Broadband wire grid polarizer for the visible spectrum

• US 6,122,103 A
• Filed: 06/22/1999
• Issued: 09/19/2000
• Est. Priority Date: 06/22/1999
• Status: Expired due to Term

• Current Assignee: Moxtek (Nippon Kayaku Company Limited)
• Original Assignee: Moxtech
• Inventors: Robbins, Arthur A., Thorne, James M., Hansen, Douglas P., Perkins, Raymond T., Gardner, Eric W.
• Primary Examiner(s): SCHUBERG, DARREN E
• Application Number:
  US09/337,970
• Time in Patent Office: 455 Days
• Field of Search: 359/485, 359/486, 362/19
• US Class Current: 359/485.03
• CPC Class Codes: G02B 5/1809 with pitch less than or comparable to the wavelength
• CPC Class Codes: G02B 5/3058 comprising electrically conductive elements, e.g. wire grids, conductive particles

Abstract

A broadband wire grid polarizer for the visible spectrum has a plurality of elongated elements supported on a substrate. A region having a lower refractive index than the refractive index of the substrate is disposed between the elements and the substrate to reduce the longest wavelength at which resonance occurs. The region may comprise a plurality of ribs extending from the substrate and supporting the elements. The ribs may be formed by etching slots into the substrate using the elements as a mask. The region may also comprise at least one layer of dielectric film. In addition the region may be comprise ribs extending from the surface, each having at least one layer of dielectric film disposed thereon.

Claims

1. A broadband wire grid polarizer for the visible spectrum, the polarizer comprising:

a substrate having a first surface and a refractive index;

a region on the first surface of the substrate having a refractive index which is less than the refractive index of the substrate; and

an array of parallel, elongated elements disposed on the region; and

wherein the array has a configuration and the elements have a size which would normally create a resonance effect in combination with the substrate within the visible spectrum; and

wherein the region with a lower refractive index than the substrate refractive index causes a shift of the normally occurring resonance effect to a lower wavelength, thereby broadening a band of visible wavelengths in which no resonance effect occurs.

2. The polarizer of claim 1, wherein the elements have a period of between approximately half the wavelength of visible light and twice the wavelength of visible light.

3. The polarizer of claim 1, wherein the elements have a period of between approximately 0.076 to 1.4 μ

m.

4. The polarizer of claim 1, wherein the region has a thickness of between approximately 0.001 and 0.3 μ

m.

5. The polarizer of claim 1, wherein the elements have a thickness of between approximately 0.04 and 0.3 μ

m; and

wherein the elements are aluminum or silver.

6. The polarizer of claim 1, wherein the region comprises a plurality of ribs extending from the substrate.

7. The polarizer of claim 6, wherein the ribs are integral with the substrate, and are formed of the same material as the substrate.

8. The polarizer of claim 6, wherein each rib is comprised of at least one layer of material which is different from the material of the substrate.

9. The polarizer of claim 8, wherein the at least one layer of material is magnesium fluoride.

10. The polarizer of claim 9, wherein the at least one layer has a thickness between approximately 0.04 and 0.22 μ

m.

11. The polarizer of claim 6, wherein the ribs have a rectangular-shaped cross section.

12. The polarizer of claim 6, wherein the ribs have a trapezoidal-shaped cross section.

13. The polarizer of claim 1, wherein the region includes a layer of dielectric material.

14. The polarizer of claim 13, wherein the layer of dielectric material includes magnesium fluoride.

15. The polarizer of claim 13, wherein the layer has a thickness between approximately 0.001 and 0.3 μ

m.

16. The polarizer of claim 1, wherein the region comprises at least one layer of material different from the material of the substrate, and a plurality of ribs formed in and extending from the at least one layer.

17. The polarizer of claim 1, wherein the region comprises a plurality of ribs formed in and extending from the substrate, each of the plurality of ribs having at least one layer of material disposed thereon which is different from the material of the rib.

18. The polarizer of claim 1, wherein the substrate is glass, and the region comprises magnesium fluoride.

19. The polarizer of claim 1, wherein the substrate has a refractive index of approximately 1.5, and the region has a refractive index of approximately 1.4.

