Element and apparatus for attenuated total reflection measurement, and method for measuring specific component using the same
First Claim
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1. An attenuated total reflection element which permits an incident beam to enter therein and to have an internal total reflection at the surface, comprising a projection protruded at the portion where said incident beam has said internal total reflection, and said projection having a height of 1 μ
- m to 200 μ
m.
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Abstract
An improved attenuated total reflection (ATR) element and the measurement apparatus employing the element capable of performing a measurement with a high accuracy at a low operating cost is disclosed. An ATR element of the present invention permits an incident beam to have an internal total reflection at the surface, and comprises a projection protruded at the portion where the incident beam has the internal total reflection.
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Citations
15 Claims
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1. An attenuated total reflection element which permits an incident beam to enter therein and to have an internal total reflection at the surface, comprising a projection protruded at the portion where said incident beam has said internal total reflection, and said projection having a height of 1 μ
- m to 200 μ
m. - View Dependent Claims (2, 3, 4, 5, 6, 7)
- m to 200 μ
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8. An attenuated total reflection measurement apparatus comprising:
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a light source; a transparent attenuated total reflection element which permits a beam projected by said light source to enter therein and to have an internal total reflection at the surface; and a light detector which detects the beam issued from said attenuated total reflection element, wherein said attenuated total reflection element has a projection protruded at the portion where said beam has said internal total reflection, and said projection having a height of 1 μ
m to 200 μ
m. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A method for measuring a specific component comprising the steps of:
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permitting a transparent attenuated total reflection element having projections to be in contact with a subject, said projecting having a height of 1 μ
m to 200 μ
m;projecting a beam to said transparent attenuated total reflection element so as to enter therein and to have an internal total reflection at said projections; and detecting the beam issued from said attenuated total reflection element after said internal total reflection.
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Specification