Integrated wafer fab time standard (machine tact) database

• US 6,128,588 A
• Filed: 10/01/1997
• Issued: 10/03/2000
• Est. Priority Date: 10/01/1997
• Status: Expired due to Fees

• Current Assignee: Sony Corporation (Sony Group Corp.), Sony Electronics Inc. (Sony Group Corp.)
• Original Assignee: Sony Corporation (Sony Group Corp.), Sony Electronics Inc. (Sony Group Corp.)
• Inventors: Chacon, Guillermo Rudolfo
• Primary Examiner(s): Teska, Kevin J.
• Assistant Examiner(s): JONES, HUGH M
• Application Number:
  US08/941,831
• Time in Patent Office: 1,098 Days
• Field of Search: 395/500.27, 703/6, 707/103, 700/102, 700/100
• US Class Current: 703/6
• CPC Class Codes: G03F 7/705 Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions
• CPC Class Codes: G03F 7/70525 Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
• CPC Class Codes: G03F 7/70991 Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum
• CPC Class Codes: G05B 19/41865 characterised by job scheduling, process planning, material flow
• CPC Class Codes: G05B 19/41885 characterised by modeling, simulation of the manufacturing system
• CPC Class Codes: G06Q 10/06 Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
• CPC Class Codes: Y02P 90/80 Management or planning

Abstract

An integrated wafer fab production characterization and scheduling system incorporates a manufacturing execution system with a scheduling system based on simulation. The integrated characterization/scheduling system provides manufacturing with a simulation tool integrated with the manufacturing execution system to evaluate proposed production control logic as a practical alternative to expensive experimentation on actual production system. Furthermore, simulation models are used to create short term dispatch schedules to steer daily manufacturing operations towards planned performance goals. Innovative features include integration of preventive maintenance scheduling, Kanban based WIP control, an integrated time standard database, a, and real time lot move updates.

Claims

1. A modeling and manufacturing execution system comprising:

said manufacturing execution system for automatically controlling routing of product lots and production inputs in said manufacturing production line based on a production scheduling model, wherein feedback data from said production line is provided to said manufacturing execution system, said feedback data comprising operating parameters for equipment in said production line and identification of said equipment by type;

a database for storing said model, said feedback data and formulae for calculating a production capacity for each piece of said equipment based on said identified type of that piece of equipment and said operating parameters of that piece of equipment; and

a simulating system for simulating operation of said production line according to said model, said simulating system using said formulae from said database to calculate said production capacities for said equipment in said production line;

wherein each formula in said database is associated with a flag having at least two values;

a first of said values indicating that an associated formula is based on actual operation of equipment production of said production line;

a second of said values indicating that an associated formula is new and unproven.

2. The system of claim 1, wherein said flag has a third value indicating that said simulating system should retain an associated formula in said database, but should ignore said associated formula in performing simulations.

4. The system of claim 1, wherein a safeguard system prevents a first formula with a flag of said first value and a second formula with a flag of said second value from being retained in said database where both said first and second formulas would be indicated for use in response to a given set of said feedback data.

3. A modeling and manufacturing execution system comprising:

said manufacturing execution system for automatically controlling routing of product lots and production inputs in said manufacturing production line based on a production scheduling model, wherein feedback data from said production line is provided to said manufacturing execution system, said feedback data comprising operating parameters for equipment in said production line and identification of said equipment by type;

a database for storing said model, said feedback data and formulae for calculating a production capacity for each piece of said equipment based on said identified type of that piece of equipment and said operating parameters of that piece of equipment; and

a simulating system for simulating operation of said production line according to said model, said simulating system using said formulae from said database to calculate said production capacities for said equipment in said production line;

wherein said manufacturing execution system uses said production capacities generated by said simulating system to create a routing schedule for said production inputs and said product lots;

wherein said manufacturing execution system scans generated routes for equipment in said production line without a determined production capacity to determine potential problem areas in said generated routes.

5. A modeling and manufacturing execution method comprising:

automatically controlling routing of product lots and production inputs in a manufacturing production line with a manufacturing execution system based on a production scheduling model;

providing feedback data from said production line to said manufacturing execution system, said feedback data comprising operating parameters for equipment in said production line and identification of said equipment by type;

storing in a database said model, said feedback data and formulae for calculating a production capacity for each piece of said equipment based on said identified type of that piece of equipment and said operating parameters of that piece of equipment;

simulating operation of said production line with a simulation system according to said model and using said formulae to calculate said production capacities for said equipment in said production line; and

associating each formula in said database with a flag having at least two values;

a first of said values indicating that an associated formula is based on actual operation of equipment production of said production line;

a second of said values indicating that an associated formula is new and unproven.

6. The method of claim 5, wherein said flag has a third value indicating that said simulating system should retain an associated formula in said database, but should ignore said associated formula in performing simulations.

8. The method of claim 5, preventing a first formula with a flag of said first value and a second formula with a flag of said second value from being retained in said database where both said first and second formulas would be indicated for use in response to a given set of said feedback data.

7. A modeling and manufacturing execution method comprising:

automatically controlling routing of product lots and production inputs in a manufacturing production line with a manufacturing execution system based on a production scheduling model;

providing feedback data from said production line to said manufacturing execution system, said feedback data comprising operating parameters for equipment in said production line and identification of said equipment by type;

storing in a database said model, said feedback data and formulae for calculating a production capacity for each piece of said equipment based on said identified type of that piece of equipment and said operating parameters of that piece of equipment;

simulating operation of said production line with a simulation system according to said model and using said formulae to calculate said production capacities for said equipment in said production line;

generating a routing schedule for said production inputs and said product lots with said manufacturing execution system using said production capacities generated by said simulation system; and

scanning generated routes for equipment in said production line without a determined production capacity to determine potential problem areas in said generated routes.