Display device

• US 6,115,090 A
• Filed: 03/23/1998
• Issued: 09/05/2000
• Est. Priority Date: 03/26/1997
• Status: Expired due to Term

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei
• Primary Examiner(s): Sikes, William L.
• Assistant Examiner(s): NGUYEN, DUNG T
• Application Number:
  US09/045,697
• Time in Patent Office: 897 Days
• Field of Search: 349/138, 349/20, 349/52, 349/72, 349/143, 349/42, 349/43, 257/59, 257/72
• US Class Current: 349/42
• CPC Class Codes: G02F 1/1362 Active matrix addressed cells G02F1/134336, G02F1/134363 take precedence

Abstract

There is disclosed a structure for radiating heat generated by TFTs in a liquid crystal panel. A DLC film 125 is provided on a resin interlayer film 123 disposed on the TFTs 105, 109, and 113. The DLC film 125 can be easily formed on the resin film, and has high heat conductivity, so that the film can be made to function as a heat radiating layer.

Claims

1. A projector device comprising:

a substrate having an insulating surface;

a pixel circuit formed over said substrate;

a driving circuit for driving said pixel circuit, each of said pixel circuit and said driving circuit comprising thin film transistors formed on said insulating surface;

a first interlayer insulating film comprising an organic material formed over said pixel circuit and said driving circuit;

a carbon film formed on said first interlayer insulating film;

a second interlayer insulating film formed on the carbon film.

2. A device according to claim 1 wherein said carbon film is a diamond-like carbon film.

3. A device according to claim 1 wherein said substrate comprises an insulating material.

4. A device according to claim 1 further comprising pixel electrodes formed on said carbon film.

5. A device according to claim 4 wherein said pixel electrodes are reflective.

6. A device according to claim 1 wherein said carbon film comprises amorphous carbon having SP³ bonds.

7. A device according to claim 1 wherein said thin film transistors are of a top-gate type.

8. A device according to claim 1 wherein said thin film transistors are of a bottom-gate type.

9. A device according to claim 1 wherein the device is an EL device.

10. A display device comprising:

a substrate having an insulating surface;

an active matrix circuit formed over said substrate;

a driving circuit for driving said active matrix circuit, each of said active matrix circuit and said driving circuit comprising thin film transistors formed on said insulating surface;

a first interlayer insulating film comprising an organic material formed over the thin film transistors of said active matrix circuit and said driving circuit;

a carbon film formed on said interlayer insulating film; and

a second interlayer insulating film formed on said carbon film.

11. A display device according to claim 10 wherein said carbon film is a diamond-like carbon film.

12. A display device according to claim 10 wherein said substrate comprises an insulating material.

13. A display device according to claim 10 further comprising pixel electrodes formed on said carbon film.

14. A display device according to claim 13 wherein said pixel electrodes are reflective.

15. A display device according to claim 10 wherein said display device is a projector.

16. A display device according to claim 10 wherein said carbon film comprises amorphous carbon having SP³ bonds.

17. A device according to claim 10 wherein said thin film transistors are of a top-gate type.

18. A device according to claim 10 wherein said thin film transistors are of a bottom-gate type.

19. A device according to claim 10 wherein the display device is an EL display device.

20. A device having at least one active matrix panel said active matrix panel comprising:

a substrate having an insulating surface;

an active matrix circuit comprising at least one first thin film transistor formed over said substrate;

a driving circuit formed over said substrate and comprising at least an N-channel type thin film transistor and a P-channel type thin film transistor for driving said active matrix circuit;

a first interlayer insulating film comprising a first organic resin formed over the first thin film transistor and said N-channel type and P-channel type thin film transistors;

a carbon film formed over said first interlayer insulating film wherein said carbon film covers at least said first thin film transistor, said N-channel type thin film transistor and said P-channel type thin film transistor;

a pixel electrode formed over said carbon film and electrically connected to the first thin film transistor;

second interlayer insulating film comprising a second organic resin between said carbon film and said pixel electrode.

