Method and apparatus for electronic compensation of erroneous readings caused by resonance in a capacitive pressure transducer

• US 6,119,523 A
• Filed: 07/01/1999
• Issued: 09/19/2000
• Est. Priority Date: 12/13/1996
• Status: Expired due to Term

• Current Assignee: Balzers and Leybold Instrumentation AB
• Original Assignee: Balzers and Leybold Instrumentation AB
• Inventors: Olsson, Ray, Bjorkman, Per
• Primary Examiner(s): Patel, Harshad
• Assistant Examiner(s): AW MUSSE, ABDULLAHI H
• Application Number:
  US09/308,409
• Time in Patent Office: 446 Days
• Field of Search: 73/724, 73/718, 73/708, 361/283.4
• US Class Current: 73/718
• CPC Class Codes: G01L 9/12 by making use of variations in capacitance , i.e. electric circuits therefor

Abstract

A method for electronic compensation of erroneous readings is based on the observation that a sensor serving as a transducer is caused to resonate. The erroneous reading caused by the resonance is measured and a compensation signal is feedback into the measurement element, the signal being essentially unfiltered. An apparatus uses error detection and compensation circuits whose upper barrier frequency are above the resonance frequency of the transducer for detecting an error signal caused by resonance in the transducer and for generating a compensation signal for feeding into the detector sensor.

Claims

1. A method for measuring pressure using a capacitive pressure transducer (1) and determining the capacitance of the capacitive pressure transducer (1) by AC measurement, wherein erroneous readings due to resonance in the capacitive pressure transducer (1) are electronically compensated, the method comprising:

artificially causing the capacitive pressure transducer (1) to resonate,

measuring an error (Δ

U_s) caused by the resonance of the transducer (1) in a measurement circuit, and

feeding a compensation signal (U_res) into the measurement circuit which completely eliminates the erroneous reading.

2. The method of claim 1, wherein the capacitive pressure transducer (1) is caused to resonate in a separate calibration of the transducer.

3. The method of claim 1, wherein the compensation signal is fed into the measurement circuit between an amplifier (F1) and an integrator (F2).

4. The method of claim 1, wherein the AC voltage from the capacitive pressure transducer (1) is rectified.

5. The method of claim 1, wherein the AC voltage from the transducer is impedance transformed using a capacitive-feedback operational amplifier.

6. The method of claim 1, wherein the measurement signal is low-pass filtered.

7. The method of claim 1, wherein the measurement signal is rectified by quadration.

8. The method of claim 1, wherein a rectifier is used which generates a voltage which is a function of the amplitude of a membrane oscillation of the transducer.

9. The method of claim 1, wherein the measurement error is rendered modulation dependent by varying the amplification prior to the rectifying and by varying the degree of modulation where the error is zero.

10. A pressure measuring device comprising:

a capacitive pressure transducer (1) and detector means (SW1, F1, F2) for simultaneous detection of the position of a sensing membrane (2) of the capacitive pressure transducer (1) and of pressure, and means for electronic compensation of erroneous readings caused by resonance in the capacitive pressure transducer (1) including error detection and compensation means (F3, F4, F5) having an upper barrier frequency above the resonance frequency of the transducer (1) for detecting the erroneous reading caused by resonance in the capacitive pressure transducer (1) and for generating a compensation signal (Ures) for feeding into the detector means (SW1, F1, F2).

11. the device of claim 10, further comprising an amplifier (F3), a rectifier (D), a filter (F4) and a scaling device (F5) connected to the transducer.

12. The device of claim 10, including means for artificially causing the capacitive pressure transducer to resonate.