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Micromachined gyros

  • US 6,122,961 A
  • Filed: 09/02/1997
  • Issued: 09/26/2000
  • Est. Priority Date: 09/02/1997
  • Status: Expired due to Term
First Claim
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1. A micromachined device comprising:

  • a substrate;

    a first body suspended over the substrate and movable relative to the substrate such that the first body can be dithered along a dither axis; and

    a second body suspended over the substrate, the first and second bodies being coplanar in a first plane parallel to the substrate with the second body having a perimeter that surrounds the first body;

    the first body being coupled to the second body to allow movement by the first body along the dither axis relative to the second body, to substantially inhibit movement of the first body relative to the second body along an axis orthogonal to the first axis, and to allow the first and second bodies to move together along the orthogonal axis, the first body having a perimeter portion defining and surrounding an aperture;

    the second body being formed such that the second body is substantially inhibited from moving relative to the substrate along the dither axis;

    fingers extending inwardly from the first body into the aperture and movable with the first body; and

    fixed fingers, fixed relative to the substrate and interdigitating with the inwardly extending fingers.

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