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CVD device for coating the inside of hollow bodies

  • US 6,117,243 A
  • Filed: 07/14/1999
  • Issued: 09/12/2000
  • Est. Priority Date: 07/24/1996
  • Status: Expired due to Term
First Claim
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1. A device for coating the inside of a hollow body, comprising a coating chamber, a microwave plasma-igniting device, a gas-supply device, and an optical detecting device, wherein theplasma-igniting device (5) produces a timed sequence of ignition pulses,the optical detecting device (14) detects light pulses and emission lines of plasma, andat least the plasma-igniting device (5) and optical detecting device (14) are connected to a control and analysis unit (6), analyzing the time correlation of ignition pulses and light pulses, and the intensity of at least one emission line.

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