Apparatus and methods for performing acoustical measurements

• US 6,116,080 A
• Filed: 04/17/1998
• Issued: 09/12/2000
• Est. Priority Date: 04/17/1998
• Status: Expired due to Term

• Current Assignee: Veeco Instruments Incorporated
• Original Assignee: Loren Industries Inc.
• Inventors: Lee, Patrick S., Sirota, Don N., Logue, Raymond C.
• Primary Examiner(s): NOORI, MAX H
• Application Number:
  US09/062,112
• Time in Patent Office: 879 Days
• Field of Search: 73/24.01, 73/24.02, 73/24.03, 73/24.05, 73/579, 73/580, 73/597
• US Class Current: 73/24.05
• CPC Class Codes: G01N 2291/02809 Concentration of a compound, e.g. measured by a surface mass change
• CPC Class Codes: G01N 2291/102 one emitter, one receiver
• CPC Class Codes: G01N 29/024 by measuring propagation velocity or propagation time of acoustic waves
• CPC Class Codes: G01N 29/222 Constructional or flow details for analysing fluids optoacoustic fluid cells G01N29/2425
• CPC Class Codes: G01N 29/449 Statistical methods not provided for in G01N29/4409, e.g. averaging, smoothing and interpolation
• CPC Class Codes: G01N 29/46 by spectral analysis, e.g. Fourier analysis or wavelet analysis spectral signal processing per se G06F17/14
• CPC Class Codes: G01N 29/50 using auto-correlation techniques or cross-correlation techniques

Abstract

Apparatus and methods for performing acoustical measurements are provided having some and preferably all of the following features: (1) the system is operated under near-field conditions; (2) the piezoelement or piezoelements used in the system are (a) mechanically and electrically damped and (b) efficiently electrically coupled to the signal processing components of the system; (3) each piezoelement used in the system includes an acoustical transformer for coupling the element to a gaseous test medium; (4) speed of sound is determined from the time difference between two detections of an acoustical pulse at a receiver; (5) cross-correlation techniques are employed to detect the acoustical pulse at the receiver; (6) fast Fourier transform techniques are used to implement the cross-correlation techniques; and (7) stray path signals through the body of the acoustic sensor are removed from detected signals prior to signal analysis. Techniques are also provided for performing acoustical measurements on gases whose thermodynamic properties have not been measures and on mixtures of compressible gases. Methods and apparatus for performing feedback control of a gas of interest in a mixture of that gas and a carrier gas are provided in which the controlled variable is the flow of the carrier gas.

Claims

1. Apparatus for acoustically determining a property of a gas comprising:

(a) a chamber for receiving the gas;

(b) a transmitter which, during use of the apparatus, transmits a pulse of acoustical energy through the gas in the chamber, said transmitter having a characteristic dimension and said pulse of acoustical energy comprising a plurality of oscillations of the acoustical energy, said plurality of oscillations having a center frequency f_c ; and

(c) a receiver which, during use of the apparatus, detects the pulse after the pulse has passed through the gas in the chamber, said passing of the pulse through the gas defining an acoustical path length L_p ;

wherein the transmitter has a near field zone of length L_n and the characteristic dimension, the center frequency, and the acoustical path length are chosen so that, during use of the apparatus, the receiver is within said near field zone so as to reduce variations in the pulse at the receiver resulting from changes in gas composition compared to operating with the receiver in the far field zone.

2. The apparatus of claim 1 wherein:

0.5 megahertz ≦

f_c ≦

10 megahertz.

3. The apparatus of claim 1 wherein:

L_p ≦

0.5 L_n.

4. The apparatus of claim 1 wherein the passing of the pulse through the gas comprises movement of the pulse in alternating directions between first and second spaced apart points within the chamber.

5. The apparatus of claim 4 wherein the transmitter comprises a first transducer located in the vicinity of the first spaced apart point and the receiver comprises a second transducer located in the vicinity of the second spaced apart point.

6. The apparatus of claim 5 wherein the transmitter has a gas-contacting surface, the receiver has a gas-contacting surface, the first point is at the gas-contacting surface of the transmitter, the second point is at the gas-contacting surface of the receiver, and a line between the first and second points is substantially perpendicular to said gas-contacting surfaces.

