Boron carbide parts and coatings in a plasma reactor

• US 6,120,640 A
• Filed: 12/19/1996
• Issued: 09/19/2000
• Est. Priority Date: 12/19/1996
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Shih, Hong, Han, Nianci, Mak, Steve S. Y., Yin, Gerald Zheyao
• Primary Examiner(s): Breneman, Bruce
• Assistant Examiner(s): Zervigon, Rudy
• Application Number:
  US08/770,092
• Time in Patent Office: 1,370 Days
• Field of Search: 75/307, 438/729, 427/450, 204/495, 437/81, 216/68, 55/2, 118/723 R, 118/723 E, 118/728, 118/719, 156/345, 117/7, 361/234, 165/80.2, 315/111.21
• US Class Current: 156/345.1
• CPC Class Codes: C23C 28/044 coatings specially adapted for cutting tools or wear applications
• CPC Class Codes: H01J 37/32495 Means for protecting the vessel against plasma
• CPC Class Codes: Y10S 156/914 Differential etching apparatus including particular materials of construction

Abstract

A plasma etch reactor having interior surfaces facing the plasma composed of boron carbide, preferably principally composed of B₄ C. The boron carbide may be a bulk sintered body or may be a layer of boron carbide coated on a chamber part. The boron carbide coating may be applied by thermal spraying, such as plasma spraying, by chemical vapor deposition, or by other layer forming technique such as a surface converting reaction. The boron carbide is highly resistant to high-density plasma etchants such as BCl₃. The plasma sprayed coating is advantageously applied to only a portion of an anodized aluminum wall. The boron carbide may be sprayed over the exposed portion of the aluminum over which the anodization has been removed. A band of the aluminum substrate at the transition between the anodization and the boron carbide is roughened prior to anodization so that the boron carbide sticks to the correspondingly roughened surface of the anodization. Alternatively, the entire wall area of the anodized aluminum to be coated is roughened, and the boron carbide is sprayed over the anodization.

Claims

1. In a plasma processing reactor for processing a semiconductor-bearing workpiece, a part comprising a substrate of an aluminum-based material including at least 90 wt % elemental aluminum and a surface coating thereover comprising boron carbide.

2. The part of claim 1, wherein said coating consists essentially of B₄ C.

3. The part of claim 1, wherein said coating comprises particles of B₄ C.

4. The part of claim 1, wherein said coating consists essentially of a composition between B₄ C and B₁₃ C₃.

5. The part of claim 1, wherein said coating comprises between 14 to 30 wt % of carbon relative to boron.

6. The part of claim 5, wherein said coating comprises between 18 to 25 wt % of carbon relative to boron.

7. The part of claim 1 selected from the group consisting of an electrostatic chuck, a wafer clamp, a plasma focus ring, a nozzle for processing gas, and a showerhead for processing gas.

8. The part of claim 7 being said plasma focus ring.

9. The part of claim 1, further comprising an anodization layer overlying at least a portion of said substrate.

10. The part of claim 9, wherein said anodization layer overlies only a first portion of said substrate and said coating of boron carbide overlies another second portion of said substrate.

11. The part of claim 10, wherein said coating of boron carbide overlies both said second portion of said substrate and a portion of said anodization layer adjacent to said another portion of said substrate.

12. The part of claim 11, wherein a portion of said substrate including a transition between said first and second portions of said substrate is roughened.

28. The method of claim 1, wherein said processing gas comprises chlorine.

29. The etching method of claim 28, wherein said processing gas comprises boron trichloride.

13. A plasma processing chamber for processing a semiconductor-bearing workpiece, comprising:

a vacuum chamber having at least one inlet for a processing gas therein and being adapted to receive energy to excite said processing gas into a plasma for processing said workpiece disposed within said vacuum chamber; and

a part within and forming part of said chamber, facing said plasma, and comprising a substrate and a surface coating comprising silicon nitride formed on said substrate.

