Integrated released beam oscillator and associated methods
First Claim
1. An integrated oscillator for providing clock signals, the integrated oscillator comprising:
- micro-mechanical oscillating means for providing an oscillating clock signal, said micro-mechanical oscillating means including;
a support layer,a fixed layer positioned on said support layer,remaining portions of a sacrificial layer positioned on portions of said fixed layer, andan oscillating layer positioned on said remaining portions of the sacrificial layer, overlying said fixed layer in spaced relation therefrom, and extending lengthwise generally transverse to a predetermined direction for defining a released beam for oscillating at a predetermined frequency, the spaced relation formed by removal of unwanted portions of the sacrificial layer; and
clock signal controlling means connected to said micro-mechanical oscillating means for controlling said micro-mechanical oscillating means and for generating clock signals therefrom.
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Accused Products
Abstract
An integrated oscillator and associated methods are provided for providing clock signals. The integrated oscillator preferably includes a micro-mechanical oscillating circuit for providing an oscillating clock signal. The micro-mechanical oscillating circuit preferably includes a support layer, a fixed layer positioned on a support layer, remaining portions of a sacrificial layer positioned only on portions of the fixed layer, and an oscillating layer positioned on the remaining portions of the sacrificial layer, overlying the fixed layer in spaced relation therefrom, and extending lengthwise generally transverse to a predetermined direction for defining a released beam for oscillating at a predetermined frequency. The spaced relation is preferably formed by removal of unwanted portions of the sacrificial layer. The integrated oscillator also preferably includes a clock signal controlling circuit connected to the micro-mechanical oscillating circuit for controlling the micro-mechanical oscillating circuit and for generating clock signals therefrom.
105 Citations
67 Claims
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1. An integrated oscillator for providing clock signals, the integrated oscillator comprising:
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micro-mechanical oscillating means for providing an oscillating clock signal, said micro-mechanical oscillating means including; a support layer, a fixed layer positioned on said support layer, remaining portions of a sacrificial layer positioned on portions of said fixed layer, and an oscillating layer positioned on said remaining portions of the sacrificial layer, overlying said fixed layer in spaced relation therefrom, and extending lengthwise generally transverse to a predetermined direction for defining a released beam for oscillating at a predetermined frequency, the spaced relation formed by removal of unwanted portions of the sacrificial layer; and clock signal controlling means connected to said micro-mechanical oscillating means for controlling said micro-mechanical oscillating means and for generating clock signals therefrom. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. An integrated oscillator for providing clock signals, the integrated oscillator comprising:
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micro-mechanical oscillating means for providing an oscillating clock signal, said micro-mechanical oscillating means including; a fixed conductive layer, and an oscillating conductive layer overlying said fixed conductive layer in spaced relation therefrom, and extending lengthwise generally transverse to a predetermined direction for defining a released beam for oscillating at a predetermined frequency, said released beam including a plurality of openings formed therein, said plurality of openings extending from an upper surface of said released beam to a region defining the spaced relation underlying said released beam and positioned between said released beam and said fixed conductive layer, and trimmed released portions defining peripheries of removed portions of said oscillating conductive layer; and clock signal controlling means connected to said micro-mechanical oscillating means for controlling said micro-mechanical oscillating means and for generating clock signals therefrom, said clock signal controlling means including a first electrode connected to said fixed conductive layer and a second electrode connected to said oscillating conductive layer so that said fixed conductive layer and said oscillating conductive layer define two plates of a capacitor and generate an electric field therebetween when a voltage signal is applied to the first and second electrodes. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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32. An integrated oscillator for providing clock signals, the integrated oscillator comprising:
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first and second micro-mechanical oscillating means each for providing an oscillating clock signal, each of said first and second micro-mechanical oscillating means including; a fixed conductive layer positioned on said support layer, remaining portions of a sacrificial layer on said fixed conductive layer, and an oscillating conductive layer positioned on said remaining portions of the sacrificial layer, overlying said fixed conducting layer in spaced relation therefrom, and extending lengthwise generally transverse to a predetermined direction for defining a released beam for oscillating at a predetermined frequency; and clock signal controlling means connected to said first and second micro-mechanical oscillating means for controlling each of said first and second micro-mechanical oscillating means and for generating respective clock signals therefrom, said clock signal controlling means including a first pair of electrodes respectively connected to said fixed conductive layer and said oscillating conductive layer of said first micro-mechanical oscillating means so that said fixed conductive layer and said oscillating conductive layer thereof define two plates of a capacitor and generate an electric field therebetween when a voltage signal is applied to the first pair of electrodes and a second pair of electrodes respectively connected to said fixed conductive layer and said oscillating conductive layer of said second micro-mechanical oscillating means so that said fixed conductive layer and said oscillating conductive layer thereof also define two plates of a capacitor and generate an electric field therebetween when a voltage signal is applied to the second pair of electrodes, and aging compensating means responsive to both said first and second micro-mechanical oscillating means for compensating for aging of said first micro-mechanical oscillating means by using the oscillating frequency of said second micro-mechanical means as a reference frequency. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 47, 48, 49, 50, 51, 52, 56, 57, 58)
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43. An integrated oscillator for providing clock signals, the integrated oscillator comprising:
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first and second micro-mechanical oscillating means each for providing an oscillating clock signal; and clock signal controlling means connected to said first and second micro-mechanical oscillating means for controlling each of said first and second micro-mechanical oscillating means and for generating respective clock signals therefrom, said clock signal controlling means including a first pair of electrodes connected to said first micro-mechanical oscillating means, a second pair of electrodes connected to said second micro-mechanical oscillating means, and aging compensating means responsive to both said first and second micro-mechanical oscillating means for compensating for aging of said first micro-mechanical oscillating means by using the oscillating frequency of said second micro-mechanical means as a reference frequency. - View Dependent Claims (44, 45, 46)
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53. A method of forming an integrated oscillator, the method comprising the steps of:
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providing a clock signal controlling circuit region; and forming a micro-mechanical oscillating region connected to the clock signal controlling circuit region, the micro-mechanical oscillating region being formed by at least; forming a first fixed conductive layer of material on a support, depositing a sacrificial layer on the first fixed conductive layer, depositing a second conductive layer on the sacrificial layer, and removing at least unwanted portions of the sacrificial layer underlying the second conductive layer to release the second conducting layer to thereby define a released beam overlying the fixed conducting layer for oscillating at a predetermined frequency. - View Dependent Claims (54, 55)
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59. A method of forming an integrated oscillator, the method comprising the steps of:
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providing a clock signal controlling circuit region; and forming a micro-mechanical oscillating region connected to the clock signal controlling circuit region, the micro-mechanical oscillating region being formed by at least; forming a first fixed conductive layer of material on a support, forming a second conductive layer overlying and in spaced relation from the fixed conductive layer so as to define a released beam for oscillating at a predetermined resonant frequency, and trimming portions of the released beam to reduce mass of the released beam so as to tune the predetermined resonant frequency thereof. - View Dependent Claims (60, 61, 62, 63)
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64. A method of forming an integrated oscillator, the method comprising the steps of:
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providing first and second micro-mechanical oscillating circuits; controlling each of the first and second micro-mechanical oscillating circuits to generate respective clock signals therefrom; and compensating for aging of the first micro-mechanical oscillating means responsive to the oscillating frequency of the second micro-mechanical means. - View Dependent Claims (65, 66, 67)
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Specification