Fabrication of microchip drug delivery devices

• US 6,123,861 A
• Filed: 02/11/1998
• Issued: 09/26/2000
• Est. Priority Date: 07/02/1996
• Status: Expired due to Term

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Santini, John T. Jr., Cima, Michael J., Langer, Robert S.
• Primary Examiner(s): Gulakowski, Randy
• Assistant Examiner(s): ALANKO, ANITA KAREN
• Application Number:
  US09/022,322
• Time in Patent Office: 958 Days
• Field of Search: 216/2, 216/39, 216/56, 604/890.1, 604/891.1, 604/93, 128/899
• US Class Current: 216/2
• CPC Class Codes: A61K 9/0009 involving or responsive to electricity, magnetism or acoustic waves; Galenical aspects of sonophoresis, iontophoresis, electroporation or electroosmosis microelectromechanical systems A61K9/0097
• CPC Class Codes: A61K 9/0097 Micromachined devices; Microelectromechanical systems [MEMS]; Devices obtained by lithographic treatment of silicon; Devices comprising chips intradermal microneedle arrays A61K9/0021; MEMS in general B81B7/02
• CPC Class Codes: A61M 2205/0244 Micromachined materials, e.g. made from silicon wafers, microelectromechanical systems [MEMS] or comprising nanotechnology
• CPC Class Codes: A61M 37/00 Other apparatus for introducing media into the body for reproduction or fertilisation A61B17/425; apparatus for iontophoresis or cataphoresis A61N1/30; Percutany, i.e. introducing medicines into the body by diffusion through the skin salt baths A61H33/04
• CPC Class Codes: C25F 7/00 Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects for both electrolytic coating and removal C25D; Servicing or operating

Abstract

Fabrication methods are provided for microchips that control both the rate and time of release of multiple chemical substances and allow for the release of a wide variety of molecules in either a continuous or pulsatile manner. In all of the preferred embodiments, a material that is impermeable to the drugs or other molecules to be delivered and the surrounding fluids is used as the substrate. Reservoirs are etched into the substrate using either chemical (wet) etching or plasma (dry) etching techniques well known in the field of microfabrication. Hundreds to thousands of reservoirs can be fabricated on a single microchip using these techniques. A release system, which includes the molecules to be delivered, is inserted into the reservoirs by injection, inkjet printing, or spin coating methods. Exemplary release systems include polymers and polymeric matrices, non-polymeric matrices, and other excipients or diluents. The physical properties of the release system control the rate of release of the molecules. The reservoirs can contain multiple drugs or other molecules in variable dosages. The filled reservoirs can be capped with materials that passively disintegrate, materials that allow the molecules to diffuse passively out of the reservoir over time, or materials that disintegrate upon application of an electric potential. Release from an active device can be controlled by a preprogrammed microprocessor, remote control, or by biosensors.

Claims

1. A method of fabricating a microchip device for release of molecules having reservoirs containing the molecules for release comprising:

providing a substrate;

depositing and patterning a material on the substrate for use as an etch mask;

etching a plurality of reservoirs in the substrate;

filling the reservoirs with a release system comprising the molecules; and

capping the reservoirs with a cap material which is selectively permeable to the molecules, a cap material which disintegrates to release the molecules, or a combination thereof,

thereby forming the microchip device containing within the substrate the molecules to be released.

2. The method of claim 1 wherein the substrate comprises an upper surface and a lower surface,

wherein the material for use as an etch mask is deposited onto both the upper surface and the lower surface, and

wherein the reservoirs are etched so that the material deposited onto the lower surface serves as a membrane covering each reservoir.

3. The method of claim 1 further comprising filling each reservoir with different types and amounts of cap materials and release systems containing molecules to be delivered.

4. The method of claim 1 wherein the reservoirs are filled by injection, inkjet printing, or spin coating.

5. The method of claim 2 further comprising depositing a thin film of conductive material over the membrane of insulating material covering each reservoir.

6. The method of claim 5 further comprising patterning the conductive film into electrodes so that an anode covers each membrane-covered reservoir opening and cathodes are placed on areas of the device not having reservoirs.

7. The method of claim 6 further comprising depositing a material over each electrode, except the portion of the anode directly over the reservoir and a portion of the cathode.

8. The method of claim 7 further comprising removing the membrane of insulating material from underneath the layer of conductive material covering each reservoir.

9. The method of claim 1 wherein the release system further comprises a biodegradable matrix.

10. The method of claim 1 wherein the cap material is selected from the group consisting of polymers and metals.

11. The method of claim 1 wherein the reservoir cap comprises a UV polymerizable polymer, and the method further comprises exposing the polymer to UV light to selectively crosslink the polymer.

12. The method of claim 1 wherein the molecules are drug molecules.

13. The method of claim 1 wherein the molecules are reagents or diagnostic agents.