System for the measurement of acceleration in three axes
First Claim
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1. A system for the measurement of accelerations, comprising:
- a substrate, said substrate includinga substantially rectangular frame having first, second, third and fourth sides, said first and third sides being opposite each other, and said second and fourth sides being orthogonal to said first and third sides;
first, second, third and fourth sensors arranged in a rectangle on a surface of said substrate, each of said sensors includinga seismic mass in the form of a paddle having a main sensitivity axis which passes through a center of gravity of said paddle and is displaced from an axis normal to a surface of said paddle by an error angle, the direction of the main sensitivity axis of the paddle of each of said first, second, third and fourth sensors extending in a different direction;
a bending beam extending in a plane parallel to the surface of said substrate attached to said paddle and a respective side of said outer frame, the paddles of said first, second, third and fourth sensors being cantilevered from the first, second, third and fourth sides respectively of said outer frame by first, second, third and fourth bending beams; and
means secured to the bending beam of each of said first, second, third and fourth sensors for measuring a deflection of the seismic mass attached thereto.
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Abstract
A system for measuring acceleration in three axes comprises four individual sensors arranged in a rectangle on a common substrate with each having one main sensitivity axis. Each individual sensor has a seismic mass in the form of a cantilevered paddle connected by a bending beam to an outer frame and having a center of gravity. Each beam is arranged parallel to the substrate surface and each contains means for measuring the bending that occurs when acceleration forces act upon the system. The actual acceleration occurring on each axis can then be determined as a function of the error angle formed between the sensitivity axis and the normal to the substrate surface.
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9 Claims
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1. A system for the measurement of accelerations, comprising:
a substrate, said substrate including a substantially rectangular frame having first, second, third and fourth sides, said first and third sides being opposite each other, and said second and fourth sides being orthogonal to said first and third sides; first, second, third and fourth sensors arranged in a rectangle on a surface of said substrate, each of said sensors including a seismic mass in the form of a paddle having a main sensitivity axis which passes through a center of gravity of said paddle and is displaced from an axis normal to a surface of said paddle by an error angle, the direction of the main sensitivity axis of the paddle of each of said first, second, third and fourth sensors extending in a different direction; a bending beam extending in a plane parallel to the surface of said substrate attached to said paddle and a respective side of said outer frame, the paddles of said first, second, third and fourth sensors being cantilevered from the first, second, third and fourth sides respectively of said outer frame by first, second, third and fourth bending beams; and means secured to the bending beam of each of said first, second, third and fourth sensors for measuring a deflection of the seismic mass attached thereto. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
Specification