14. The plasma processing chamber of claim 13, wherein said substrate comprises an aluminum-based material.

41. The plasma processing chamber of claim 13, which is adapted for etching said workpiece with said plasma of said processing gas.

15. A plasma reaction chamber for processing a semiconductor-bearing substrate, comprising:

a vacuum chamber wall comprising an aluminum-based material including at least 90 wt % elemental aluminum; and

a coating of boron carbide applied to a first portion of an interior of said vacuum chamber wall, a second portion of said interior not being coated with boron carbide.

16. The plasma reaction chamber of claim 15, wherein said vacuum chamber wall is substantially cylindrical and said first portion is a cylindrical band.

17. The plasma reaction chamber of claim 15, further comprising an aluminum anodization layer disposed on said second portion of said interior and not on all of said first portion of said interior.

42. The plasma reaction chamber of claim 15, which is adapted for etching said substrate.

18. A plasma chamber for processing a semiconductor-bearing substrate, comprising:

a vacuum chamber having at least one inlet for a processing gas therein and being adapted to receive energy to excite said processing gas into a plasma;

a substrate support for supporting said substrate selectively inserted into said vacuum chamber for processing by said plasma; and

a part within said chamber facing said plasma and comprising boron carbide.

19. The plasma chamber of claim 18, wherein said part comprises a surface portion comprising B₄ C.

20. The plasma chamber of claim 18, wherein a wall of said vacuum chamber comprises said part of boron carbide.

21. The plasma chamber of claim 18, wherein said part comprises a substrate and a surface coating thereon comprising said boron carbide.

22. The plasma chamber of claim 18, wherein said part comprises a bulk boron carbide member.

23. The plasma chamber of claim 22, wherein said bulk boron carbide member comprises sintered boron carbide.

24. The plasma chamber of claim 20, wherein said vacuum chamber, said substrate support, and said part are configured for etching said substrate with said plasma of said processing gas.

25. The plasma chamber of claim 18, wherein said part is selected from the group consisting of an electrostatic chuck, a wafer clamp, a plasma focus ring, a nozzle for processing gas, and a showerhead for processing gas.

26. The plasma chamber of claim 25, wherein said part is said plasma focus ring.

27. A plasma processing method, comprising the steps of:

providing a plasma reaction chamber having an interior surface comprising boron carbide;

placing a workpiece, comprising a semiconductor material to be processed in said plasma reaction chamber;

injecting a processing gas into said plasma reaction chamber; and

coupling electrical energy into said plasma reaction chamber to form a plasma of said processing gas to thereby process said workpiece.

30. The processing method of claim 27, wherein said interior surface faces said plasma and comprises B₄ C.

40. The method of claim 27, wherein said method is an etching method for etching said workpiece.

31. In a plasma reactor adapted for processing a substrate comprising a semiconductor material, a part having a surface portion (a) comprising between 14 to 30 wt % carbon relative to boron and (b) facing a plasma in said reactor.

32. The part of claim 31, wherein said surface portion comprises between 18 to 25 wt % carbon relative to boron.

33. The part of claim 32 comprising a part substrate and a surface coating thereover including said surface portion.

34. The part of claim 33, wherein said surface coating consists essentially of B₄ C.

35. The part of claim 33, wherein said part forms a vacuum chamber wall of said reactor.

36. The part of claim 31 selected from the group consisting of an electrostatic chuck, a wafer clamp, a plasma focus ring, a nozzle for processing gas, and a showerhead for processing gas.

37. The part of claim 36 being said plasma focus ring.

43. The part of claim 31, wherein the reactor is adapted for etching said substrate.

38. In a plasma processing reactor for processing a semiconductor-bearing workpiece, a part comprising:

a substrate of an aluminum-based material anodizable into alumina;

a surface coating thereover comprising boron carbide; and

an anodized layer comprising alumina intermediate said substrate and said coating of boron carbide.

39. The part of claim 38, wherein said substrate underlying said anodized layer is roughened.