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Non-volatile MEMS micro-relays using magnetic actuators

  • US 6,124,650 A
  • Filed: 10/15/1999
  • Issued: 09/26/2000
  • Est. Priority Date: 10/15/1999
  • Status: Expired due to Term
First Claim
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1. An actuation apparatus for a device including a mobile electrode having a first electrical contact and a stationary electrode having a second electrical contact, said actuation device comprising:

  • a latchable magnetic material disposed on one of the mobile and stationary electrodes and having a magnetization direction that is changeable in response to exposure to an external magnetic field;

    at least one electrical conductor disposed in predeterminately spaced relation to said latchable magnetic material such that an external magnetic field created by passing electrical current through said at least one conductor exposes the latchable magnetic material to the created magnetic field to cause a change in the magnetization direction of said latchable magnetic material, said changed magnetization direction being maintained in the latchable magnetic material after the exposure to the created external magnetic field is discontinued; and

    a second magnetic material disposed on the other of the mobile and stationary electrodes and in predeterminately spaced relation to said latchable magnetic material so that said second magnetic material is one of attracted to and repelled from said latchable magnetic material in response to and as a function of the magnetization direction of said latchable magnetic material;

    wherein the first and second electrical contacts may be selectively connected and disconnected by displacing the mobile electrode relative to the stationary electrode by selectively applying electrical current to said at least one conductor so as to create the external magnetic field to which the latchable magnetic material is exposed and thereby change the magnetization direction of said latchable magnetic material using the external magnetic field of the at least one conductor.

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