Angular velocity sensor
First Claim
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1. An angular velocity sensor comprising:
- a tuning-fork oscillator having arms extending in parallel to each other and joined to a stationary body through a trunk, said arms and said trunk having respective surfaces substantially coplanar to each other;
first and second driving piezoelectric elements arranged only on said respective surface of said trunk with a gap therebetween, said gap having a width extending in a direction of said arms; and
angular velocity detecting piezoelectric elements arranged on said surfaces of said arms,wherein said first and second driving piezoelectric elements generate forces for giving said arms predetermined oscillations so that said arms may oscillate on a plane in parallel with said surface on which said angular velocity detecting piezoelectric elements are arranged, andwherein said first driving piezoelectric element and said second driving piezoelectric element are adjusted in their applied voltages so as to suppress an unnecessary oscillation which is generated in a detected oscillating direction perpendicular to said plane on which said arms oscillate.
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Abstract
An angular velocity sensor includes a tuning-fork oscillator having a pair of arms jointed by a trunk, the pair of arms extending in parallel to each other, first and second driving piezoelectric elements arranged only on one surface of the trunk with a gap therebetween in an extending direction of the arms, and angular velocity detecting piezoelectric elements arranged on surfaces of the arms in parallel with the one surface of the trunk on which the first and second piezoelectric elements are arranged.
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Citations
14 Claims
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1. An angular velocity sensor comprising:
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a tuning-fork oscillator having arms extending in parallel to each other and joined to a stationary body through a trunk, said arms and said trunk having respective surfaces substantially coplanar to each other; first and second driving piezoelectric elements arranged only on said respective surface of said trunk with a gap therebetween, said gap having a width extending in a direction of said arms; and angular velocity detecting piezoelectric elements arranged on said surfaces of said arms, wherein said first and second driving piezoelectric elements generate forces for giving said arms predetermined oscillations so that said arms may oscillate on a plane in parallel with said surface on which said angular velocity detecting piezoelectric elements are arranged, and wherein said first driving piezoelectric element and said second driving piezoelectric element are adjusted in their applied voltages so as to suppress an unnecessary oscillation which is generated in a detected oscillating direction perpendicular to said plane on which said arms oscillate.
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2. An angular velocity sensor comprising:
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a tuning-fork oscillator having arms extending in parallel to each other and joined to a stationary body through a trunk, said arms and said trunk having respective surfaces substantially coplanar to each other; first and second driving piezoelectric elements arranged only on said respective surface of said trunk with a gap therebetween, said gap having a width extending in a direction of said arms; and angular velocity detecting piezoelectric elements arranged on said surfaces of said arms, wherein said first and second driving piezoelectric elements generate forces for giving said arms predetermined oscillations so that said arms may oscillate on a plane in parallel with said surface on which said angular velocity detecting piezoelectric elements are arranged, and wherein said first driving piezoelectric element and said second driving piezoelectric element are adjusted in their areas so as to suppress an unnecessary oscillation which is generated in a detected oscillating direction perpendicular to said plane on which said arms oscillate.
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3. An angular velocity sensor comprising:
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a tuning-fork oscillator having arms extending in parallel to each other and joined to a stationary body through a trunk, said arms and said trunk having respective surfaces substantially coplanar to each other; first and second driving piezoelectric elements arranged only on said respective surface of said trunk with a gap therebetween, said gap having a width extending in a direction of said arms; and angular velocity detecting piezoelectric elements arranged on said surfaces of said arms, wherein said first and second driving piezoelectric elements generate forces for giving said arms predetermined oscillations so that said arms may oscillate on a plane in parallel with said surface on which said angular velocity detecting piezoelectric elements are arranged, and wherein there is a plurality of at least said first driving piezoelectric elements along an oscillating direction of said arms, and each of said first driving piezoelectric elements is adjusted in its applied voltage so as to suppress an unnecessary oscillation which is generated in a detected oscillating direction perpendicular to said oscillating direction.
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4. An angular velocity sensor comprising:
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a tuning-fork oscillator having arms extending in parallel to each other and joined to a stationary body through a trunk, said arms and said trunk having respective surfaces substantially coplanar to each other; first and second driving piezoelectric elements arranged only on said respective surface of said trunk with a gap therebetween, said gap having a width extending in a direction of said arms; and angular velocity detecting piezoelectric elements arranged on said surfaces of said arms, wherein said first and second driving piezoelectric elements generate forces for giving said arms predetermined oscillations so that said arms may oscillate on a plane in parallel with said surface on which said angular velocity detecting piezoelectric elements are arranged, and wherein there is a plurality of at least said first driving piezoelectric elements along an oscillating direction of said arms, and each of said first driving piezoelectric elements is adjusted in its area so as to suppress an unnecessary oscillation which is generated in a detected oscillating direction perpendicular to said oscillating direction of said arms.
