Method and apparatus for increasing the metal ion fraction in ionized physical vapor deposition

• US 6,117,279 A
• Filed: 11/12/1998
• Issued: 09/12/2000
• Est. Priority Date: 11/12/1998
• Status: Expired due to Term

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Gittleman, Bruce, Licata, Thomas J., Smolanoff, Jason, Zibrida, Jim, Caldwell, Doug
• Primary Examiner(s): Nguyen, Nam
• Assistant Examiner(s): VerSteeg, Steven H.
• Application Number:
  US09/190,515
• Time in Patent Office: 670 Days
• Field of Search: 204/298.08, 204/298.11, 204/298.06, 204/192.12
• US Class Current: 204/192.12
• CPC Class Codes: C23C 14/358 Inductive energy
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32477 characterised by the means for protecting vessels or internal parts, e.g. coatings
• CPC Class Codes: H01J 37/3405 Magnetron sputtering

Abstract

An ionized physical vapor deposition method and apparatus are provided which employs a magnetron magnetic field produced by cathode magnet structure behind a sputtering target to produce a main sputtering plasma, and an RF inductively coupled field produced by an RF coil outside of and surrounding the vacuum of the chamber to produce a secondary plasma in the chamber between the target and a substrate to ionize sputtered material passing from the target to the substrate so that the sputtered material can be electrically or magnetically steered to arrive at the substrate at right angles. A circumferentially interrupted shield or shield structure in the chamber protects the window from material deposits. A low pass LC filter circuit allows the shield to float relative to the RF voltage but to dissipate DC potential on the shield. Advantages provided are that loss of electrons and ions from the secondary plasma is prevented, preserving plasma density and providing high ionization fraction of the sputtered material arriving at the substrate.

Claims

1. An ionized physical vapor deposition apparatus comprising:

a sealable vacuum chamber having a volume therein for containing a processing gas at a vacuum pressure level;

a sputtering cathode in the chamber at an end of the volume, the cathode including a target support for holding a sputtering target thereon facing the volume of the chamber;

a cathode power source connected to the sputtering cathode for energizing the cathode;

a substrate support in the chamber at an end of the volume opposite the target support for supporting thereon, facing the target across the volume, a substrate to be coated with material sputtered from a target supported on the target support;

an RF energy source having an RF frequency and coupled into the volume to energize a secondary RF plasma in the gas therein of sufficient density to ionize sputtered material moving from the target through the volume, the RF energy source including at least one coil surrounding the volume of the chamber between the substrate support and the target support to inductively couple RF energy into the volume to energize the secondary plasma;

electrically conductive shield structure extending around the chamber between the coil and the volume having a potential thereon that electrically floats at the RF frequency of the RF energy source with the potential of the plasma, the shield structure being configured and positioned to intercept sputtered material moving radially outwardly from the volume, the shield structure having at least one axial discontinuity therein sufficient to interrupt conductive paths in the shield structure from extending circumferentially around the chamber so that the coil passes RF energy therethrough from the coil into the volume; and

a filter, connected between the shield and a voltage control circuit, having a high impedance at the frequency of the RF source and having a low DC impedance such that, when energy from the cathode power source produces a main plasma in the gas in the chamber which sputters material from a target on the target support and into the volume, and a secondary plasma is formed in the volume by energy inductively coupled from the RF energy source, negative charge arriving on the shield structure is conducted to the voltage control circuit while the shield structure electrically floats at the RF frequency with the plasma so that the plasma sheath between the plasma and the shield structure is narrow and the plasma sufficiently fills the volume to effectively ionize the sputtered material moving from the target through the volume so that it is steerable toward and normal to a substrate on the substrate support.

2. The apparatus of claim 1 wherein:

the cathode power supply is a constant or pulsed DC power supply and the filter is low pass with low impedance to DC.

3. The apparatus of claim 1 wherein:

the voltage control circuit connects the filter to ground potential.

4. The apparatus of claim 1 wherein:

the filter is an LC filter.

5. The apparatus of claim 1 wherein:

the filter has an impedance of approximately 1/4 megohm at the RF frequency of the RF source.

6. The apparatus of claim 1 wherein:

the chamber has a wall with an opening therein;

the apparatus further comprises a dielectric window sealed to the wall around the opening to isolate the gas at the vacuum pressure level in the volume within the chamber; and

the at least one coil being outside of the chamber behind the window and isolated by the window from contact with the gas in the volume; and

the shield structure encircles the chamber inside of the window and in close proximity thereto and extends axially sufficiently far to shadow the window from sputtered material.

7. The apparatus of claim 1 further comprising:

a bias potential generator connected to the support to electrically bias a substrate on the support to accelerate ions of the sputtered material in a direction normal to the substrate.

8. The apparatus of claim 1 wherein:

the at least one axial discontinuity in the shield structure is in the form of at least one axial slit formed between two radially spaced and circumferentially overlapping edges of the shield structure.

9. A method of ionized physical vapor deposition comprising the steps of:

providing a sealable vacuum chamber having a volume therein for containing a processing gas at a vacuum pressure level, a target support in the chamber at an end of the volume, and a substrate support at an end of the volume opposite the target support for supporting thereon, facing the target support across the volume, a substrate to be coated with material sputtered from a target supported on the target support;

sputtering material into the volume from a target mounted in the target support by energizing the target on the target support;

inductively coupling RF energy, at an RF frequency, from an RF source into the volume and energizing with the coupled RF energy a secondary RF plasma in gas in the volume, and with the secondary RF plasma ionizing sputtered material moving from the target in the volume; and

while performing the sputtering and coupling steps, maintaining shield structure between the RF source and the volume that has a potential that floats at the RF frequency of the RF energy by providing a low impedance DC path to a controlled potential from the shield structure and a high impedance to energy at the frequency of the RF source to maintain a narrow plasma sheath between the RF plasma and the shield.

10. The method of claim 9 further comprising the step of:

while performing the sputtering and coupling steps, providing an impedance of at least 250 k Ohms to energy at the frequency of the RF source that is present on the shield structure.

11. The method of claim 9 further comprising the step of:

while performing the sputtering and coupling steps, providing an impedance of at least 750 k Ohms to energy at the frequency of the RF source that is present on the shield structure.

12. The method of claim 9 wherein:

the RF energy coupling step includes the step of coupling RF energy from at least one coil surrounding the volume of the chamber between the substrate support and the target support and inductively coupling RF energy from the coil into the volume to energize the secondary plasma in the gas in the volume through an RF magnetic field in the volume.

13. The method of claim 12 wherein:

the RF energy coupling step includes the step of maintaining the coil behind a dielectric window sealed into a vacuum containing wall of the chamber and isolated by the window from contact with the gas in the volume.

14. The method of claim 9 further comprising the step of:

biasing a substrate on the support so as to attract toward the substrate positive ions of material sputtered from the target by a main plasma and ionized by the secondary plasma, thereby increasing angles of incidence of sputtered particles onto the substrate.