Sectional clamp ring

• US 6,123,804 A
• Filed: 02/22/1999
• Issued: 09/26/2000
• Est. Priority Date: 02/22/1999
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Babassi, Michael, Hutnick, David
• Primary Examiner(s): Beck, Shrive
• Assistant Examiner(s): Hassanzadeh, Parviz
• Application Number:
  US09/255,033
• Time in Patent Office: 582 Days
• Field of Search: 156/345, 118/728, 118/721, 118/715
• US Class Current: 156/345.51
• CPC Class Codes: H01L 21/68721 characterised by edge clamping, e.g. clamping ring

Abstract

The present invention provides a multi-piece clamp ring, adapted to be used in plasma assisted and other processes in electronic device fabrication and is especially suitable for use in an etching or deposition process. The clamp ring includes an upper shield portion that typically is consumed in the etching process and a lower ring portion protected by the upper shield portion which can be re-used. The upper shield portion protects the lower ring portion from the etching process. The upper shield portion is adapted to be fastened to a chamber member to retain alignment with a substrate during the etching process. The lower ring portion is allowed to move and align itself with the upper shield portion or be removably fastened with the upper shield portion.

Claims

1. A multi-piece consumable clamp ring for use in a processing chamber, comprising:

a) a downwardly extending U-shaped annular lower ring portion adapted to be positioned between two electrically chargeable members; and

b) an annular upper shield portion separate from the lower ring portion substantially covering an upper surface of the U-shaped annular lower ring portion, wherein the lower ring portion and the upper shield portion are adapted to be releasably coupled together.

2. The clamp ring of claim 1, further comprising a shoulder on the upper shield portion to align the upper shield portion and lower ring portion with respect to each other.

3. The clamp ring of claim 1, further comprising a plurality of holes in the upper shield portion adapted to attach the upper shield portion independently of the lower ring portion to a chamber member in the processing chamber.

4. The clamp ring of claim 3, further comprising a recessed area in the upper shield portion adapted to at least partially allow a head of a fastener to recess into the upper shield portion.

5. The clamp ring of claim 4, further comprising a cap adapted to cover the fastener.

6. The clamp ring of claim 3, wherein the lower ring portion is unattached to the chamber to allow the lower ring portion to be aligned with the upper shield portion.

7. The clamp ring of claim 6, wherein the lower ring portion is adapted to be aligned with a shoulder on the upper shield portion.

8. The clamp ring of claim 1, wherein the upper shield portion and lower ring portion are releasable coupled together with a protrusion on one of the portions and a corresponding detent on the other portion.

9. A processing system, comprising:

a) a chamber having a bottom, sidewalls, and a top;

b) a substrate supporting surface inside the chamber;

c) a power supply adapted to created a plasma in the chamber;

d) a multi-pieces clamp ring having an upper shield portion and a downwardly extending U-shaped lower ring portion that is at least partially shielded from processing in the processing system, wherein the upper shield portion and the lower ring are releasably coupled together.

10. The system of claim 9, further comprising a lift mechanism adapted to lower and raise the clamp ring.

11. The system of claim 9, wherein the U-shaped lower ring portion is adapted to overlap an insulating liner.

12. The system of claim 9, wherein the lower ring portion and upper shield portion comprise a protrusion and a detent so as to connect the ring portions together.

13. A consumable clamp ring for use in a processing chamber, comprising an annular upper shield portion adapted to be releasably coupled with a downwardly extending U-shaped annular lower ring portion and adapted to substantially cover an upper surface of the lower ring portion.

14. The clamp ring of claim 13, further comprising a shoulder on the upper shield portion adapted to align the upper shield portion with the lower ring portion.

15. The clamp ring of claim 14, wherein the upper shield portion comprises a lower portion adjacent the shoulder adapted to overlap an upper surface of the lower ring portion.

16. The clamp ring of claim 13, further comprising one or more holes in the upper shield portion adapted to receive one or more fasteners therein to couple the upper shield portion to a chamber component in the processing chamber.

17. The clamp ring of claim 13, wherein the upper shield portion and lower ring portion are coupled together with a protrusion on one of the portions and a corresponding detent on the other portion.

18. The clamp ring of claim 13, wherein the upper shield portion is adapted to disengage the lower ring portion as the upper shield portion is vertically displaced in the processing chamber.