Latching microaccelerometer

• US 6,130,464 A
• Filed: 09/08/1997
• Issued: 10/10/2000
• Est. Priority Date: 09/08/1997
• Status: Expired due to Fees

• Current Assignee: Roxburgh Limited
• Original Assignee: Roxburgh Limited
• Inventors: Carr, William N.
• Primary Examiner(s): CRANE, SARA W
• Application Number:
  US08/925,202
• Time in Patent Office: 1,128 Days
• Field of Search: 257/415, 257/418, 337/70, 337/77, 337/298, 73/488, 73/491, 73/492, 73/514.15
• US Class Current: 257/417
• CPC Class Codes: G01P 15/036 for indicating predetermined acceleration values
• CPC Class Codes: G01P 15/06 using members subjected to a permanent deformation
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: H01H 2001/0047 operable only by mechanical latching

Abstract

A surface micromachined microaccelerometer includes a substrate which has a surface plane, and a cantilever formed on the substrate with a fixed end and a free end, the fixed end being anchored to the substrate. The cantilever includes a mass fixed along the length of the cantilever. A cooperating device reads out the occurrence of an acceleration event when the free end of the cantilever has moved to a predetermined position. The cooperating device may be fixed or an opposing co-aligned cantilever structure. In a first embodiment, the cooperating device takes the form of a fixed structure having slots in which the tip of the cantilever is selectively retained. A further embodiment configures the cooperating device as an overlapping opposed cantilever. A further feature of the invention enables a reset function of a latched cantilever and comprises a pair of layers which when energized cause a cantilever to be suitably deflected so as to return from the latched state back to the unlatched state.

Claims

1. A microaccelerometer device for indicating an acceleration event comprising:

a substrate having a surface plane;

a first cantilever formed from a material layer deposited on said substrate and having a fixed end and a free end, the fixed end being anchored to said substrate, said first cantilever having a mass affixed thereto;

latch means formed from a material layer deposited on said substrate for unlatching said first cantilever in a first position thereof and, for latching said first cantilever when the free end of said first cantilever has moved to a predetermined position, to indicate an occurrence of an acceleration event;

conductor means coupled between said latch means and said first cantilever for enabling dispatch therefrom of a signal indication of a latched state or an unlatched state of said first cantilever; and

stop means positioned to confront said mass for controlling unwanted movement of said first cantilever in a direction opposite to a direction of the movement being read out.

2. A microaccelerometer device as defined in claim 1, wherein said microaccelerometer device is formed by surface micromachining of said substrate and material layers deposited on said substrate.

3. A microaccelerometer device as defined in claim 1, wherein the first cantilever lies parallel to the surface plane of the substrate and said substrate is positioned so that an acceleration event causes movement of said first cantilever in a direction that is lateral with respect to said surface plane.

4. A microaccelerometer device as defined in claim 1, wherein the first cantilever lies parallel to the surface plane of the substrate and said substrate is positioned so that an acceleration event causes movement of said first cantilever in a direction that is orthogonal to said surface plane.

5. A microaccelerometer device as defined in claim 1, wherein said latch means is a fixed structure having a body portion and projections therefrom defining a plurality of notches in which the free end of the first cantilever can be selectively retained.

6. A microaccelerometer device as defined in claim 1, wherein said latch means is a second cantilever having a fixed end and a free end, the free end of said second cantilever confronting and overlapping the free end of the first cantilever.

7. A microaccelerometer device as defined in claim 6, wherein said first cantilever and second cantilever are oriented so that long axes thereof are positioned in a parallel fashion.

8. A microaccelerometer device as defined in claim 7, wherein a plurality of associated ones of first cantilevers and second cantilevers are oriented in a radial fashion about a point on said substrate, thereby enabling a sensing of acceleration events along a plurality of axes parallel to the surface of the substrate.

9. A microaccelerometer device as defined in claim 1, further comprising:

reset means for returning said first cantilever to an unlatched state, actuation of said reset means causing said first cantilever to bend away from said substrate surface plane so as disengage the free end thereof from said latch means and allow the first cantilever to return to the unlatched state.

10. A microaccelerometer device as defined in claim 9, wherein said reset means comprises:

plural material layers evidencing different thermal coefficients of expansion; and

means for heating said plural layers to cause a flexure thereof and a flexure of said first cantilever.

11. A microaccelerometer device as defined in claim 9 wherein said reset means comprises:

multiple material layers including a sandwich with two opposing conducting electrodes disposed on a piezoelectric film; and

means for applying a voltage to said conducting electrodes to cause a flexure of said piezoelectric film and a flexure of said first cantilever.

12. A microaccelerometer device as defined in claim 7, further comprising:

reset means for returning said first cantilever to an unlatched state, actuation of said reset means causing at least one of said first cantilever or second cantilever to bend away from said substrate surface plane so as disengage a latched free end thereof and allow the first cantilever to return to the unlatched state.

13. A microaccelerometer device as defined in claim 12, wherein said reset means comprises:

plural material layers evidencing different thermal coefficients of expansion; and

means for heating said plural layers to cause a flexure thereof and a flexure of an associated cantilever.

14. A microaccelerometer device as defined in claim 13 wherein said reset means comprises:

multiple material layers including a sandwich with two opposing conducting electrodes disposed on a piezoelectric film; and

means for applying a voltage to said conducting electrodes to cause a flexure of said piezoelectric film and a flexure of said first cantilever.

15. A microaccelerometer device for indicating an acceleration event comprising:

a substrate having a surface plane;

a cantilever formed from a material layer on said substrate and having a fixed end and a free end, the fixed end being anchored to said substrate;

actuating means for moving said cantilever responsive to an acceleration event such that said cantilever bends transversely out of said surface plane of said substrate;

latch means formed from a material layer deposited on said substrate for latching the free end of said cantilever prior to occurrence of an acceleration event, said latch means configured as a fixed structure having a body portion and projection therefrom defining at least one notch in which the free end of the cantilever can be retained; and

means for reading out the occurrence of an acceleration event when the free end of said cantilever has moved to an unlatched position.

16. A microaccelerometer device as defined in claim 15, in which the length and width of the cantilever lies in the substrate surface plane, and the movement of said cantilever is orthogonal with respect to said surface plane.

17. A microaccelerometer device as defined in claim 15, further comprising:

reset means for returning said cantilever to a latched state, actuation of said reset means causing a portion of said cantilever to bend away from said substrate surface plane so as re-engage the free end thereof with said latch means.