Electrostatic relay
First Claim
1. An electrostatic relay comprising:
- a substrate;
a torsional elasticity portion supported on said substrate such that a gap is maintained from said substrate and arranged to have a beam shape;
a movable structure portion rotatably supported by said torsional elasticity portion;
at least one movable contact provided at an end of said movable structure portion;
a movable electrode disposed between a fulcrum of rotation of said movable structure portion and said movable contact;
at least one fixed contact formed on said substrate at a position opposite to said movable contact such that contact is permitted; and
a fixed electrode formed on said substrate at a position opposite to said movable electrode;
wherein at least one portion between the fulcrum of rotation of said movable structure portion and said movable contact is formed into an elastic connection portion.
1 Assignment
0 Petitions
Accused Products
Abstract
An electrostatic relay comprises: a torsional elasticity portion supported on a substrate such that a gap is maintained from the substrate and arranged to have a beam shape; a movable structure portion which can be rotated by dint of elastic support of the torsional elasticity portion; at least one movable contact provided for at least an end of the movable structure portion; a movable electrode disposed between a fulcrum P of rotation of the movable structure portion and the movable contact; at least one fixed contact formed on the substrate at a position opposite to the movable contact such that contact is permitted; and a fixed electrode formed on the substrate at a position opposite to the movable electrode, wherein at least a portion between the fulcrum P of rotation of the movable structure portion and the movable contact is formed into an elastic connection portion.
116 Citations
15 Claims
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1. An electrostatic relay comprising:
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a substrate; a torsional elasticity portion supported on said substrate such that a gap is maintained from said substrate and arranged to have a beam shape; a movable structure portion rotatably supported by said torsional elasticity portion; at least one movable contact provided at an end of said movable structure portion; a movable electrode disposed between a fulcrum of rotation of said movable structure portion and said movable contact; at least one fixed contact formed on said substrate at a position opposite to said movable contact such that contact is permitted; and a fixed electrode formed on said substrate at a position opposite to said movable electrode; wherein at least one portion between the fulcrum of rotation of said movable structure portion and said movable contact is formed into an elastic connection portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An electrostatic relay comprising:
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a substrate; a torsional elasticity portion supported on said substrate such that a gap is maintained from said substrate and arranged to have a beam shape; a movable structure portion disposed to intersect said torsional elasticity portion and rotatably supported by said torsional elasticity portion; movable electrode portions rotatively provided for both sides of a fulcrum of rotation of said movable structure portion through elastic connection portions; movable electrodes constituted by said movable electrode portions or provided for said movable electrode portions; fixed electrodes disposed on said substrate at positions opposite to said movable electrodes; at least one movable contact provided for at least an end of said movable structure portion; and a fixed contact disposed on said substrate at a position opposite to said movable contact such that contact is permitted. - View Dependent Claims (11, 12, 13, 14, 15)
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Specification