7. The apparatus of claim 5 wherein each of the first and second transducers is operated in its thickness mode.

8. The apparatus of claim 5 wherein:

(i) the first transducer has a thickness mode in which it undergoes thickness mode vibrations and a radial mode in which it undergoes radial mode vibrations;

(ii) the first transducer has a first electrical impedance associated with the first transducer'"'"'s thickness mode and a second electrical impedance associated with the first transducer'"'"'s radial mode; and

(iii) the transmitter further comprises a high frequency driver and an electrical matching circuit which electrically connects the high frequency driver to the first transducer, said electrical matching circuit serving to efficiently couple the output of the high frequency driver to the first electrical impedance, inefficiently couple said output to the second electrical impedance, and electrically damp electrical signals produced by mechanical oscillations of the first transducer after the first transducer has transmitted a pulse.

9. The apparatus of claim 8 wherein:

(i) the second transducer can undergo thickness mode vibrations and radial mode vibrations; and

(ii) the receiver further comprises a current-to-voltage converter electrically connected to the second transducer, a second electrical matching circuit electrically connected to the current-to-voltage converter, and an amplifier electrically connected to the second electrical matching circuit;

(iii) the current-to-voltage converter has a low input and output resistance; and

(iv) the current-to-voltage converter has an output electrical impedance which is in resonance with said second electrical matching circuit when the second transducer undergoes thickness mode vibrations.

10. The apparatus of claim 5 wherein the transmitter comprises a first multilayer acoustical transformer located between the first transducer and the chamber, and the receiver comprises a second multilayer acoustical transformer located between the second transducer and the chamber, said multilayer acoustical transformers serving to match the acoustical impedances of the transducers to the acoustical impedance of the gas during use of the apparatus.

11. The apparatus of claim 10 wherein each multilayer acoustical transformer comprises an aluminum layer in contact with the transducer, a stainless steel layer in contact with the aluminum layer, and a tetrafluoroethylene layer in contact with the stainless steel layer, said tetrafluoroethylene layer being in contact with the gas in the chamber during use of the apparatus.

12. The apparatus of claim 5 wherein the transmitter comprises first damping means associated with the first transducer for mechanically damping oscillations of the first transducer and the receiver comprises second damping means associated with the second transducer for mechanically damping oscillations of the second transducer.

13. The apparatus of claim 4 wherein the transmitter and receiver comprise a common transducer located in the vicinity of the first spaced apart point and the apparatus comprises a reflecting surface at the second spaced apart point.

14. The apparatus of claim 13 wherein the transmitter and the receiver have a common gas-contacting surface, the first point is at said common gas-contacting surface, and a line between the first and second points is substantially perpendicular to said reflecting surface and said common gas-contacting surface.

15. The apparatus of claim 13 wherein the common transducer is operated in its thickness mode.

16. The apparatus of claim 13 wherein:

(i) the common transducer has a thickness mode in which it undergoes thickness mode vibrations and a radial mode in which it undergoes radial mode vibrations;

(ii) the common transducer has a first electrical impedance associated with the common transducer'"'"'s thickness mode and a second electrical impedance associated with the common transducer'"'"'s radial mode; and

(iii) the transmitter further comprises a high frequency driver and an electrical matching circuit which electrically connects the high frequency driver to the common transducer, said electrical matching circuit serving to efficiently couple the output of the high frequency driver to the first electrical impedance, inefficiently couple said output to the second electrical impedance, and electrically damp electrical signals produced by mechanical oscillations of the common transducer after the transducer has transmitted a pulse.

17. The apparatus of claim 16 wherein:

(i) the receiver further comprises a current-to-voltage converter electrically connected to the common transducer, a second electrical matching circuit electrically connected to the current-to-voltage converter, and an amplifier electrically connected to the second electrical matching circuit;

(ii) the current-to-voltage converter has a low input and output resistance; and

(iii) the current-to-voltage converter has an output electrical impedance which is in resonance with said second electrical matching circuit when the common transducer undergoes thickness mode vibrations.

18. The apparatus of claim 13 wherein the apparatus further comprises a multilayer acoustical transformer located between the common transducer and the chamber, said multilayer acoustical transformer serving to match the acoustical impedance of the transducer to the acoustical impedance of the gas during use of the apparatus.

19. The apparatus of claim 18 wherein the multilayer acoustical transformer comprises an aluminum layer in contact with the transducer, a stainless steel layer in contact with the aluminum layer, and a tetrafluoroethylene layer in contact with the stainless steel layer, said tetrafluoroethylene layer being in contact with the gas in the chamber during use of the apparatus.