21. A device according to claim 20 wherein said carbon film is a diamond-like carbon film.

22. A device according to claim 20 wherein said substrate is a glass substrate.

23. A device according to claim 20 wherein said carbon film comprises amorphous carbon having SP³ bonds.

24. A device according to claim 20 wherein the first thin film transistors are of an N-channel type.

25. A device according to claim 20 wherein each of said first thin film transistor and said N-channel type and P-channel type thin film transistors is of a top-gate type.

26. A device according to claim 20 wherein each of said first thin film transistor and said N-channel type and P-channel type thin film transistors is of a bottom-gate type.

27. A device according to claim 20 wherein said first organic resin comprises a material selected from the group consisting of polyimide, polyimide amide, polyamide, acryl, and epoxy.

28. A device according to claim 20 wherein said device is a portable information processing terminal, which comprises a main body, an integrated circuit in the main body, said active matrix panel, a camera portion for incorporating a picture image, and an operation switch.

29. A head mount display using the active matrix panel according to claim 20.

30. A device according to claim 20 further comprising an antenna wherein said active matrix panel displays a map information received by said antenna from an artificial satellite.

31. A device according to claim 20 wherein said device is a portable telephone, which comprises a main body, an antenna, an audio output portion, said active matrix panel, an operation switch, and an audio input portion.

32. A video camera having the active matrix panel according to claim 20.

33. A device according to claim 20 wherein said device is a projector having said active matrix panel, a light source, an optical system and a screen.

34. A device according to claim 20 wherein the device is an EL display device.

49. A device according to claim 33 wherein said device is a projector having said active matrix panel, a light source, an optical system and a screen.

35. A device having at least one active matrix panel, said active matrix panel comprising:

a substrate having an insulating surface;

an active matrix circuit comprising at least one first thin film transistor formed over said substrate;

a driving circuit comprising at least an N-channel type thin film transistor and a P-channel type thin film transistor for driving said active matrix circuit;

a first interlayer insulating film comprising a first organic resin formed over the first thin film transistor and said N-channel type and P-channel type thin film transistors;

a carbon film formed over said first interlayer insulating film wherein said carbon film covers at least said first thin film transistor, said N-channel type thin film transistor and said P-channel type thin film transistor;

a reflective pixel electrode formed over said carbon film and electrically connected to the first thin film transistor;

a second interlayer insulating film comprising a second organic resin between said carbon film and said reflective pixel electrode.

36. A device according to claim 35 wherein said reflective pixel electrodes comprise aluminum.

37. A device according to claim 35 wherein said carbon film is a diamond-like carbon film.

38. A device according to claim 35 wherein said substrate is a glass substrate.

39. A device according to claim 35 wherein said carbon film comprises amorphous carbon having SP³ bonds.

40. A device according to claim 35 wherein the first thin film transistors are of an N-channel type.

41. A device according to claim 35 wherein each of said first thin film transistor and said N-channel type and P-channel type thin film transistors is of a top-gate type.

42. A device according to claim 35 wherein each of said first thin film transistor and said N-channel type and P-channel type thin film transistors is of a bottom-gate type.

43. A device according to claim 35 wherein said first organic resin comprises a material selected from the group consisting of polyimide, polyimide amide, polyamide, acryl, and epoxy.

44. A device according to claim 35 wherein said device is a portable information processing terminal, which comprises a main body, an integrated circuit in the main body, said active matrix panel, a camera portion for incorporating a picture image, and an operation switch.

45. A head mount display using the active matrix panel according to claim 35.

46. A device according to claim 35 further comprising an antenna wherein said active matrix panel displays a map information received by said antenna from an artificial satellite.

47. A device according to claim 35 wherein said device is a portable telephone, which comprises a main body, an antenna, an audio output portion, said active matrix panel, an operation switch, and an audio input portion.

