Semiconductor photovoltaic diffractive resonant optical cavity infrared detector

• US 6,133,570 A
• Filed: 03/15/1994
• Issued: 10/17/2000
• Est. Priority Date: 03/15/1994
• Status: Expired due to Term

• Current Assignee: Lockheed Martin Vought Systems Corp (Martin Marietta Corporation)
• Original Assignee: Lockheed Martin Corporation (Martin Marietta Corporation)
• Inventors: Schimert, Thomas Robert, Eden, Dayton D.
• Primary Examiner(s): Moskowitz, Nelson
• Application Number:
  US08/218,472
• Time in Patent Office: 2,408 Days
• Field of Search: 250/338.1, 257/53
• US Class Current: 250/338.1
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: H01L 27/146 Imager structures
• CPC Class Codes: H01L 31/02966 including ternary compounds, e.g. HgCdTe
• CPC Class Codes: H01L 31/0352 characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
• CPC Class Codes: H01L 31/035236 Superlattices; Multiple quantum well structures
• CPC Class Codes: H01L 31/103 the potential barrier being of the PN homojunction type

Abstract

An infrared detector cell includes a plurality of uniformly spaced linear segments, which make up an optical grating. Each segment is selectively doped across its width to form a photovoltaic diode. The linear segments are ohmically connected between electrical conductors to produce a single cell detection signal. The cell comprises a diffractive resonant optical cavity. An array of cells can produce an infrared image. Cell configurations are illustrated for receiving both single dimension and linearly polarized radiation and two-dimension unpolarized radiation.

Claims

1. A photovoltaic diffractive resonant optical cavity detector cell for detecting incident infrared radiation in a selected bandwidth range defined by a first wavelength and a second, longer wavelength, comprising:

a plurality of parallel, periodically spaced, elongate, photovoltaic segments having a periodic spacing which is approximately equal to or less than said first wavelength of said infrared radiation, each said segment including a first portion having a first conductivity type and a second portion having a second conductivity type, each said segment having a p-n junction between said first and said second portions and said p-n junction extending substantially along the length of the segment,

a first electrical conductor interconnecting said first portions of said segments and a second electrical conductor interconnecting said second portions of said segments,

a planar reflector for reflecting said infrared radiation, said reflector being parallel with and offset from said photovoltaic segments, wherein the distance from said planar reflector to an upper surface of said segments is approximately an odd multiple of a quarter of the effective wavelength of said incident infrared radiation, and

wherein said detector cell produces a detection signal between said first and second electrical conductors in response to reception of said incident infrared radiation.

2. A detector cell as recited in claim 1 wherein said first electrical conductor includes interconnected strips of a conductive layer contacting said first portions of said photovoltaic segments.

3. A detector cell as recited in claim 2 wherein said first conductor includes a metallic conductor layer formed in contact with at least a part of said interconnected strips of said conductive layer.

4. A detector cell as recited in claim 1 wherein said second electrical conductor comprises a planar conductive layer together with said planar reflector.

5. A detector cell as recited in claim 1 including an electrically conductive spacer layer in contact between said second portions of said photovoltaic segments and said planar reflector.

6. A detector cell as recited in claim 1 wherein said first electrical conductor includes a transverse segment which is structurally similar to each of said photovoltaic segments and is electrically connected to common ends of said photovoltaic segments, and said first electrical conductor includes an electrically conductive strip layer in electrical contact with said first portions of said photovoltaic segments.

7. A detector cell as recited in claim 1 wherein said first electrical conductor comprises a group of interconnected planar conductive strips fabricated on and electrically contacting said first portions of said photovoltaic segments.

8. A detector cell as recited in claim 1 wherein said second electrical conductor comprises a planar conductive strip fabricated in contact with and electrically contacting said second portions of said photovoltaic segments.

9. A detector cell as recited in claim 8 including an insulative layer between said reflector and substantial parts of said second portions of said photovoltaic segments, wherein said reflector is not in electrical contact with said planar conductive strip.

10. A detector cell as recited in claim 1 including a planar substrate bonded to a planar surface of said reflector opposite said photovoltaic segments.

11. A detector cell as recited in claim 1 including a passivation layer covering exposed surfaces of said photovoltaic segments and said first electrical conductor.

