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Micro-mechanical rate-of-rotation sensor with coupled structure

  • US 6,119,517 A
  • Filed: 07/13/1999
  • Issued: 09/19/2000
  • Est. Priority Date: 07/14/1998
  • Status: Expired due to Fees
First Claim
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1. A micro-mechanical rate-of-rotation sensor based on the Coriolis principle comprising, in combination:

  • a) two plate-like oscillators, each formed in at least one wafer layer;

    b) said oscillators being arranged in layers one above another in two parallel planes;

    c) an electrostatic drive for stimulating said oscillators to oscillate perpendicular to said planes;

    d) said two plate-like oscillators being each connected via at least one spring to a couple element formed in the same wafer layer in each case;

    e) said couple elements being mirror-symmetrically configured with respect to a mid-plane between said oscillators and connected to each other by a coupling web arranged between the couple elements to form a couple structure for said oscillators; and

    f) said structure being arranged so that said oscillators coupled thereby can be stimulated to oscillate exclusively out-of-phase.

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