48. A video camera having the active matrix panel according to claim 35.

50. A device according to claim 35 wherein the device is an EL display device.

61. A head mount display using the active matrix panel according to claim 48.

64. A video camera having the active matrix panel according to claim 48.

51. A device having at least one active matrix panel, said active matrix panel comprising:

a substrate having an insulating surface;

an active matrix circuit comprising first thin film transistors formed over said substrate;

a driving circuit comprising second thin film transistors for driving said active matrix circuit;

a first interlayer insulating film comprising a first organic resin formed over the first and second thin film transistors;

an electromagnetic shield pattern formed over said first interlayer insulating film;

a carbon film formed over said first interlayer insulating film and said electromagnetic shield pattern;

reflective pixel electrodes formed over said carbon film and electrically connected to the first thin film transistors;

a second interlayer insulating film comprising a second organic resin between said carbon film and said reflective pixel electrodes.

52. A device according to claim 51 wherein said reflective pixel electrodes comprise aluminum.

53. A device according to claim 51 wherein said carbon film is a diamond-like carbon film.

54. A device according to claim 51 wherein said substrate is a glass substrate.

55. A device according to claim 51 wherein said carbon film comprises amorphous carbon having SP³ bonds.

56. A device according to claim 51 wherein said electromagnetic shield functions so that said pixel electrodes do not interfere with said first thin film transistors.

57. A device according to claim 51 wherein each of said first and second thin film transistors is of a top-gate type.

58. A device according to claim 51 wherein each of said first and second thin film transistors is of a bottom-gate type.

59. A device according to claim 51 wherein said first organic resin comprises a material selected from the group consisting of polyimide, polyimide amide, polyamide, acryl, and epoxy.

60. A device according to claim 51 wherein said device is a portable information processing terminal, which comprises a main body, an integrated circuit in the main body, said active matrix panel, a camera portion for incorporating a picture image, and an operation switch.

62. A device according to claim 51 further comprising an antenna wherein said active matrix panel displays a map information received by said antenna from an artificial satellite.

63. A device according to claim 51 wherein said device is a portable telephone, which comprises a main body, an antenna, an audio output portion, said active matrix panel, an operation switch, and an audio input portion.

65. A device according to claim 51 wherein said device is a projector having said active matrix panel, a light source, an optical system and a screen.

66. A device according to claim 51 wherein the device is an EL display device.

67. A device having at least one active matrix panel, said active matrix panel comprising:

a substrate having an insulating surface;

an active matrix circuit comprising first thin film transistors formed over said substrate;

a driving circuit comprising second thin film transistors for driving said active matrix circuit;

a first interlayer insulating film comprising a first organic resin formed over the first and second thin film transistors;

an electromagnetic shield pattern formed over said first interlayer insulating film;

a carbon film formed over said first interlayer insulating film and said electromagnetic shield pattern;

pixel electrodes formed over said carbon film and electrically connected to the first thin film transistors;

a second interlayer insulating film comprising a second organic resin between said carbon film and said pixel electrodes.

68. A device according to claim 67 wherein said electromagnetic shield functions so that said pixel electrodes do not interfere with said first thin film transistors.

69. A device according to claim 67 wherein said carbon film is a diamond-like carbon film.

70. A device according to claim 67 wherein said substrate is a glass substrate.

71. A device according to claim 67 wherein said carbon film comprises amorphous carbon having SP³ bonds.

72. A device according to claim 67 wherein the first thin film transistors are of an N-channel type.

73. A device according to claim 67 wherein each of said first and second thin film transistors is of a top-gate type.

74. A device according to claim 67 wherein each of said first and second thin film transistors is of a bottom-gate type.

75. A device according to claim 67 wherein said first organic resin comprises a material selected from the group consisting of polyimide, polyimide amide, polyamide, acryl, and epoxy.

76. A device according to claim 67 wherein s aid device is a portable information processing terminal, which comprises a main body, an integrated circuit in the main body, said active matrix panel, a camera portion for incorporating a picture image, and an operation switch.

