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Clean storage equipment for substrates and method of storing substrates

  • US 6,123,120 A
  • Filed: 12/02/1998
  • Issued: 09/26/2000
  • Est. Priority Date: 12/03/1997
  • Status: Expired due to Fees
First Claim
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1. Storage equipment for substrates set in pods, comprising:

  • a storage-cabinet for at least two pods in which substrates are set;

    a plurality of covers configured to individually cover the pods, said covers being located in the storage-cabinet;

    means for fitting the covers to the pods, respectively;

    means for holding the pods with the covers;

    gas supply means for individually supplying gas into the pods through the covers; and

    exhaust means for individually discharging an atmosphere from the pods through the covers.

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