20. A broadband wire grid polarizer for the visible spectrum, the polarizer comprising:

a transparent substrate having a first surface and a refractive index;

an array of parallel, elongated elements supported by the substrate; and

a region disposed between the elements and the substrate having a refractive index which is less than the refractive index of the substrate, and having a thickness of between approximately 0.001 and 0.3 μ

m.

21. The polarizer of claim 20, wherein the array of elements is configured to interact with the electromagnetic waves of the light in the visible spectrum to generally reflect most of the light of a first polarization and transmit most of the light of a second polarization;

and wherein the array has a configuration and the elements have a size which would normally create a resonance effect within the visible spectrum in which a significant amount of the second polarization is reflected rather than transmitted; and

wherein the region with a shorter refractive index than the substrate refractive index causes a shift of the normally occurring resonance effect to a lower wavelength, thereby broadening a band of visible wavelengths in which no resonance effect occurs.

22. The polarizer of claim 20, wherein the elements have a period between approximately 0.076 to 0.2 μ

m.

23. The polarizer of claim 20, wherein the elements have a thickness of between approximately 0.04 and 0.3 μ

m; and

wherein the elements are aluminum or silver.

24. The polarizer of claim 20, wherein the region comprises a plurality of ribs extending from the substrate.

25. The polarizer of claim 24, wherein the ribs are integral with the substrate, and are formed of the same material as the substrate.

26. The polarizer of claim 24, wherein each rib is comprised of at least one layer of material which is different from the material of the substrate.

27. The polarizer of claim 26, wherein the at least one layer of material is magnesium fluoride.

28. The polarizer of claim 24, wherein the ribs have a rectangular-shaped cross section.

29. The polarizer of claim 24, wherein the ribs have a trapezoidal-shaped cross section.

30. The polarizer of claim 20, wherein the region includes a film of dielectric material.

31. The polarizer of claim 30, wherein the film of dielectric material includes magnesium fluoride.

32. The polarizer of claim 20, wherein the region comprises at least one layer of material different from the material of the substrate, and a plurality of ribs formed in and extending from the at least one layer.

33. The polarizer of claim 20, wherein the region comprises a plurality of ribs formed in and extending from the substrate, each of the plurality of ribs having at least one layer of material disposed thereon which is different from the material of the rib.

34. The polarizer of claim 20, wherein the substrate is glass, and the region comprises magnesium fluoride.

35. The polarizer of claim 20, wherein the substrate has a refractive index of approximately 1.5, and the region has a refractive index of approximately 1.4.

36. An apparatus for polarizing broad bandwidth, visible light, the apparatus comprising:

a light source producing a light beam having at least one wavelength within the visible spectrum;

a transparent substrate disposed in the light beam having a first surface and a refractive index;

an array of parallel, elongated elements coupled to the first surface of the substrate; and

a region disposed between the first surface of the substrate and the elements, the region having a refractive index which is less than the refractive index of the substrate; and

wherein the array of elements is configured to interact with the electromagnetic waves of the light in the visible spectrum to generally reflect most the light of a first polarization and transmit most the light of a second polarization; and

wherein the array has a configuration and the elements have a size which would normally create a resonance effect in combination with the substrate within the visible spectrum in which a significant amount of the second polarization is reflected rather than transmitted; and

wherein the region with a lower refractive index than the substrate refractive index causes a shift of the normally occurring resonance effect to a lower wavelength, thereby broadening a band of visible wavelengths in which no resonance effect occurs.

37. The apparatus of claim 36, wherein the elements have a period of approximately half the wavelength of the beam of visible light.

38. The apparatus of claim 36, wherein the elements have a period between approximately 0.19λ

and 0.5λ

, where λ

is the wavelength of the beam.

39. The apparatus of claim 36, wherein the region has a thickness of between approximately 0.001 and 0.3 μ

m.

40. The apparatus of claim 36, wherein the elements have a thickness of between approximately 0.04 and 0.3 μ

m; and

wherein the elements are aluminum or silver.

41. The apparatus of claim 36, wherein the region comprises a plurality of ribs extending from the substrate.

42. The apparatus of claim 41, wherein the ribs are integral with the substrate and are formed of the same material as the substrate.

43. The apparatus of claim 41, wherein each rib is comprised of at least one layer of material which is different from the material of the substrate.

44. The apparatus of claim 43, wherein the at least one layer of material is magnesium fluoride.

45. The apparatus of claim 41, wherein the ribs have a rectangular-shaped cross section.

46. The apparatus of claim 41, wherein the ribs have a trapezoidal-shaped cross section.

47. The apparatus of claim 36, wherein the region includes a film of dielectric material.

48. The apparatus of claim 47, wherein the film of dielectric material includes magnesium fluoride.

49. The polarizer of claim 36, wherein the region comprises at least one layer of material different from the material of the substrate, and a plurality of ribs formed in and extending from the at least one layer.

50. The apparatus of claim 36, wherein the region comprises a plurality of ribs formed in and extending from the substrate, each of the plurality of ribs having at least one layer of material disposed thereon which is different from the material of the rib.

51. The apparatus of claim 36, wherein the substrate is glass, and the region comprises magnesium fluoride.

52. The apparatus of claim 36, wherein the substrate has an index of refraction of approximately 1.5, and the region has an index of refraction of approximately 1.4.

53. A broadband wire grid polarizer, the polarizer comprising:

a transparent substrate having a first surface and a refractive index;

an array of parallel, elongated elements supported by the first surface of the substrate, wherein the array satisfies the condition 0.19λ

≦

p≦

2λ

, where p is the period of the elements, and λ

is the wavelength; and

a region disposed between the first surface of the substrate and the elements, the region having a refractive index and a thickness between the first surface of the substrate and the elements, wherein the region satisfies the conditions n_R <

n_S and 0.001 μ

m≦

t_R ≦

0.3 μ

m, where n_R is the effective refractive index of the region, n_S is the refractive index of the substrate, and t_R is the thickness of the region between the first surface of the substrate and the elements.

54. A method for making a broadband wire grid polarizer for the visible spectrum, the method comprising:

providing a transparent substrate with a first surface and a refractive index;

forming an array of parallel elements on the first surface of the substrate, the elements defining a mask; and

etching the substrate between the elements to create ribs that extend from the substrate and which define a region with a refractive index less than the refractive index of the substrate.

55. The method of claim 54, further comprising depositing a layer of dielectric film on the first surface before forming the elements;

and wherein etching the substrate further includes etching the film between the elements.

56. The method of claim 54, wherein forming an array of parallel elements includes forming elements with a period between approximately 0.076 and 0.2 μ

m.

57. The method of claim 54, wherein etching the substrate includes etching the substrate to a depth of between approximately 0.001 and 0.3 μ

m.

58. A method for making a broadband wire grid polarizer for the visible spectrum, the method comprising:

providing a transparent substrate with a first surface and a refractive index;

depositing a layer of dielectric film on the first surface with a refractive index less than the refractive index of the substrate;

forming an array of parallel elements on the layer of dielectric film; and

etching the layer of dielectric film between the elements to create ribs.

59. The method of claim 58, wherein etching the layer of dielectric film further includes etching the substrate between the elements.

60. The method of claim 58, wherein depositing a layer of dielectric film includes depositing a layer of magnesium fluoride.

61. A broadband wire grid polarizer for the visible spectrum, the polarizer comprising:

a substrate having an etched surface forming a plurality of ribs extending from the substrate; and

an array of parallel, elongated elements disposed on the ribs.

62. The polarizer of claim 61, wherein the substrate is etched to a depth of between approximately 0.04 and 0.3 μ

m.

63. The polarizer of claim 61, wherein the elements have a period between approximately 0.076 and 1.4 μ

m.

64. A broadband wire grid polarizer for the visible spectrum, the polarizer comprising:

a transparent substrate having a first surface and a refractive index;

an array of parallel, elongated elements supported by the substrate and having a thickness of between approximately 0.04 and 0.3 μ

m, the elements being aluminum or silver; and

a region disposed between the elements and the substrate having a refractive index which is less than the refractive index of the substrate.

65. The polarizer of claim 64, wherein the array of elements is configured to interact with the electromagnetic waves of the light in the visible spectrum to generally reflect most of the light of a first polarization and transmit most of the light of a second polarization;

and wherein the array has a configuration and the elements have a size which would normally create a resonance effect in combination with the substrate within the visible spectrum in which a significant amount of the second polarization is reflected rather than transmitted; and

wherein the region with a shorter refractive index than the substrate refractive index causes a shift of the normally occurring resonance effect to a lower wavelength, thereby broadening a band of visible wavelengths in which no resonance effect occurs.

66. The polarizer of claim 64, wherein the elements have a period between approximately 0.076 to 0.2 μ

m.

67. The polarizer of claim 64, wherein the region has a thickness of between approximately 0.001 and 0.3 μ

m.

68. The polarizer of claim 64, wherein the region comprises a plurality of ribs extending from the substrate.

69. The polarizer of claim 68, wherein the ribs are integral with the substrate, and are formed of the same material as the substrate.

70. The polarizer of claim 68 wherein each rib is comprised of at least one layer of material which is different from the material of the substrate.

71. The polarizer of claim 70, wherein the at least one layer of material is magnesium fluoride.

72. The polarizer of claim 68, wherein the ribs have a rectangular-shaped cross section.

73. The polarizer of claim 68, wherein the ribs have a trapezoidal-shaped cross section.

74. The polarizer of claim 64, wherein the region includes a film of dielectric material.

75. The polarizer of claim 74, wherein the film of dielectric material includes magnesium fluoride.

76. The polarizer of claim 64, wherein the region comprises at least one layer of material different from the material of the substrate, and a plurality of ribs formed in and extending from the at least one layer.

77. The polarizer of claim 64, wherein the region comprises a plurality of ribs formed in and extending from the substrate, each of the plurality of ribs having at least one layer of material disposed thereon which is different from the material of the rib.

78. The polarizer of claim 64, wherein the substrate is glass, and the region comprises magnesium fluoride.

79. The polarizer of claim 64, wherein the substrate has a refractive index of approximately 1.5, and the region has a refractive index of approximately 1.4.

80. A broadband wire grid polarizer for the visible spectrum, the polarizer comprising:

a substrate having a first surface and a refractive index;

a region on the first surface of the substrate including a plurality of ribs extending from the substrate and having a refractive index which is less than the refractive index of the substrate; and

an array of parallel, elongated elements disposed on the region.

81. The polarizer of claim 80, wherein the elements have a period of between approximately 0.076 to 1.4 μ

m.

82. The polarizer of claim 80, wherein the region has a thickness of between approximately 0.001 and 0.3 μ

m.

83. The polarizer of claim 80, wherein the elements have a thickness of between approximately 0.04 and 0.3 μ

m; and

wherein the elements are aluminum or silver.

84. The polarizer of claim 80, wherein the ribs are integral with the substrate, and are formed of the same material as the substrate.

85. The polarizer of claim 80, wherein each rib is comprised of at least one layer of material which is different from the material of the substrate.

86. The polarizer of claim 85, wherein the at least one layer of material is magnesium fluoride.

87. The polarizer of claim 80, wherein the ribs have a rectangular-shaped cross section.

88. The polarizer of claim 80, wherein the ribs have a trapezoidal-shaped cross section.

89. The polarizer of claim 80, wherein the region includes a layer of dielectric material.

90. The polarizer of claim 89, wherein the layer of dielectric material includes magnesium fluoride.

91. The polarizer of claim 80, wherein the region comprises at least one layer of material different from the material of the substrate, and a plurality of ribs formed in and extending from the at least one layer.

92. The polarizer of claim 80, wherein the region comprises a plurality of ribs formed in and extending from the substrate, each of the plurality of ribs having at least one layer of material different from the material of the rib disposed thereon.

93. The polarizer of claim 80, wherein the substrate is glass, and the region comprises magnesium fluoride.

94. The polarizer of claim 80, wherein the substrate has a refractive index of approximately 1.5, and the region has a refractive index of approximately 1.4.

95. A broadband wire grid polarizer for the visible spectrum, the polarizer comprising:

a substrate having a first surface and a refractive index;

a region on the first surface of the substrate having a refractive index which is less than the refractive index of the substrate, the region including at least one layer of material different from the material of the substrate, and a plurality of ribs formed in and extending from the film layer; and

an array of parallel, elongated elements disposed on the region.

96. A broadband wire grid polarizer for the visible spectrum, the polarizer comprising:

a substrate having a first surface and a refractive index;

a region on the first surface of the substrate having a refractive index which is less than the refractive index of the substrate, and having a plurality of ribs formed in and extending from the substrate;

at least one layer of material different from the material of the ribs disposed on each of the plurality of ribs; and

an array of parallel, elongated elements disposed on the region.