77. A head mount display using the active matrix panel according to claim 67.

78. A device according to claim 67 further comprising an antenna wherein said active matrix panel displays a map information received by said antenna from an artificial satellite.

79. A device according to claim 67 wherein said device is a portable telephone, which comprises a main body, an antenna, an audio output portion, said active matrix panel, an operation switch, and an audio input portion.

80. A video camera having the active matrix panel according to claim 67.

81. A device according to claim 67 wherein said device is a projector having said active matrix panel, a light source, an optical system and a screen.

82. A device according to claim 67 wherein the device is an EL display device.

83. A device having at least one active matrix panel, said active matrix panel comprising:

a substrate having an insulating surface;

an active matrix circuit comprising at least one first thin film transistor formed over said substrate;

a driving circuit comprising at least one second thin film transistor for driving said active matrix circuit;

a first interlayer insulating film formed over said first and second thin film transistors;

a first electrode formed on said first interlayer insulating film and electrically connected to a drain of said first thin film transistor through a contact hole of said first interlayer insulating film;

a second electrode formed on said first interlayer insulating film and electrically connected to one of a source or a drain of said second thin film transistor through a contact hole of said first interlayer insulating film wherein each of said first and second electrodes comprises a first layer comprising titanium, a second layer comprising aluminum and a third layer comprising titanium laminated in this order;

a second interlayer insulating film comprising a first organic resin formed over the first and second thin film transistors;

a third interlayer insulating film comprising carbon formed over said second interlayer insulating film wherein said third interlayer insulating film covers at least said first and second thin film transistors;

a pixel electrode formed over said third interlayer insulating film and electrically connected to the first thin film transistor through said first electrode;

a fourth interlayer insulating film comprising a second organic resin between said third interlayer insulating film and said pixel electrode.

84. A device according to claim 83 wherein said carbon film is a diamond-like carbon film.

85. A device according to claim 83 wherein said substrate is a glass substrate.

86. A device according to claim 83 wherein said carbon film comprises amorphous carbon having SP³ bonds.

87. A device according to claim 83 wherein the first thin film transistors are of all N-channel type.

88. A device according to claim 83 wherein each of said first and second thin film transistors is of a top-gate type.

89. A device according to claim 83 wherein each of said first and second thin film transistors is of a bottom-gate type.

90. A device according to claim 83 wherein said first organic resin comprises a material selected from the group consisting of polyimide, polyimide amide., polyamide, acryl, and epoxy.

91. A device according to claim 83 wherein said device is a portable information processing terminal, which comprises a main body, an integrated circuit in the main body, said active matrix panel, a camera portion for incorporating a picture image, and an operation switch.

92. A head mount display using the active matrix panel according to claim 83.

93. A device according to claim 83 further comprising an antenna wherein said active matrix panel displays a map information received by said antenna from an artificial satellite.

94. A device according to claim 83 wherein said device is a portable telephone, which comprises a main body, an antenna, an audio output portion, said active matrix panel, an operation switch, and an audio input portion.

95. A video camera having the active matrix panel according to claim 83.

96. A device according to claim 83 wherein said device is a projector having said active matrix panel, a light source, an optical system and a screen.

97. A device according to claim 83 wherein the device is an EL display device.

110. A device according to claim 92, further comprising:

an active matrix circuit formed in the semiconductor circuit comprising first thin film transistors;

a driving circuit formed in the semiconductor circuit comprising second thin film transistors for driving the active matrix circuit;

an electromagnetic shield formed between the first interlayer insulating film and the carbon film;

reflective pixel electrodes over the second interlayer insulating film.

111. A device according to claim 110 wherein said electromagnetic shield functions so that said reflective pixel electrodes do not interfere with said first thin film transistors.

112. A device according to claim 110 wherein the first thin film transistors are of an N-channel type.

113. A device according to claim 110 wherein each of said first and second thin film transistors is of a top-gate type.

114. A device according to claim 110 wherein each of said first and second thin film transistors is of a bottom-gate type.

