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Pressure sensor with housing, sensor element having ceramic components, and support ring mounting sensor element to housing

  • US 6,122,976 A
  • Filed: 04/08/1997
  • Issued: 09/26/2000
  • Est. Priority Date: 04/14/1994
  • Status: Expired due to Term
First Claim
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1. A pressure sensor for measuring the pressure of a fluid, comprising:

  • a housing, positionable in contact with a volume containing the fluid, a sensor element comprising components made of a ceramic material, the sensor element being plate-shaped having a thickness and further having two large surfaces and an edge surface, the edge surface having a width and extending around a circumference of the sensor element, the sensor element further enclosing an interior volume which changes when a pressure acting on at least part of the sensor element changes, and the sensor element further comprising electrical conductor paths having electrical characteristics which change when the interior volume changes, anda support ring made of metal, surrounding the sensor element and rigidly connecting the sensor element to the housing, the sensor element being mechanically attached to the housing only by the support ring, wherein the support ring is directly connected to the sensor element by a ceramic joint at at least a portion of the edge surface of the sensor element, andwherein the metal of the support ring has a coefficient of thermal linear expansion substantially equal to the coefficient of thermal linear expansion of the ceramic material in the sensor element.

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