20. The apparatus of claim 13 wherein the apparatus further comprises damping means associated with the common transducer for mechanically damping oscillations of the common transducer.

21. The apparatus of claim 4 wherein the apparatus comprises detecting means associated with the receiver for detecting the pulse after the pulse has made n passages between the first and second spaced apart points (the n-passage pulse) and after it has made m passages between those points (the m-passage pulse), where a passage constitutes movement of the pulse between the first and second spaced apart points in either direction, m and n are integers, and

22. The apparatus of claim 21 wherein the detecting means comprises assigning means for assigning a time tn to the n-passage pulse and a time t_m to the m-passage pulse.

23. The apparatus of claim 22 wherein the assigning means comprises:

(i) equalizing means for substantially equalizing the amplitudes of the n-passage and m-passage pulses; and

(ii) identifying means for identifying reference points for the amplitude equalized n-passage and m-passage pulses.

24. The apparatus of claim 23 wherein:

(i) the equalizing means produces an n-passage pulse whose maximum amplitude is U_n and a m-passage pulse whose maximum amplitude is U_m, where U_n substantially equals U_m ;

(ii) the identifying means comprises means for producing rectified envelopes of the amplitude equalized pulses; and

(iii) the reference points for the amplitude equalized n-passage and m-passage pulses comprise those points where the rectified envelopes of those pulses have amplitudes of kU_n and kU_m, respectively, where

0<

k<

1.

25. The apparatus of claim 24 where k=0.5.

26. The apparatus of claim 22 wherein the assigning means comprises:

(i) cross-correlating means for performing cross-correlations between a waveform representing the pulse of acoustical energy transmitted by the transmitter and, individually, the n-passage and m-passage pulses detected by the receiver, said cross-correlating means producing cross-correlation functions for the n-passage and m-passage pulses; and

(ii) peak determining means for determining the peaks of said cross-correlation functions.

27. The apparatus of claim 26 wherein the waveform representing the pulse of acoustical energy transmitted by the transmitter is determined using a gas which has a close to ideal gas behavior at f_c and has either a known specific heat, compressibility, and molecular weight or a known speed of sound.

28. The apparatus of claim 26 wherein the cross-correlating means comprises:

(i) means for performing fast Fourier transforms of the n-passage and m-passage pulses detected by the receiver to produce Fourier transformed detected pulses;

(ii) means for individually multiplying said Fourier transformed detected pulses by the complex conjugate of a Fourier transform of said waveform representing the pulse of acoustical energy transmitted by the transmitter to produce Fourier space cross-correlation functions; and

(iii) means for individually performing inverse fast Fourier transforms of said Fourier space cross-correlation functions and taking the real part of said inverse fast Fourier transforms to produce said cross-correlation functions for the n-passage and m-passage pulses.

29. The apparatus of claim 26 wherein the peak determining means comprises:

(i) means for identifying the largest amplitude of the cross-correlation function and two amplitudes adjacent to the largest amplitude;

(ii) means for fitting a second order polynomial to said three amplitudes; and

(iii) means for determining the peak of the cross-correlation function from said second order polynomial.

30. The apparatus of claim 26 wherein the pulse of acoustical energy has leading and trailing cycles and is windowed so that said leading and trailing cycles taper from zero to full amplitude.

31. The apparatus of claim 26 wherein the pulse of acoustical energy is frequency modulated.

32. The apparatus of claim 22 wherein the detecting means comprises means for determining a time difference between t_m and t_n.

33. The apparatus of claim 32 further comprising computing means for determining the property of the gas from the time difference between t_m and t_n.

34. The apparatus of claim 33 further comprising means for determining the temperature T of the gas.

35. The apparatus of claim 34 wherein:

(i) the gas comprises a molecular species which has n_a atoms per molecule, said molecule having a molecular mass m_m ; and

(ii) the computing means comprises means for determining the property of the gas based on the equations;

space="preserve" listing-type="equation">n.sub.f =6(n.sub.a -1);

and

space="preserve" listing-type="equation">C=((2+n.sub.f)(kT)/(n.sub.f m.sub.m)).sup.1/2

where C is the speed of sound in the gas and k is Boltzmann'"'"'s constant.

