm so as to expose the material.
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Citations
6 Claims
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1. An encapsulating device having a material encapsulated therein, said encapsulating device comprising the following features:
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a basic body formed by microsystem technology and provided with a recess for receiving therein the material in such a way that the whole material is arranged within said recess in spaced relationship with the face of the basic body in which an opening of said recess is formed; a diaphragm implemented in microsystem or thin-film technology and extending across said basic body and said opening of said recess such that the material is encapsulated in said recess of the basic body in such a way that the diaphragm extends in spaced relationship with said material; and a electrically actuable heating means for destroying said diaphragm so as to expose the material. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification