Non-planar micro-optical structures

• US 6,122,109 A
• Filed: 04/15/1999
• Issued: 09/19/2000
• Est. Priority Date: 04/16/1998
• Status: Expired due to Term

• Current Assignee: New Mexico State University, UNM Rainforest Innovations (f/k/a STC.UNM) (The University of New Mexico)
• Original Assignee: The University of New Mexico
• Inventors: Hersee, Stephen D., Peake, Gregory M.
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): Spector, David N.
• Application Number:
  US09/291,991
• Time in Patent Office: 523 Days
• Field of Search: 359/619, 359/620, 359/718, 359/720, 359/796, 359/719, 501/900, 430/321, 430/313, 216/2, 216/26
• US Class Current: 359/620
• CPC Class Codes: B29D 11/00365 Production of microlenses lenticular sheets B29D11/00278
• CPC Class Codes: C23C 16/045 Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
• CPC Class Codes: G02B 2006/12102 Lens
• CPC Class Codes: G02B 2006/12121 Laser
• CPC Class Codes: G02B 3/0056 arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses G02B3/0043 takes precedence; miniaturised objectives for electronic devices employing wafer level optics G02B13/0085
• CPC Class Codes: G02B 6/1245 Geodesic lenses
• CPC Class Codes: H01L 31/02327 the optical elements being integrated or being directly associated to the device, e.g. back reflectors optical coatings H01L31/0216
• CPC Class Codes: H01S 5/0267 Integrated focusing lens H01S5/18388 takes precedence
• CPC Class Codes: H01S 5/1089 Unstable resonators
• CPC Class Codes: H01S 5/18327 Structure being part of a DBR H01S5/18391 takes precedence
• CPC Class Codes: H01S 5/18388 Lenses

Abstract

In one embodiment, the present invention provides a microlens having very small focal length. The present invention also provides a non-planar microstructure having a covering layer which is slowly oxidizing or substantially free of oxygen. The present invention also provides methods for forming such microlenses and microstructures. In addition, the present invention provides a VCSEL which includes one or more non-planar microstructures of the present invention.

Claims

1. A non-faceted microlens consisting essentially of a non-amorphous material and having a focal length of 50 μ

m or less.

2. The microlens of claim 1, wherein said microlens has a focal length of 40 μ

m or less.

3. The microlens of claim 1, wherein said microlens has a focal length of 30 μ

m or less.

4. The microlens of claim 1, wherein said microlens has a diameter of 30 μ

m or less.

5. The microlens of claim 1, wherein said microlens is astigmatic.

6. The microlens of claim 1, wherein said microlens comprises a semiconductor material.

7. The microlens of claim 1, wherein said microlens comprises a group III-V semiconductor material.

8. The microlens of claim 1, wherein said microlens comprises GaAs.

16. The microlens of claim 1, wherein said microlens consists essentially of a crystalline material.

9. An array of microlenses mounted on a substrate, each of said microlenses consisting essentially of a non-amorphous material and having a focal length of 50 μ

m or less.

10. The array of claim 9, wherein each of said microlenses has a focal length of 40 μ

m or less.

11. The array of claim 9, wherein said of said microlenses has a focal length of 30 μ

m or less.

12. The array of claim 9, wherein each of said microlenses has a diameter of 30 μ

m or less.

13. The array of claim 9, wherein each of said microlenses comprises a semiconductor material.

14. The array of claim 9, wherein each of said microlenses comprises a group III-V semiconductor material.

15. The array of claim 9, wherein each of said microlenses comprises GaAs.

17. The array of microlenses of claim 9, wherein each of said microlenses consists essentially of a crystalline material.