36. The apparatus of claim 34 wherein:

(i) the gas comprises a mixture of at least two molecular species; and

(ii) the computing means comprises means for determining the property of the gas based on the equation;

##EQU70## where C_M is the speed of sound in the mixture, R is the universal gas constant, and x_i, c_Pi, M_i, and z_i are the volumetric concentration, specific heat, molecular weight, and compressibility factor, respectively, of the i^th molecular species.

37. The apparatus of claim 34 wherein:

(i) the gas comprises a mixture of at least two molecular species; and

(ii) the computing means comprises means for determining the property of the gas based on the equation;

space="preserve" listing-type="equation">C.sub.M =2iL/(t.sub.m -t.sub.n)

where C_M is the speed of sound in the mixture and L is the distance between the first and second spaced apart points determined using a gas having;

(i) either a known speed of sound or a known specific heat, compressibility, and molecular weight, and (ii) a close to ideal gas behavior at f_c.

38. The apparatus of claim 4 wherein:

(i) the gas flows through the chamber during use of the apparatus; and

(ii) the apparatus comprises flow control means for providing substantially uniform flow of the gas in the region of the chamber between the first and second spaced apart points.

39. The apparatus of claim 38 wherein the substantially uniform flow is in a direction which is substantially perpendicular to a line between the first and second spaced apart points.

40. The apparatus of claim 38 wherein the flow control means provides temperature control for the flowing gas.

41. The apparatus of claim 40 wherein the apparatus comprises means for determining the temperature of the flow control means.

42. The apparatus of claim 38 wherein the flow control means comprises a body having a plurality of apertures through which the gas flows during use of the apparatus.

43. Apparatus for controlling the composition of a binary gas mixture comprising the apparatus of claim 1.

55. The apparatus of claim 1 wherein the receiver is within the near field zone of the transmitter for at least three passages of the pulse between the transmitter and the receiver.

56. The apparatus of claim 10 wherein each multilayer acoustical transformer comprises an aluminum layer in contact with the transducer and a fluoropolymer layer in contact with the aluminum layer, said fluoropolymer layer being in contact with the gas in the chamber during use of the apparatus.

57. The apparatus of claim 56 where the fluoropolymer is a tetrafluoroethylene polymer.

58. The apparatus of claim 18 wherein the multilayer acoustical transformer comprises an aluminum layer in contact with the transducer and a fluoropolymer layer in contact with the aluminum layer, said fluoropolymer layer being in contact with the gas in the chamber during use of the apparatus.

59. The apparatus of claim 58 where the fluoropolymer is a tetrafluoroethylene polymer.

61. The apparatus of claim 8 where the fluoropolymer is a tetrafluoroethylene polymer.

44. A transmitter for transmitting a pulse of acoustical energy into a gaseous or liquid medium comprising:

(a) a transducer for transforming electrical energy into mechanical energy, said transducer having;

(i) a thickness mode in which it undergoes thickness mode vibrations and a radial mode in which it undergoes radial mode vibrations;

(ii) a first electrical impedance associated with the transducer'"'"'s thickness mode and a second electrical impedance associated with the transducer'"'"'s radial mode;

(b) a high frequency driver; and

(c) an electrical matching circuit which electrically connects the high frequency driver to the transducer, said electrical matching circuit serving to efficiently couple the output of the high frequency driver to the first electrical impedance, inefficiently couple said output to the second electrical impedance, and electrically damp electrical signals produced by mechanical oscillations of the transducer after the transducer has transmitted a pulse of acoustical energy.

45. Apparatus for performing acoustical testing on a gaseous medium, said gaseous medium having an acoustical impedance, said apparatus comprising:

(a) a transducer for transforming electrical energy into mechanical energy or for transforming mechanical energy into electrical energy, said transducer having an acoustical impedance; and

(b) a multilayer acoustical transformer associated with the transducer for matching the acoustical impedance of the transducer to the acoustical impedance of the gaseous medium.

46. The apparatus of claim 45, wherein the multilayer acoustical transformer comprises an aluminum layer in contact with the transducer, a stainless steel layer in contact with the aluminum layer, and a tetrafluoroethylene layer in contact with the stainless steel layer, said tetrafluoroethylene layer being in contact with the gaseous medium during use of the apparatus.

