Solar cell and fabrication method thereof
First Claim
1. A solar cell comprising:
- a p type semiconductor crystal substrate at a first concentration,an n type diffusion layer formed at a light receiving side of said substrate,p type diffusion layers at a second concentration formed locally at a side opposite to the light receiving side of said semiconductor substrate,a layer having a crystal defect or being amorphous by ion implantation, formed at a region between said locally formed p type diffusion layers, andelectrodes connected to the respective diffusion layer;
wherein the second concentration is higher than the first concentration.
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Accused Products
Abstract
In a solar cell, a crystal defect layer by ion implantation or an amorphous layer by ion implantation is formed between p type diffusion layers provided in an island-like manner at a side opposite to a light receiving surface of a low concentration p type semiconductor single crystalline substrate. The element of the ion implantation may be at least one selected from the group consisting of hydrogen, silicon, germanium, fluorine, oxygen and carbon. The constituent substance of the semiconductor substrate, such as Si is preferably used for the ion implantation. In such a solar cell structure having the crystal defect or amorphous layer, relatively long wavelength light that could not effectively be utilized in the prior art solar cell may be utilized so that the photoelectric conversion efficiency may be improved.
63 Citations
33 Claims
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1. A solar cell comprising:
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a p type semiconductor crystal substrate at a first concentration, an n type diffusion layer formed at a light receiving side of said substrate, p type diffusion layers at a second concentration formed locally at a side opposite to the light receiving side of said semiconductor substrate, a layer having a crystal defect or being amorphous by ion implantation, formed at a region between said locally formed p type diffusion layers, and electrodes connected to the respective diffusion layer; wherein the second concentration is higher than the first concentration. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A solar cell comprising:
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a p type semiconductor crystal substrate at a first concentration, p type diffusion layers at a second concentration and n type diffusion layers, which are locally formed and spaced apart at a side opposite to a light receiving surface of said semiconductor substrate, a layer having a crystal defect or being amorphous by ion implantation, formed between said locally formed diffusion layers, and electrodes connected with respect to the respective diffusion layers at the side opposite to the light receiving surface; wherein the second concentration is higher than the first concentration. - View Dependent Claims (9, 10, 11, 12, 13)
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14. A solar cell comprising:
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a p type semiconductor crystal substrate at a first concentration, an n type diffusion layer formed at a light receiving side of said substrate, p type diffusion layers at a second concentration formed locally at a side opposite to the light receiving side of said substrate, an n type diffusion layer present in an electrically floating state at a region between said locally formed p type diffusion layers, a layer having a crystal defect or being amorphous by ion implantation, formed at a region between said locally formed p type diffusion layers at the side opposite to the light receiving side, and electrodes connected respectively to said n type diffusion layer at the light receiving side and said p type diffusion layers at the side opposite to the light receiving side; wherein the second concentration is higher than the first concentration. - View Dependent Claims (15, 16, 17, 18, 19)
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20. A solar cell comprising:
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a p type semiconductor crystal substrate at a first concentration, an n type diffusion layer formed at a light receiving side of said substrate, p type diffusion layers at a second concentration and n type diffusion layers which are locally formed and spaced apart at the side opposite to the light receiving side of said substrate, a layer having a crystal defect or being amorphous by ion implantation, formed between said locally formed diffusion layers, and electrodes provided respectively at said n type diffusion layers at the light receiving side and at the opposite side, and said p type diffusion layers at the side opposite to the light receiving side; wherein the second concentration is higher than the first concentration. - View Dependent Claims (21, 22, 23, 24, 25, 31, 33)
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26. A method of fabricating a solar cell comprising the steps of:
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forming an n type diffusion layer at a light receiving side of a semiconductor crystal substrate that includes first conductivity type impurities at a first concentration, locally forming p type diffusion layers at a second concentration at an opposite side to the light receiving side of said substrate, forming a layer having a crystal defect or an amorphous layer by ion implantation at a region between said locally formed p type diffusion layers, and forming electrodes respectively to said n type diffusion layer at the light receiving side and to said p type diffusion layers at an opposite side to the light receiving side; wherein the second concentration is higher than the first concentration. - View Dependent Claims (27)
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28. A method of fabricating a solar cell comprising the steps of:
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forming an n type diffusion layer at a light receiving side of a p type semiconductor crystal substrate at a first concentration, locally forming p type diffusion layers at a second concentration at a side opposite to said light receiving side, forming an n type diffusion layer present in an electrically floating state at a region between said locally formed diffusion layers, forming a layer having a crystal defect or an amorphous layer by ion implantation at a region between said locally formed p type diffusion layers, and forming electrodes respectively to said n type diffusion layer at said light receiving side and to said p type diffusion layers at said side opposite to said light receiving side; wherein the second concentration is higher than the first concentration. - View Dependent Claims (29)
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30. A method of fabricating a solar cell comprising the steps of:
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forming an n type diffusion layer at a light receiving side of a p type semiconductor crystal substrate at a first concentration, locally forming p type diffusion layers at a second concentration at a side opposite to said light receiving side, locally forming n type diffusion layers between said locally formed p type diffusion layers, forming a layer having a crystal defect or an amorphous layer by ion implantation at a region between said locally formed p and n type diffusion layers, and forming electrodes to said n type diffusion layer at the light receiving side and said n type diffusion layers and said p type diffusion layers at said side opposite to said light receiving side; wherein the second concentration is higher than the first concentration.
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32. A method of fabricating a solar cell comprising the steps of:
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locally forming type diffusion layers at a second concentration at a side opposite to a light receiving side of a p type semiconductor crystal substrate at a first concentration, locally forming an n type diffusion layer between said locally formed p type diffusion layers, forming a layer having a crystal defect or an amorphous layer by ion implantation at a region between said locally formed p and n type diffusion layers, and forming electrodes respectively to said p type diffusion layers and said n type diffusion layer at said side opposite to said light receiving side; wherein the second concentration is higher than the first concentration.
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Specification