In Situ alignment system for phase-shifting point-diffraction interferometry

• US 6,118,535 A
• Filed: 06/02/1999
• Issued: 09/12/2000
• Est. Priority Date: 06/02/1999
• Status: Expired due to Term

• Current Assignee: EUV LLC (Intel Corporation)
• Original Assignee: Kenneth Alan Goldberg, Patrick P. Naulleau
• Inventors: Goldberg, Kenneth Alan, Naulleau, Patrick P.
• Primary Examiner(s): Kim, Robert H.
• Application Number:
  US09/324,903
• Time in Patent Office: 468 Days
• Field of Search: 356/353, 356/354, 356/359
• US Class Current: 356/521
• CPC Class Codes: G03F 7/706 Aberration measurement

Abstract

A device and method to facilitate the gross alignment of patterned object- and image-plane masks in optical systems such as the phase-shifting point diffraction interferometer are provided. When an array of similar pinholes or discreet mask fields is used, confusion can occur over the alignment of the focused beams within the field. Adding to the mask pattern a circumscribed or inscribed set of symbols that are identifiable in situ facilitates the unambiguous gross alignment of the object- and/or image-plane masks. Alternatively, a system of markings can be encoded directly into the window shape to accomplish this same task.

Claims

1. An optical system defining an optical path that comprises:

(a) a source of electromagnetic energy in the optical path;

(b) an optical element in the optical path;

(c) at least one of an object mask that is located near the object plane of the optical system or an image mask that is located near the image plane of the optical system wherein the at least one object mask or image mask comprises a patterned screen that defines an array of different sized apertures and a corresponding set of symbols that identify the different sized apertures in said array; and

(d) an intensity detector.

2. The optical system of claim 1 wherein the intensity detector comprises means for detecting the intensity pattern created by the set of symbols.

3. The optical system of claim 1 wherein the detector comprises a charged coupled device.

4. A phase-shifting point diffraction interferometer system that defines an optical path, said system comprising:

(a) a source of electromagnetic energy in the optical path;

(b) a beam divider in the optical path for dividing electromagnetic radiation from the source into a reference beam and a test beam;

(c) an image mask that is positioned in the image plane of an optical element under test wherein the image mask defines an array of test window and reference beam pinhole pairs and a corresponding set of first symbols that identify the different pairs in said array; and

(d) means for detecting an intensity pattern created by the set of first symbols.

5. The system of claim 4 further comprising:

(e) an object mask that is positioned in the object plane of the optical element wherein the object mask defines a second array of object pinholes and a corresponding set of second symbols that identify the different pairs in said second array; and

(f) means for detecting a second intensity pattern created by the set of second symbols.

6. The system of claim 4 wherein the first symbols of the image mask are incorporated along the perimeter of the image mask.

7. The system of claim 4 wherein the first symbols of the image mask are incorporated in an interior region of the image mask.

8. The system of claim 4 wherein the first symbols of the image mask are incorporated adjacent to the test window and reference pinhole pairs.

9. The system of claim 4 wherein the first symbols of the image mask are incorporated in an interior region of the image mask.

10. The system of claim 4 wherein each test window has an opening and the first symbols comprise protrusions along the perimeter of the opening.

11. The system of claim 4 wherein the means for detecting the intensity pattern comprises an intensity recording device or medium.

12. The system of claim 4 wherein the means for detecting the intensity pattern comprises a charged coupled device.

13. The system of claim 4 wherein the beam divider is a diffraction grating.

14. The system of claim 4 wherein the diffraction grating is positioned between the source of the electromagnetic radiation and the optical element.

15. The system of claim 4 wherein each window defines an opening with an area of about 5 to 1000 times λ

/NA wherein NA is the object-side numerical aperture.

16. The system of claim 4 wherein the reference pinholes each has a diameter of about 1/100 to 2 times λ

/NA wherein NA is the object-side numerical aperture.

17. The system of claim 6 wherein the object pinholes each has a diameter of about 1/100 to 2 times λ

/NA wherein NA is the object-side numerical aperture.

18. The system of claim 10 wherein each window is a square-shaped opening.

19. A method of aligning an optical system defining an optical path that includes (i) a source of electromagnetic energy in the optical path, (ii) an optical element in the optical path and (iii) means for detecting an intensity pattern created by the set of symbols that comprises the steps of:

(a) providing at least one of an object mask that is located near the object plane of the optical system or an image mask that is located near the image plane of the optical system wherein the at least one object mask or image mask comprises a patterned screen that defines an array of apertures and a corresponding set of symbols that identify at least one of (i) the aperture locations in said array or (ii) the pinhole locations in said array and

(b) moving the image mask; and

(c) detecting intensity patterns created by the set of symbols.

20. The method of claim 19 wherein the means for detecting the intensity pattern comprises an intensity recording device or medium.

21. The method of claim 19 wherein the means for detecting the intensity pattern comprises a charged coupled device.

22. A method of aligning a phase-shifting point diffraction interferometer defining an optical path that includes (i) a source of electromagnetic energy in the optical path, (ii) a beam divider in the optical path for dividing electromagnetic radiation from the source into a reference beam and a test beam, and (iii) an optical element under test in the optical path, wherein the method comprises the steps of:

(a) positioning an image mask in the image plane of the optical system under test wherein the mask defines an array of test window and reference beam pinhole pairs and a corresponding set of first symbols that identify the different pairs in said array;

(b) moving the image mask; and

(c) detecting intensity patterns created by the set of first symbols.

23. The method of claim 22 further comprising the steps of:

(f) positioning an object mask in the object plane of the optical element wherein the object mask defines a second array of object pinholes and a corresponding set of second symbols that identify the different pairs in said second array; and

(g) for detecting a second intensity pattern created by the set of second symbols.

24. The method of claim 22 wherein the first symbols of the image mask are incorporated along the perimeter of the image mask.

25. The method of claim 22 wherein the first symbols of the image mask are incorporated in an interior region of the image mask.

26. The method of claim 22 wherein the first symbols of the image mask are incorporated adjacent the test window and reference pinhole pairs.

27. The method of claim 22 wherein the first symbols of the image mask are incorporated in an interior region of the image mask.

28. The method of claim 22 wherein each test window has an opening and the first symbols comprise protrusions along the perimeter of the opening.

29. The method of claim 22 wherein the step of detecting the intensity pattern employs an intensity recording device or medium.

30. The method of claim 22 wherein the step of detecting the intensity pattern comprises a charged coupled device.

31. The method of claim 22 wherein the beam divider is a diffraction grating.

32. The method of claim 22 wherein the diffraction grating is positioned between the source of the electromagnetic radiation and the optical element.

33. The method of claim 22 wherein each window defines an opening with an area of about 5 to 1000 times λ

/NA wherein NA is the object-side numerical aperture.

34. The method of claim 22 wherein the reference pinholes each has a diameter of about 1/100 to 2 times λ

/NA wherein NA is the object-side numerical aperture.

35. The method of claim 24 wherein the object pinholes each has a diameter of about 1/100 to 2 times λ

/NA wherein NA is the object-side numerical aperture.

36. The method of claim 28 wherein each window is a square-shaped opening.