60. The apparatus of claim 45 wherein the multilayer acoustical transformer comprises an aluminum layer in contact with the transducer and a fluoropolymer layer in contact with the aluminum layer, said fluoropolymer layer being in contact with the gas in the chamber during use of the apparatus.

47. Apparatus for acoustically determining a property of a gas, liquid, or solid comprising:

(a) a transmitter which, during use of the apparatus, produces a pulse of acoustical energy which moves in alternating directions between first and second spaced apart points in the gas, liquid, or solid;

(b) a receiver which, during use of the apparatus, detects the pulse; and

(c) detecting means associated with the receiver for detecting the pulse after the pulse has made n passages between the first and second spaced apart points and after it has made m passages between those points, where a passage constitutes movement of the pulse between the first and second spaced apart points in either direction, m and n are integers, and

space="preserve" listing-type="equation">m-n=2i

where i is an integer.

48. A method for acoustically determining a property of a gas, liquid, or solid comprising:

(a) producing a pulse of acoustical energy which moves in alternating directions between first and second spaced apart points in the gas, solid, or liquid; and

(b) detecting the pulse after it has made n passages between the first and second spaced apart points and after it has made m passages between those points, where a passage constitutes movement of the pulse between the first and second spaced apart points in either direction, m and n are integers, and

space="preserve" listing-type="equation">m-n=2i

where i is an integer.

49. Apparatus for acoustically determining a property of a gas, said gas comprising a molecular species which has n_a atoms per molecule, said molecule having a molecular mass m_m, said apparatus comprising:

(a) a transmitter which, during use of the apparatus, produces acoustical energy which passes through the gas;

(b) a receiver which, during use of the apparatus, detects the acoustical energy; and

(c) computing means for determining the property of the gas based on the equations;

space="preserve" listing-type="equation">n.sub.f =6(n.sub.a -1);

and

space="preserve" listing-type="equation">C=((2+n.sub.f)(kT)/(n.sub.f m.sub.m)).sup.1/2

where C is the speed of sound in the gas, T is the temperature of the gas, and k is Boltzmann'"'"'s constant.

50. A method for determining a property of a gas, said gas comprising a molecular species which has n_a atoms per molecule, said molecule having a molecular mass m_m, said method comprising:

(a) producing acoustical energy which passes through the gas;

(b) detecting the acoustical energy after it has passed through the gas; and

determining the property of the gas based on the equations;

space="preserve" listing-type="equation">n.sub.f =6(n.sub.a -1);

and

space="preserve" listing-type="equation">C=((2+n.sub.f)(kT)/(n.sub.f m.sub.m)).sup.1/2

where C is the speed of sound in the gas, T is the temperature of the gas, and k is Boltzmann'"'"'s constant.

51. Apparatus for acoustically determining a property of a gas, said gas comprising a mixture of at least two molecular species, said apparatus comprising:

(a) a transmitter which, during use of the apparatus, produces acoustical energy which passes through the gas;

(b) a receiver which, during use of the apparatus, detects the acoustical energy; and

(c) computing means for determining the property of the gas based on the equation;

##EQU71## where C_M is the speed of sound in the mixture, T is the temperature of the mixture, R is the universal gas constant, and x_i, c_Pi, M_i, and z_i are the volumetric concentration, specific heat, molecular weight, and compressibility factor, respectively, of the i^th molecular species.

52. A method for determining a property of a gas, said gas comprising a mixture of at least two molecular species, said method comprising:

(a) producing acoustical energy which passes through the gas;

(b) detecting the acoustical energy after it has passed through the gas; and

(c) determining the property of the gas based on the equation;

##EQU72## where C_M is the speed of sound in the mixture, T is the temperature of the mixture, R is the universal gas constant, and x_i, c_Pi, M_i, and z_i are the volumetric concentration, specific heat, molecular weight, and compressibility factor, respectively, of the i^th molecular species.

53. A method for acoustically determining a property of a gas comprising:

(a) generating a pulse of acoustical energy using an electroacoustical transducer, said generation defining a near-field zone;

(b) passing the pulse through the gas; and

(c) detecting the pulse after its passage through the gas;

wherein step (c) is performed while the pulse is within the near-field zone so as to reduce variations in the detected pulse resulting from changes in gas composition compared to performing step (c) in the far field zone.

54. The method of claim 53 wherein:

(i) the pulse is detected at at least two different times, and (ii) the pulse is within the near-field zone at each of said at least two different times.