12. A detector cell as recited in claim 1 wherein said photovoltaic segments are coplanar.

13. A photovoltaic diffractive resonant optical cavity detector cell for detecting incident infrared radiation in a selected bandwidth range defined by a first wavelength and a second, longer wavelength, comprising:

a plurality of parallel, periodically spaced, elongate, photovoltaic segments having a periodic spacing which is approximately equal to or less than said first wavelength of said infrared radiation, each said segment including a first portion having a first conductivity type and a second portion having a second conductivity type, each said segment having a p-n junction between said first and second portions and extending substantially along the length of the segment,

a plurality of first linear conductor segments positioned respectively on and electrically contacting said first portions of said photovoltaic segments, and at least one second linear conductor segment contacting and electrically interconnecting said first linear conductor segments,

a planar, electrically conductive layer contacting and electrically interconnecting said second portions of said photovoltaic segments,

a conductive, planar reflector for reflecting said infrared radiation, said reflector physically and electrically contacting said planar electrically conductive layer, and

wherein said detector cell produces a detection signal between said electrically interconnected first linear conductor segments and said conductive reflector in response to said incident infrared radiation.

14. A detector cell as recited in claim 13 wherein a reflective surface of said reflector is parallel with and offset from a plane which includes an upper surface of said photovoltaic segments, and the distance between said reflective surface and said plane is approximately an odd multiple of a quarter of the effective wavelength of said incident infrared radiation.

15. A detector cell as recited in claim 13 including a planar substrate bonded to a planar surface of said reflector opposite said conductive layer.

16. A detector cell as recited in claim 13 including a passivation layer covering exposed surfaces of said photovoltaic segments, said first conductor segments, said second conductor segment and said conductive layer.

17. A detector cell as recited in claim 13 including a metallic conductor line formed in physical and electrical contact with said second linear conductor segment.

18. A detector cell as recited in claim 13 wherein said photovoltaic segments are coplanar.

19. A photovoltaic diffractive resonant optical cavity detector cell for detecting incident infrared radiation in a selected bandwidth range defined by a first wavelength and a second, longer wavelength, comprising:

a plurality of parallel, periodically spaced, elongate, first photovoltaic segments having a periodic spacing which is approximately equal to or less than said first wavelength (C) of said infrared radiation, each said first photovoltaic segment including a first portion having a first conductivity type and a second portion having a second conductivity type, each said first segment have a p-n junction between the respective first and second portions and extending substantially along the length of the segment,

a plurality of parallel, periodically spaced, elongate, second photovoltaic segments having a periodic spacing which is approximately equal to or less than said first wavelength of said infrared radiation, each said second photovoltaic segment including a first portion having a first conductivity type and a second portion having a second conductivity type, each said second segment having a p-n junction between the first and second portions of the respective second segment and extending along the length of the respective second segment,

said second photovoltaic segments being positioned transverse to said first photovoltaic segments wherein said first and second photovoltaic segments form a two-dimensional grid,

said first portions of said first photovoltaic segments being electrically connected to said first portions of said second photovoltaic segments and said second portions of said first photovoltaic segments being electrically connected to said second portions of said second photovoltaic segments,

a plurality of first linear conductor segments positioned on and electrically contacting said first portions of said first photovoltaic segments and a plurality of second linear conductor segments positioned on and electrically contacting said first portions of said second (C) photovoltaic segments, said first linear conductor segments being electrically connected to said second linear conductor segments,

a planar, electrically conductive layer contacting and electrically interconnecting said second portions of said first and second photovoltaic segments,

a conductive, planar reflector for reflecting said infrared radiation, said reflector physically and electrically contacting said planar electrically conductive layer, and

wherein said detector cell produces a detection signal between said electrically interconnected first and second linear conductor segments and said conductive reflector in response to said incident infrared radiation.

20. A detector cell as recited in claim 19 wherein a reflective surface of said reflector is parallel with and offset from a plane which includes an upper surface of said first and second photovoltaic segments, and the distance between said reflective surface and said plane is an odd multiple of a quarter of the effective wavelength of said incident infrared radiation.

21. A detector cell as recited in claim 19 including a planar substrate bonded to a planar surface of said reflector opposite said conductive layer.

22. A detector cell as recited in claim 19 including a passivation layer covering exposed surfaces of said first and second photovoltaic segments, said first and second linear conductor segments and said conductive layer.

23. A detector cell as recited in claim 19 wherein said first and second photovoltaic segments are coplanar.