CVD device for coating the inside of hollow bodies

• US 6,117,243 A
• Filed: 07/14/1999
• Issued: 09/12/2000
• Est. Priority Date: 07/24/1996
• Status: Expired due to Term

• Current Assignee: Schott AG (Carl-Zeiss-Stiftung)
• Original Assignee: Schott Glaswerke
• Inventors: Walther, Marten
• Primary Examiner(s): King, Roy V.
• Application Number:
  US09/352,937
• Time in Patent Office: 426 Days
• Field of Search: 118/713, 118/712, 118/723 MW, 118/723 ME, 156/345 MT, 156/345 MW
• US Class Current: 118/713
• CPC Class Codes: C03C 17/004 Coating the inside
• CPC Class Codes: C23C 16/045 Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
• CPC Class Codes: C23C 16/511 using microwave discharges
• CPC Class Codes: C23C 16/52 Controlling or regulating the coating process C23C16/45557, C23C16/279 take precedence

Abstract

A CVD device for coating the inside of a hollow body, comprising a coating chamber, a microwave plasma-igniting device, a gas-supply device and an optical detective device, wherein the plasma-igniting device and optical detective device are connected to a control and analysis unit, analyzing the time correlation of ignition pulses and light pulses, and the intensity of at least one emission line of the plasma.

Claims

1. A device for coating the inside of a hollow body, comprising a coating chamber, a microwave plasma-igniting device, a gas-supply device, and an optical detecting device, wherein the

plasma-igniting device (5) produces a timed sequence of ignition pulses,

the optical detecting device (14) detects light pulses and emission lines of plasma, and

at least the plasma-igniting device (5) and optical detecting device (14) are connected to a control and analysis unit (6), analyzing the time correlation of ignition pulses and light pulses, and the intensity of at least one emission line.

2. A device according to claim 1, wherein control and analysis unit (6) is connected to at least one valve (11, 12) in a gas feed line (9, 12) of said gas-supply device.

3. A device according to claim 1, wherein the optical detecting device monitors for a spectral emission line of a coating gas used to coat the hollow body.

4. A device according to claim 1, which heats the body by igniting plasma with at least one ignition pulse, and measures the temperature inside the body by correlating the time between the ignition pulse and a pulse of light given off by plasma ignition during the heating phase.

5. A device according to claim 4, which measures the temperature inside the body during coating by igniting plasma within said body with at least one ignition pulse and correlating the time between the ignition pulse and a pulse of light given off by plasma ignition.

6. A device according to claim 1, wherein the hollow body is a flask or ampoule.