Monolithic scanning light emitting devices

• US 6,116,756 A
• Filed: 10/15/1998
• Issued: 09/12/2000
• Est. Priority Date: 12/12/1997
• Status: Expired due to Term

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Fork, David K., Maeda, Patrick Y., Floyd, Philip D., Kubby, Joel A., Peeters, Eric, Sun, Decai, Apte, Raj B., Paoli, Thomas L., Bringans, Ross D., Connell, G. A. Neville
• Primary Examiner(s): LEE, Y MY QUACH
• Application Number:
  US09/173,329
• Time in Patent Office: 698 Days
• Field of Search: 362/285, 362/287, 362/418, 362/429, 362/259, 362/286, 372/50
• US Class Current: 362/285
• CPC Class Codes: H01L 27/15 including semiconductor components having potential barriers, specially adapted for light emission
• CPC Class Codes: H01S 5/02326 Arrangements for relative positioning of laser diodes and optical components, e.g. grooves in the mount to fix optical fibres or lenses
• CPC Class Codes: H01S 5/183 having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
• CPC Class Codes: H01S 5/423 having a vertical cavity

Abstract

A micro-machined movable light emitting assembly is formed on or from an undoped or pure III-V substrate or formed on or from a doped III-V substrate. The movable light emitting assemblies are to be actuated using force generators, to generate the various mechanical degrees of freedom depending on the type of stage suspension and actuation.

Claims

1. A micro-machined movable light emitting assembly, comprising:

a substrate made of semiconductor material;

a light source;

a light source support which movably supports the light source;

a plurality of suspension members, the suspension members attached at a first end to the light source support and at a second end to the substrate thereby suspending the light support; and

at least one force generator which moves the light support,

wherein the light source comprises a gallium arsenide semiconductor-based vertical cavity surface emitting laser.

2. The micro-machined movable light emitting assembly as claimed in claim 1, wherein the light source support is made of a semiconductor material.

3. The micro-machined movable light emitting assembly as claimed in claim 1, wherein the suspension members are made of a semiconductor material.

7. The micro-machined movable light emitting assembly as claimed in claim 1, wherein the at least one force generator is made of semiconductor material.

8. The micro-machined movable light emitting assembly as claimed in claim 7, wherein the at least one force generator is a pair of electrostatic combs each electrostatic comb having a fixed comb set attached to the substrate and a movable comb set attached to the light source support.

9. The micro-machined movable light emitting assembly as claimed in claim 1, wherein the semiconductor material in the substrate includes an undoped III-V layer.

10. The micro-machined movable light emitting assembly as claimed in claim 1, wherein the semiconductor material in the substrate includes a doped III-V layer.

11. The micro-machined movable light emitting assembly, as claimed in claim 10, further comprising:

an oxidized layer which electrically isolates the movable comb set from the fixed comb set.

12. The micro-machined movable light emitting assembly as claimed in claim 1, wherein the at least one force generator moves the light source support angularly with respect to the substrate.

13. The micro-machined movable light emitting assembly as claimed in claim 1, wherein the at least one force generator moves the light source support vertically with respect to the substrate.

14. The micro-machined movable light emitting assembly as claimed in claim 1, wherein the semiconductor material includes Gallium Arsenide.

4. A micro-machined movable light emitting assembly, comprising:

a substrate made of semiconductor material;

a light source;

a light source support which movably supports the light source;

a plurality of suspension members, the suspension members attached at a first end to the light source support and at a second end to the substrate thereby suspending the light support; and

at least one force generator which moves the light support,

further comprising;

an electrically conductive member attached at a first end to the light source and at a second end to an electrode on the substrate.

5. The micro-machined movable light emitting assembly as claimed in claim 4, wherein a suspension member supports the electrically conductive member.

6. A micro-machined movable light emitting assembly, comprising:

a substrate made of semiconductor material;

a light source;

a light source support which movably supports the light source;

a plurality of suspension members, the suspension members attached at a first end to the light source support and at a second end to the substrate thereby suspending the light support; and

at least one force generator which moves the light support,

wherein the light source is a VCSEL which is formed integrally with the substrate.

15. An array of micro-machined movable light emitting assemblies, comprising:

a substrate made of undoped III-V material;

a plurality of light sources;

at least one light source support which movably supports the light sources;

a plurality of suspension members, the suspension members attached at a first end to the at least one light source support and at a second end to the substrate thereby suspending the at least one light support above the substrate; and

at least one force generator which moves the light support,

wherein the plurality of light sources comprise a plurality of gallium arsenide semiconductor-based vertical cavity surface emitting lasers.

16. A method of moving a micro-machined movable light emitting assembly, comprising:

suspending a light emitting assembly having at least one light source on a semiconductor substrate, the light emitting assembly being supported on a light source support;

actuating a first force generator which moves the light source support in a first direction; and

actuating a second force generator which moves the light source support in a second direction,

wherein the at least one light source comprises at least one gallium arsenide semiconductor-based vertical cavity surface emitting laser.

17. The method of moving a micro-machined movable light emitting assembly as claimed in claim 16, wherein actuating a first force generator includes applying a first voltage to a first set of electric comb actuators which moves the light source support in the first direction and actuating a second force generator includes applying a second voltage to a second set of electric comb actuators.

18. The method of moving a micro-machined movable light emitting assembly as claimed in claim 16, wherein the first and second directions are angular with respect to the substrate.

19. The method of moving a micro-machined movable light emitting assembly as claimed in claim 16, wherein the first and second direction are vertical with respect to the substrate.

20. A method of moving a micro-machined movable light emitting assembly, comprising:

suspending a light emitting assembly having at least one light source on a semiconductor substrate, the light emitting assembly being supported on a light source support;

actuating a first force generator which moves the light source support in a first direction; and

actuating a second force generator which moves the light source support in a second direction,

further comprising;

integrally forming the at least one light source with the light source support.