Integrated circuit spiral inductor
First Claim
1. A monolithic inductor having an increased quality factor (Q) comprising:
- a silicon-containing semiconductor substrate;
a dielectric layer formed on said silicon-containing semiconductor substrate, said dielectric layer having a spiral trench formed therein; and
a first metal coil formed in said spiral trench.
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Abstract
High quality factor (Q) spiral and toroidal inductor and transformer are disclosed that are compatible with silicon very large scale integration (VLSI) processing, consume a small IC area, and operate at high frequencies. The spiral inductor has a spiral metal coil deposited in a trench formed in a dielectric layer over a substrate. The metal coil is enclosed in ferromagnetic liner and cap layers, and is connected to an underpass contact through a metal filled via in the dielectric layer. The spiral inductor also includes ferromagnetic cores lines surrounded by the metal spiral coil. A spiral transformer is formed by vertically stacking two spiral inductors, or placing them side-by-side over a ferromagnetic bridge formed below the metal coils and cores lines. The toroidal inductor includes a toroidal metal coil with a core having ferromagnetic strips. The toroidal metal coil is segmented into two coils each having a pair of ports to form a toroidal transformer.
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Citations
15 Claims
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1. A monolithic inductor having an increased quality factor (Q) comprising:
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a silicon-containing semiconductor substrate; a dielectric layer formed on said silicon-containing semiconductor substrate, said dielectric layer having a spiral trench formed therein; and a first metal coil formed in said spiral trench. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An integrated circuit semiconductor device having an inductor, said inductor comprising:
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a silicon-containing semiconductor substrate; a dielectric layer formed on said silicon-containing semiconductor substrate, said dielectric layer having a spiral trench formed therein; and a metal coil formed in said spiral trench. - View Dependent Claims (14, 15)
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Specification