115. A device according to claim 110 wherein said reflective pixel electrodes comprise aluminum.

98. A semiconductor device comprising:

a substrate having an insulating surface;

a semiconductor circuit formed over said substrate;

a first interlayer insulating film comprising a first organic resin formed over the semiconductor circuit;

a carbon film formed over said first interlayer insulating film;

a second interlayer insulating film comprising a second organic resin over the carbon film.

99. A device according to claim 98 wherein said carbon film is a diamond-like carbon film.

100. A device according to claim 98 wherein said substrate is a glass substrate.

101. A device according to claim 98 wherein said carbon film comprises amorphous carbon having SP³ bonds.

102. A device according to claim 98 wherein said first organic resin comprises a material selected from the group consisting of polyimide, polyimide amide, polyamide, acryl, and epoxy.

103. A device according to claim 98 wherein said device is a portable information processing terminal, which comprises a main body, an integrated circuit in the main body, said active matrix panel, a camera portion for incorporating a picture image, and an operation switch.

104. A head mount display using the active matrix panel according to claim 98.

105. A device according to claim 98 further comprising an antenna wherein said active matrix panel displays a map information received by said antenna from an artificial satellite.

106. A device according to claim 98 wherein said device is a portable telephone, which comprises a main body, an antenna, an audio output portion, said active matrix panel, an operation switch, and an audio input portion.

107. A video camera having the active matrix panel according to claim 98.

108. A device according to claim 98 wherein the semiconductor device is a projector having an active matrix panel, a light source, an optical system and a screen.

109. A device according to claim 98 wherein the device is an EL display device.

116. A device having at least one active matrix panel, said active matrix panel comprising:

a substrate having an insulating surface;

an active matrix circuit comprising at least one first thin film transistor formed over said substrate;

a driving circuit comprising at least one second thin film transistor for driving said active matrix circuit;

a first interlayer insulating film formed over said first and second thin film transistors;

a first electrode formed on said first interlayer insulating film and electrically connected to a drain of said first thin film transistor through a contact hole of said first interlayer insulating film;

a second electrode formed on said first interlayer insulating film and electrically connected to one of a source or a drain of said second thin film transistor through a contact hole of said first interlayer insulating film;

a second interlayer insulating film comprising a first organic resin formed over the first and second thin film transistors;

a third interlayer insulating film comprising carbon formed over said second interlayer insulating film wherein said third interlayer insulating film covers at least said first and second thin film transistors;

a reflective pixel electrode formed over said third interlayer insulating film and electrically connected to the first thin film transistor through said first electrode;

a fourth interlayer insulating film comprising a second organic resin between said third interlayer insulating film and said reflective pixel electrode.

117. A device according to claim 116 wherein said carbon film is a diamond-like carbon film.

118. A device according to claim 116 wherein said substrate is a glass substrate.

119. A device according to claim 116 wherein said carbon film comprises amorphous carbon having SP³ bonds.

120. A device according to claim 116 wherein said first organic resin comprises a material selected from the group consisting of polyimide, polyimide amide, polyamide, acryl, and epoxy.

121. A device according to claim 116 wherein said device is a portable information processing terminal, which comprises a main body, an integrated circuit in the main body, said active matrix panel, a camera portion for incorporating a picture image, and an operation switch.

122. A head mount display using the active matrix panel according to claim 116.

123. A device according to claim 116 further comprising an antenna wherein said active matrix panel displays a map information received by said antenna from an artificial satellite.

124. A device according to claim 116 wherein said device is a portable telephone, which comprises a main body, an antenna, an audio output portion, said active matrix panel, an operation switch, and an audio input portion.

125. A video camera having the active matrix panel according to claim 116.

126. A device according to claim 116 wherein said device is a projector having said active matrix panel, a light source, an optical system and a screen.

127. A device according to claim 116 wherein the device is an EL display device.