Micro-mechanical rate-of-rotation sensor with coupled structure
First Claim
1. A micro-mechanical rate-of-rotation sensor based on the Coriolis principle comprising, in combination:
- a) two plate-like oscillators, each formed in at least one wafer layer;
b) said oscillators being arranged in layers one above another in two parallel planes;
c) an electrostatic drive for stimulating said oscillators to oscillate perpendicular to said planes;
d) said two plate-like oscillators being each connected via at least one spring to a couple element formed in the same wafer layer in each case;
e) said couple elements being mirror-symmetrically configured with respect to a mid-plane between said oscillators and connected to each other by a coupling web arranged between the couple elements to form a couple structure for said oscillators; and
f) said structure being arranged so that said oscillators coupled thereby can be stimulated to oscillate exclusively out-of-phase.
1 Assignment
0 Petitions
Accused Products
Abstract
Strictly out-of-phase stimulation of the two oscillators of a micro-mechanical rate-of-rotation sensor based on the Coriolis principle, having two-plate like oscillators arranged in layers one above another in two parallel planes and capable of being stimulated to oscillate perpendicular to the planes by means of an electrostatic drive, is achieved by the oscillators each being connected via at least one spring to a couple element formed, in each case, in the same wafer layer. The couple elements are mirror-symmetrically configured with respect to a mid-plane between the oscillators and connected to each other by a coupling web arranged therebetween to form a couple structure for the oscillators.
-
Citations
4 Claims
-
1. A micro-mechanical rate-of-rotation sensor based on the Coriolis principle comprising, in combination:
-
a) two plate-like oscillators, each formed in at least one wafer layer; b) said oscillators being arranged in layers one above another in two parallel planes; c) an electrostatic drive for stimulating said oscillators to oscillate perpendicular to said planes; d) said two plate-like oscillators being each connected via at least one spring to a couple element formed in the same wafer layer in each case; e) said couple elements being mirror-symmetrically configured with respect to a mid-plane between said oscillators and connected to each other by a coupling web arranged between the couple elements to form a couple structure for said oscillators; and f) said structure being arranged so that said oscillators coupled thereby can be stimulated to oscillate exclusively out-of-phase. - View Dependent Claims (2, 3, 4)
-
Specification