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Dew point sensor using mems

  • US 6,126,311 A
  • Filed: 11/02/1998
  • Issued: 10/03/2000
  • Est. Priority Date: 11/02/1998
  • Status: Expired due to Fees
First Claim
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1. A dew point sensor, comprising:

  • a micro-cantilever beam formed on a substrate;

    a cooling device in thermal contact with the micro-cantilever beam;

    a temperature sensor in thermal contact with the micro-cantilever beam; and

    a control circuit coupled to the micro-cantilever beam, the cooling device and the temperature sensor, wherein the control circuit is operable to monitor a resonance of the micro-cantilever beam, control a temperature of the cooling device and receive a temperature indication from the temperature sensor, thereby identifying the temperature of the micro-cantilever beam when the resonance of the micro-cantilever beam changes due to a change in mass caused by dew on the micro-cantilever beam when the dew point is reached.

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