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Integrated circuit spiral inductor

  • US 6,114,937 A
  • Filed: 10/14/1997
  • Issued: 09/05/2000
  • Est. Priority Date: 08/23/1996
  • Status: Expired due to Term
First Claim
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1. A monolithic inductor having an increased quality factor (Q) comprising:

  • a silicon-containing semiconductor substrate;

    a dielectric layer formed on said silicon-containing semiconductor substrate, said dielectric layer having a spiral trench formed therein; and

    a first metal coil formed in said spiral trench.

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