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5. An angular velocity sensor comprising:
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a tuning-fork oscillator having arms extending in parallel to each other and joined to a stationary body through a trunk; first and second driving piezoelectric elements having a plural-layer laminated structure and arranged only on said trunk with a gap therebetween, said gap having a width extending in a direction of said arms for driving and oscillator to oscillate in a driven oscillating direction; and detecting piezoelectric elements having a plural-layer laminated structure and arranged on said arms for detecting oscillations of said oscillator in a detected oscillating direction perpendicular to said driven oscillating direction, wherein said plural layers of each of said first and second driving piezoelectric elements are laminated along said detected oscillating direction and are elongated along said driven oscillating direction, and said plural layers of said detecting piezoelectric elements are laminated along said detected oscillating direction, wherein, when one of said first and second driving piezoelectric elements is driven in an expanded state, another of said first and second driving piezoelectric elements is driven in a contracted state, wherein said first driving piezoelectric element and said second piezoelectric element are adjusted in their applied voltages so as to suppress an unnecessary oscillation which is generated in said detected oscillating direction.
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6. An angular velocity sensor comprising:
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a tuning-fork oscillator having arms extending in parallel to each other and joined to a stationary body through a trunk; first and second driving piezoelectric elements having a plural-layer laminated structure and arranged only on said trunk with a gap therebetween, said gap having a width extending in a direction of said arms for driving and oscillator to oscillate in a driven oscillating direction; and detecting piezoelectric elements having a plural-layer laminated structure and arranged on said arms for detecting oscillations of said oscillator in a detected oscillating direction perpendicular to said driven oscillating direction, wherein said plural layers of each of said first and second driving piezoelectric elements are laminated along said detected oscillating direction and are elongated along said driven oscillating direction, and said plural layers of said detecting piezoelectric elements are laminated along said detected oscillating direction, wherein, when one of said first and second driving piezoelectric elements is driven in an expanded state, another of said first and second driving piezoelectric elements is driven in a contracted state, wherein said first driving piezoelectric element and said second piezoelectric element are adjusted in their areas so as to suppress an unnecessary oscillation which is generated in said detected oscillating direction.
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7. An angular velocity sensor comprising:
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a tuning-fork oscillator having arms extending in parallel to each other and joined to a stationary body through a trunk; first and second driving piezoelectric element having a plural-layer laminated structure and arranged only on said trunk with a gap therebetween, said gap having a width extending in a direction of said arms for driving said oscillator to oscillate in a driven oscillating direction; and detecting piezoelectric elements having a plural-layer laminated structure and arranged on said arms for detecting oscillations of said oscillator in a detected oscillating direction perpendicular to said driven oscillating direction, wherein said plural layers of each of said first and second driving piezoelectric elements are laminated along said detected oscillating direction and are elongated along said driven oscillating direction, and said plural layers of said detecting piezoelectric elements are laminated along said detected oscillating direction, and wherein when one of said first and second driving piezoelectric elements is driven in an expanded state, another of said first and second driving piezoelectric elements is driven in a contracted state, and wherein there is a plurality of at least said first driving piezoelectric elements along said driven oscillating direction, and each of said first driving piezoelectric elements is adjusted in its applied voltage so as to suppress an unnecessary oscillation which is generated in said detected oscillating direction of said arms. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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8. An angular velocity sensor comprising:
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a tuning-fork oscillator having arms extending in parallel to each other and joined to a stationary body through a trunk; first and second driving piezoelectric elements having a plural-layer laminated structure and arranged only on said trunk with a gap therebetween, said gap having a width extending in a direction of said arms for driving said oscillator to oscillate in a driven oscillating direction; and detecting piezoelectric elements having a plural-layer laminated structure and arranged on said arms for detecting oscillations of said oscillator in a detected oscillating direction perpendicular to said driven oscillating direction, wherein said plural layers of each of said first and second driving piezoelectric elements are laminated along said detected oscillating direction and are elongated along said driven oscillating direction, and said plural layers of said detecting piezoelectric elements are laminated along said detected oscillating direction, wherein when one of said first and second driving piezoelectric elements is driven in an expanded state, another of said first and second driving piezoelectric elements is driven in a contracted state, wherein there is a plurality of at least said first driving piezoelectric elements along said driven oscillating direction, and each of said first driving piezoelectric elements is adjusted in its area so as to suppress an unnecessary oscillation which is generated in said detected oscillating direction of said arms.
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Specification