Deformable mirror device and manufacturing method thereof

• US 6,128,121 A
• Filed: 04/30/1999
• Issued: 10/03/2000
• Est. Priority Date: 06/10/1996
• Status: Expired due to Fees

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Choi, Bum-kyoo, Shin, Jong-woo, Kim, Yong-kweon
• Primary Examiner(s): Dang, Hung Xuan
• Assistant Examiner(s): Lester, Evelyn A.
• Application Number:
  US09/306,557
• Time in Patent Office: 522 Days
• Field of Search: 359/290, 359/291, 359/292, 359/295, 359/298, 359/224
• US Class Current: 359/224.1
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A deformable mirror device and manufacturing method therefore. The method includes the steps of forming an electrode layer on a substrate in a predetermined pattern, forming a thick film on the upper surfaces of the substrate and the electrode layer, forming a support plate on the upper surface of the thick film, and partially etching the thick film to form at least one through hole. The method further includes separating the support plate into single portions, forming a post on one side of the inner surface of the through hole, forming a reflecting plate on the upper surface of the support plate, and removing the thick film.

Claims

1. A deformable mirror device comprising:

a substrate defining an upper surface;

a plurality of electrodes formed on the upper surface of said substrate;

a reflecting mirror installed over said electrodes and operative to incline with respect to said electrodes, said reflecting mirror defining a lower surface; and

at least one post having one end which is connected to said substrate between said electrodes and another end which is integrally combined with the lower surface of said reflecting mirror to support said reflecting mirror, and having elasticity so that said reflecting mirror is operative to be inclined,

wherein a through hole is formed through said reflecting mirror at a portion where said other end of said post is combined with said reflecting mirror.

2. The deformable mirror device as claimed in claim 1, wherein said reflecting mirror is formed of aluminum.

3. The deformable mirror device as claimed in claim 1, wherein said through hole is formed in a shape of one of a rectangle, a triangle, a trapezoid, a letter T, and a combination of the rectangle with the trapezoid.

4. A deformable mirror device comprising:

a substrate defining an upper surface;

a plurality of electrodes formed on the upper surface of said substrate, a reflecting mirror installed over said electrodes and operative to incline with respect to said electrodes, said reflecting mirror defining a lower surface; and

at least one post having one end which is connected to said substrate between said electrodes and another end which is integrally combined with the lower surface of said reflecting mirror to support said reflecting mirror, and having elasticity so that said reflecting mirror is operative to be inclined,

wherein said reflecting mirror comprises;

a support plate with a through hole, supported by said post and inclined by static electricity which is generated between said support plate and said electrodes; and

a reflecting plate formed on an entire upper surface of said support plate so that said through hole is covered, for reflecting incident light.